42nd Issue of the AR NEWS
October 2020
Welcome to the 42nd issue of the AR NEWS. Once again, we would like to inform you about the further development of our company and the current research projects.
Content
1. Prime Minister Dietmar Woidke visits Allresist in times of Covid-19
2. Higher shelf live and more sensitive HSQ-alternative Medusa 82 for grayscale
lithography
3. Medusa for UV lithography
4. Thermally structurable resists
