Adhesion promoter HMDS and diphenylsilanedio (AR 300-80)

The adhesion of resists to different substrates varies. Many substrates like e.g. silicon, silicon nitride and base metals (like aluminium, copper) show generally good resist adhesion features,

Other resist components

Solvents are the main component of all resists, with solvent contents ranging from 50% (thick resists) to up to 99% (spray resists). The first resists developed before 1980 still contained the health-