Our new development SX AR-PC 5000/90.2 (Electra 92) is a conductive protective coating composed of water-based polyaniline derivatives and contains, in addition to surfactants, also a small amount of isopropanol to reduce the surface tension. SX AR-PC 5000/90.2 can be used just like SX AR-PC 5000/90.1 as conductive coating to avoid charges during e-beam lithography. These charges cause disturbing effects (distortions), especially in the case of quartz substrates and GaAs. Furthermore, SX AR-PC 5000/90.2 can, in contrast to SX AR-PC 5000/90.1, be easily removed with water even after intense irradiation. The conductive polymer of this resist shows only little tendency to form hardly soluble crosslinked structures.
The conductivity of films with different film thickness values can be determined by electric resistance measurements.
Fig. 1 Dependency of conductivity on the film thickness: ESPACER and SX AR-PC 5000/90.2 (Electra 92) in comparison
The conductivity considerably increases with increasing film thickness and is in a comparable range or, in the case of 50 nm films, almost the same as determined for the reference product: ESPACER of the Japanese manufacturer SHOWA DENKO.
Overview E-beam Other Resists