Protective Coating AR-PC 5094.02 (Electra 94)
Conductive protective coating for e-beam resists
Top layer for the dissipation of e-beam charges on insulating substrates
Characterisation
- as protective coating, this resist is not sensitive to light / radiation
- thin, conductive layers for the dissipation of charges during electron exposure
- for coating on all AR e-beam resists, e.g. CSAR 62, Medusa 84 SiH, except CAR resists
- Improved properties compared to AR-PC 5092.02
- easy removal with water after exposure
- polyaniline-derivative dissolved in water
Properties
- Film thickness/4000 rpm (nm)42 nm
- Film thickness/1000 rpm (nm)100 nm
- Resolution (μm)1,2 S/m
- Storage 6 month (°C)8-12 °C
* The products have a guaranteed shelf life of 6 months from the date of sale when stored according to instructions and can be used beyond this without guarantee until the label date.
Suitable process chemicals
- RemoverDI-Wasser
Properties
Siemens star written on quartz with the new conductive coating Electra 94 (AR-PC 5094.02) spun on to prevent charge build-up. This variant of Electra 94, specially developed for HSQ, has excellent coating and adhesion properties.
© B. Drent, AMOLF NanoLab Amsterdam
Process parameters
- Substrate4“ Quarz-Wafer mit AR-P 662.04
- Coating2000 rpm, 60 nm auf E-Beamresist
- Tempering85 °C
Conductivity
Conductivity measurements of the spin-coated layers of the AR-PC 5094.02. With thinner layers, the resistance increases and the conductivity decreases.
Available order sizes
- 1 x 30 ml (experimental sample)
- 1 x 100 ml (experimental sample)
- 1 x 250 ml
- 1 x 1 L