AR-P 1200 series
Products on request
(AR-P 1210, AR-P 1220, AR-P 1230)
Ready-to-use positive spray resists for various applications
Characterisation
- broadband UV, i-line, g-line
- AR-P 1210: for a uniform coverage of vertical trenches
- AR-P 1220: for etch profiles with 54° slopes
- AR-P 1230: for planar wafers
- good adhesion, smooth surface
- combination of novolac and naphthoquinone diazide
- safer solvent PGMEA as well as methyl ethyl ketone
Interesting Resist Wiki articles
Properties
AR-P 1210
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Film thickness: 4-10 µm
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Resolution: 1.0 µm
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Contrast: 3.0
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Flash point: -9 °C
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Storage temperature: 10-18 °C
AR-P 1220
AR-P 1230
* The products have a guaranteed shelf life of 6 months from the date of sale when stored according to instructions and can be used beyond that without guarantee until the label date.
Available order sizes
- Products on request
Suitable process chemicals
Structure resolution
Aluminium conductor paths after etching