Thermostable photoresists
Many applications demand coatings with excellent thermal stability. Structures of the temperature-stable negative resist SX AR-N 4340/6 are able to withstand temperatures of up to 350 °C with high shape accuracy
1. What are photoresists composed of, and how do they work?
Photoresists (also photo coatings) are primarily used in micro electronics and micro system technologies for the production of µm- and sub-µm structures. These resists are generally deposited by spin coating in a range between 250