Resist of the month April 2013: Positive e-beam resist CSAR 62 – an alternative to ZEP 520 Users cherish the specific properties of ZEP 520, while service and prices are rather feared.
Content:
1. Recognition for the Ludwig Erhard Prize winner Allresist
2. CSAR 62 – the future alternative for the ZEP resist
3. NIR-resist in the development – first successes
Resist of the month January 2013: Negative p hotoresists SX AR-N 4340/8 – a resist for laser interference lithography (LIL) Well-ordered structures across an entire wafer can be produced (see image 3)
Content:
1. 20 years of Allresist – a development from MBO to a business of excellence
2. Successful assessment during a site visit for the Ludwig Erhard Prize
3. VEGAS project submitted
4. Our new developments – first results
Resist of the month October 2012: Negative photoresists AR-N 4400 – with optimized bake regime For the new project VEGAS (see AR NEWS, 25 th issue, October 2012), columnar resist structures with a thickness of 10 to up to 60 µm are required.
Content:
1. Allresist is now employee champion and applies for the Ludwig Erhard price
2. Results of the new e-beam resist AR-N 7520
3. NIR-coatings in development – fist successes
4. Our new developments – first results