Optimised Electra 92 – a new AR-PC 5092
The synthesis of Electra 92 could be significantly improved with our new filtration device “Tiffy”, since the new filtration method signifcantly reduces the required working time from 300 hours per batch to 10 hours. The water consumption dropped from 2000 liters to 15 liters per batch, which is another contribution to relieve our environment.
And, in addition to all these advantages, the optimisation process generated an improvement of the resist properties. We have now achieved a quality of aniline polymers that does not require the addition of isopropanol, which also increases the stability of AR-PC 5092 resist mixtures. Long-term tests demonstrated that the storage stability is significantly higher than with previous Electra variants. Furthermore, coating tests on all of our resists showed very good coating behaviour and we therefore even expect that this optimised AR-PC 5092 will replace other Electra variants in the future.
AR-PC 5092 on CSAR 92 on glass
A comprehensive analysis of the present results is currently summarised by our R&D team and will be published shortly.
This success, improving both the manufacturing process and product properties, prompted us to chose Electra 92 as resist of the month.
Test samples for interested customers are offered from now on upon request; please contact our customer advisors.