The success story of electron beam lithography began in the 1980th with the development of the first PMMA resists. These resists are absolutely light-insensitive in the UV-wavelength range above 300 nm. Clean rooms in which e-beam lithography is performed with PMMA resists require therefore no yellow light.
We have already frequently been asked by e-beam users to also provide negative-tone resists which can be processed under white light conditions. Our negative e-beam resists of the series 7500 – 7700 are all also sensitive in the broadband UV (300 – 405 nm).
These resists are thus well suited for mix&match technologies (e-beam- and UV-lithography in a single process), but absolutely require yellow light. Employing new acid generators which are characterized by a UV-absorption < 280 nm, we developed the chemically enhanced e-beam resist SX AR-N 7700/46 which can also be processed under daylight conditions. Wafers coated with SX AR-N 7700/46 were openly placed in a white-light lab for several hours and then exposed and developed together with resist-coated wafers not subjected to daylight conditions before. Sensitivity and gradation were identical in both test series. [/av_textblock] [/av_two_third][av_one_third min_height='' vertical_alignment='' space='' custom_margin='' margin='0px' padding='0px' border='' border_color='' radius='0px' background_color='' src='' background_position='top left' background_repeat='no-repeat' animation='' mobile_display='' av_uid='av-qfi19'] [av_textblock size='' av-medium-font-size='' av-small-font-size='' av-mini-font-size='' font_color='' color='' id='' custom_class='' av_uid='av-7rhx' admin_preview_bg=''] Overview E-beam Negative [/av_textblock] [av_hr class='invisible' height='25' shadow='no-shadow' position='center' custom_border='av-border-thin' custom_width='50px' custom_border_color='' custom_margin_top='30px' custom_margin_bottom='30px' icon_select='yes' custom_icon_color='' icon='ue808' font='entypo-fontello' admin_preview_bg='' av_uid='av-1obh1'] [av_magazine link='category,105' heading='' date_filter='' date_filter_start='' date_filter_end='' date_filter_format='yy/mm/dd' first_big_pos='top' items='-1' paginate='' offset='0' heading_color='theme-color-highlight' heading_custom_color='#ffffff' heading_tag='' heading_class='' heading_link='manually,http://' alb_description='' id='' custom_class='' av_uid='av-90sb1' admin_preview_bg=''] [/av_one_third][/av_section]