Highly sensitive e-beam resist AR-P 617 (PMMA-copolymer)
The copolymer composed of methyl methacrylate and methacrylic acid is, in contrast to the pure PMMAs, able to form a 6-membered ring during thermal loading.
The copolymer composed of methyl methacrylate and methacrylic acid is, in contrast to the pure PMMAs, able to form a 6-membered ring during thermal loading.