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You are here: Resist Wiki1 / E-Beam Resist2 / FAQ

11. How high is the solvent resistance of e-beam resist films?

With respect to the source materials used, e-beam resists fall into two different categories: PMMA resists (AR-P 6000) Novolak resists (AR-N/P 7000) » The general rule is that with increasing bake-

https://www.allresist.com/wp-content/uploads/sites/2/2020/02/logo_allresist_en.png 0 0 AllAdmin https://www.allresist.com/wp-content/uploads/sites/2/2020/02/logo_allresist_en.png AllAdmin2008-08-13 09:10:352020-03-04 14:48:4611. How high is the solvent resistance of e-beam resist films?

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