Dear customers,
Today, we would like to inform you about the further development of our high-tech resists.
Medusa 82/ 82 PAG and new Medusa 84 SiH from 2025 onwards
In response to numerous customer requests, Allresist developed Medusa 82 and 82 PAG in 2021, an alternative to HSQ resist with significantly improved storage and process stability. Both resists are also highly resolution-capable (11 nm) and exhibit excellent etch and process stability.
In a subsequent R&D phase, Allresist enhanced the resolution and plasma etching resistance by optimising the synthesis of the HSQ polymer. The new chemical composition of Medusa 84 SiH exactly matches that of HSQ (hydroxysilsesquioxane). Furthermore, stabilisers now extend the shelf life of Medusa 84 SiH. Our new Medusa 84 SiH achieves resolutions of < 10 nm with higher plasma etching resistance and an improved adhesion compared to Medusa 82/82 PAG. Process and storage stability for low solid content variants such as SX AR-N 8400.04 (50 nm @ 4000 rpm) and SX AR-N 8400.08 (100 nm @ 4000 rpm) is guaranteed for 6 months when stored in a refrigerator (10 °C). Deep-freeze storage extends the shelf life further.
→ We recommend all customers using Medusa 82/82 PAG to switch to our new Medusa 84 SiH. In the current price list, Medusa 82 is accordingly listed as “discontinued product on request”. If you have any questions, please contact our customer advisors.
Allresist is now gathering customer feedback on whether higher solid-content variants of Medusa 84 SiH (e.g. 400 nm/ 4000 rpm) may be of interest in the future. Due to reduced storage stability with higher solids content, transport and storage under expensive freezing conditions are required. (Allresist is currently working on further optimisations.) If you are interested, please contact our customer advisors.
Electra AR-PC 5090 series and new AR-PC 5094 from 2025 onwards
Allresist has been offering the Electra protective coatings AR-PC 5090 and 5091 already since 2015, which effectively dissipate charges during e-beam lithography.
The AR-PC 5092, developed in 2022, surpasses its predecessors 5090 and 5091 in terms of coating quality and storage stability. Since many customers remain accustomed to 5090, we have decided to make a gradual transition and will list it as a product available on request starting in 2025.
In line with our continuous product improvements, Allresist has developed a universal Electra variant – the new AR-PC 5094 (SX AR-PC 5092.02/1) in 2024. It can be used to coat all e-beam resists 1) in the highest quality. This also includes the newly developed Medusa 84 SIH (HSQ) and CSAR 62.
1) except CAR. Allresist is currently developing a separate formula for CAR resists.
→ We thus recommend all customers using AR-PC 5090, 5091, or 5092 to switch to our new AR-PC 5094 at the same price. Our customer advisors will be happy to answer any questions you may have.
Phoenix 81 – ready-to-use liquid resist possibly available in 2026
Phoenix 81 is the thermally structurable standard resist for NanoFrazor. Due to its thermolability, Allresist has distributed the polymer in solid form since 2017.
Allresist is currently collecting customer feedback with regard to a potential demand for a ready-to-use, storage-stable liquid resist, which could be made feasible by synthesis optimisation. If this should be of interest and you have specific requirements for specific layer thicknesses (e.g. 80 nm @ 4000 rpm), please contact our customer advisors.
Warm regards from the Allresist customer advisors team