Medusa 82 with photoacid generator (PAG)
One disadvantage of HSQ and Medusa 82 is the comparably low sensitivity, which can however be increased by an addition of photoacid generators.
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One disadvantage of HSQ and Medusa 82 is the comparably low sensitivity, which can however be increased by an addition of photoacid generators.
Once again Allresist participated in the MNE with a large, attractive booth and new innovations. As in past years, the interest of the conference participants in our diverse new developments was great. The absolute highlight however was the introduction of our Medusa 82, an excellent alternative to HSQ resists.
The basic principle of laser ablation is that laser irradiation of a certain wavelength introduces so much energy into the resist material which is modified for ablation that the resist polymer is destroyed and then vaporizes as low molecular weight fragments.
In the final stage of the Eurostar PPA-Litho project which was aimed to develop the resist Phoenix, we achieved to generate far more stable PPA polymers by optimizing the synthesis procedure. Pure polyphthalaldehydes which were subjected to a “stress test” for 14 days at 37 °C showed no decomposition. These resists can thus be shipped without cooling; this however only applies to pure PPA polymers.
Our research team successfully developed a negative resist with high resolution and plasma etching stability in oxygen: Medusa 82. Already with the first samples, it was possible to achieve the properties of HSQ.
Allresist offers the protective coating SX AR-PC 5000/40 for HF and KOH etchings already for a few years. Layers of 5 μm are able to withstand a 48 % hydrofluoric acidic solution for several hours. Also 40 % KOH solutions for silicon etchings do not attack the layer.
The basic idea behind dyed resists developed within the scope of the Photoenco project (June 2016 – May 2019) was that dyes are mixed into the polymer matrix of the resist which then either change their colour or become colourless upon irradiation.
Our research team successfully developed a negative resist with high resolution and plasma etching stability in oxygen. Already with the first samples, it was possible to achieve the properties of HSQ.
Allresist attended the “triple-beam” conference EIPBN 2018 for the first time. Matthias Schirmer and Dr. Christian Kaiser answered many inquiries at the exhibition stand, especially questions regarding electron beam resists.
Anisole PPA solutions can be coated on PMMAcoMA 33 (AR-P 617). The single layers add up in this case; no mixing of layers occurs, which is a decisive prerequisite to realise defined 2- or also 3-layer systems.
Since 1992, we provide our customers with high quality products at moderate prices. Due to an efficient research department and our “close ear“ to the customer, we quickly respond to the needs of the market and consistently offer product innovations.
Allresist GmbH
Am Biotop 14
15344 Strausberg
Germany
Tel: +49 3341 – 35 93 0
Fax: +49 3341 – 35 93 29
E-Mail: info(a)allresist.de
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