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Developer AR 600-549

For the development of e-beam resists films

Characterisation

  •  ultrapure, ultra-filtered (0.2 μm) solvent mixtures
  •  storage at 10-22 °C for 6 month
  • Main component(s): diethyl malonate/ anisole

Interesting Resist Wiki articles

Properties

  • Dichte bei 20 °C
    1,053 g/cm³
  • Brechzahl bei 20 °C
    1,417
  • Wassergehalt (max.)
    0,1 %
  • Flammpunkt
    85 °C

Available order sizes

  • 1 x 1 L

Please contact us for further requests.

Suitable products

E-Beam Resist AR-P 6200 series (CSAR 62)

High-contrast e-beam resists for the production of integrated circuits and masks

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