Electra 94 with extended shelf life – AR-PC 5094.02

Allresist continuously works on improving its products. With respect to the conductive resist Electra 92, customers place particular emphasis on a long shelf life in addition to its good application features. More than two years ago, long-term studies with new surfactants for Electra were initiated, and these investigations have now been completed.

Almost all formulations remained stable under normal refrigeration storage. The layer thickness, layer pattern, and conductivity remained unchanged. One surfactant mixture, which we recently began selling under the product name AR-PC 5094.02, exhibited particularly advantageous properties. Electra 94 is suitable for all e-beam resists, including Medusa 84 and HSQ, but not for positive CAR due to its low pH value.

Thanks to its excellent stability, we can now extend the shelf life of Electra 94 to two years. Ongoing continuous quality control will provide information on whether extending the shelf life beyond two years is possible.

Fig. 1: Medusa 84 stamps produced using AR-PC 5094.02 with an edge length down to 30 nm.

This success has prompted us to select Electra 94 as Resist of the Month for January.