Resist of the month July 2014: Electra 92
Resist of the month July 2014
Electra 92 – the new conductive protective coating SX AR-PC 5000/90.2 for e-beam applications
Allresist developed a novel polymer based on polyaniline in cooperation with the IDM e.V., Teltow. The new conductive protective coating SX AR-PC 5000/90.2 was already presented in issue 28 of the AR NEWS. Our optimisation work after first experiences reports of users have meanwhile been finalised so that we are now able to offer a very good conductive coating for the dissipation of charges during e-beam exposure.
The completion of work on Electra 92 which opens new possibilities of e-beam lithography for users prompted to choose SX AR-PC 5000/90.2 as resist of the month July 2014.
Fig.: 200nm Ti/gold squares, spacing 5µm on 1mm thick glass