New environmentally friendly developer for PMMA resists AR 600-57

Exceptionally we present a new PMMA developer in the “Resist of the month” section today, because its potential possibilities will probably also inspire our users. This developer is a mixture of isopropanol and water – which may sound surprising at first, since both components individually do not attack PMMA layers. There is however an optimal mixing ratio where the required radiation dose for PMMA resists approximately corresponds to the dose of the conventional developers AR 600-55 and AR 600-56 (MIBK/IPA). Due to the gentle development (no swelling occurs), usually also a larger process window is achieved.

These investigations in addition take into account the fact that MIBK will be classified as a hazardous substance as of the end of 2022. With the new mixture, we offer a developer that is not harmful to health and also significantly more advantageous in environmental terms.

The technological and eco-friendly aspects of the new developer AR 600-57 have led us to vote this developer as “Resist” of the month.

PMMA two-layer system, developed with AR 600-57