The protective coating SX AR-PC 5000/90.1 is a conductive protective coating still in the experimental sample stage and intended to generate thin, conductive layers. SX AR-PC 5000/90.1 was specifically designed for a use on PMMA e-beam resists and serves to dissipate charges which develop during electron exposure. The resist is deposited by spin coating. Depending on the respective spin speed, a film thickness of 50 – 100 nm can be achieved. After exposure, the layer is removed with DI water. The resist is composed of a mixture of polythiophenes, polystyrene sulfonates and surfactants in an organic solvent mixture with isopropanol as main component.
Our new development SX AR-PC 5000/90.2 is a conductive protective water-based coating which is currently evaluated by our cooperation partners. The conductivity of SX AR-PC 5000/90.2 is — x times higher as compared to the conductivity of SX AR-PC 5000/90.1. When SX AR-PC 5000/90.1 is used, occasionally a cross-linking due to the intensive irradiation with electrons occurs which impedes a subsequent removal. This was however not observed for SX AR-PC 5000/90.2 and films can be removed with DI water without any problems.