Products E-Beam Resist

On this page, you will find short information on E-Beam Resists.

ResistProperties
AR-PC 5090 / 5091 (Electra 92)conductive protective coating for non-novolac based e-beam resists
AR-P 610highest resolution, process-stable, saver solvent methoxypropanole
AR-P 630 … 670highest resolution, process stable, solvent chlorobenzene
CSAR 62 (AR-P 6200)highest resolution, high sensitivity, plasma etching-resistant
AR-P 6500thick films up to 250 μm; synchrotron
AR-P 7400mix&match, high resolution, short writing times
AR-N 7500, 7520mix&match, high resolution, plasma etching resistent
AR-N 7700, 7720CAR, high resolution, steep gradation
AR-P 8100 (Phoenix 81)Thermal Resists, NanoFrazor