Semi-precious stones like sapphire or garnet increasingly gain in importance as substrates for semiconductor industry. Even though these materials have insulating properties, a patterning with electron beam lithography is nevertheless possible with the help of Electra. Mr. Chi Tang has been working since 2015 at the University of California with Electra 92. His specialty is the coating of PMMA on semi-precious stones such as garnet in a PMMA two-layer process. Since he started to work with SX AR-PC 5000/90.2, he is able to easily process his lift-off structures with the two-layer system.
Lift-off structures on garnet supported by Electra 92