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You are here: Resist Wiki1 / z_AR-P 617

Highly sensitive e-beam resist AR-P 617 (PMMA-copolymer)

The copolymer composed of methyl methacrylate and methacrylic acid is, in contrast to the pure PMMAs, able to form a 6-membered ring during thermal loading.

https://www.allresist.com/wp-content/uploads/sites/2/2020/02/logo_allresist_en.png 0 0 AllAdmin https://www.allresist.com/wp-content/uploads/sites/2/2020/02/logo_allresist_en.png AllAdmin2016-04-13 13:34:112022-03-02 12:52:43Highly sensitive e-beam resist AR-P 617 (PMMA-copolymer)

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