{"id":7941,"date":"2017-07-27T12:45:15","date_gmt":"2017-07-27T10:45:15","guid":{"rendered":"https:\/\/www.allresist.de?post_type=portfolio&#038;p=7941"},"modified":"2022-07-06T09:17:09","modified_gmt":"2022-07-06T08:17:09","slug":"e-beam-resist-ar-p-639-series","status":"publish","type":"portfolio","link":"https:\/\/www.allresist.com\/portfolio-item\/e-beam-resist-ar-p-639-series\/","title":{"rendered":"E-Beam Resist AR-P 639 series"},"content":{"rendered":"<div id='av_section_1'  class='avia-section av-289dnr9-cf59f59cab5f076fa603304b86722343 main_color avia-section-default avia-no-shadow  avia-builder-el-0  el_before_av_section  avia-builder-el-first  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><main  role=\"main\" itemprop=\"mainContentOfPage\"  class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-7941'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-25y0479-1646ec1588baf0c4ef4b50ab22a7b737\">\n.flex_column.av-25y0479-1646ec1588baf0c4ef4b50ab22a7b737{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-25y0479-1646ec1588baf0c4ef4b50ab22a7b737 av_one_half  avia-builder-el-1  el_before_av_one_third  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-25ehyf9-ff216e2e2f6eaa46e8bedec118d26f15\">\n#top .av_textblock_section.av-25ehyf9-ff216e2e2f6eaa46e8bedec118d26f15 .avia_textblock{\nfont-size:17px;\n}\n<\/style>\n<section  class='av_textblock_section av-25ehyf9-ff216e2e2f6eaa46e8bedec118d26f15 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h1>E-Beam Resist AR-P 639 series<\/h1>\n<p><em>(AR-P 639.04)<\/em><\/p>\n<p>PMMA resist series 50K \u2013 950K for the production of integrated circuits and masks<\/p>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-23k9wt1-b29e3e39a3331647c2590c6befea0e19\">\n.flex_column.av-23k9wt1-b29e3e39a3331647c2590c6befea0e19{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-23k9wt1-b29e3e39a3331647c2590c6befea0e19 av_one_third  avia-builder-el-3  el_after_av_one_half  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><p><article  class='iconbox iconbox_left av-21q95j9-76da27b927c836ca6814020ba0727695 av-icon-style-no-border  avia-builder-el-4  el_before_av_icon_box  avia-builder-el-first '  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class=\"iconbox_content\"><header class=\"entry-content-header\"><div class=\"iconbox_icon heading-color\" aria-hidden='true' data-av_icon='\ue84d' data-av_iconfont='entypo-fontello'><\/div><h3 class='iconbox_content_title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2020\/03\/AR-P630-670_english_Allresist_product-information.pdf' title='Product information'  target=\"_blank\"  rel=\"noopener noreferrer\" >Product information<\/a><\/h3><\/header><div class='iconbox_content_container '  itemprop=\"text\" ><\/div><\/div><footer class=\"entry-footer\"><\/footer><\/article><br \/>\n<article  class='iconbox iconbox_left av-1ye2ld1-7900283f8430fbc3c2403dbe5741676e av-icon-style-no-border  avia-builder-el-5  el_after_av_icon_box  avia-builder-el-last '  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class=\"iconbox_content\"><header class=\"entry-content-header\"><div class=\"iconbox_icon heading-color\" aria-hidden='true' data-av_icon='\ue836' data-av_iconfont='entypo-fontello'><\/div><h3 class='iconbox_content_title '  itemprop=\"headline\" ><a href='#pcontact' title='Your request for this product' target=\"_blank\" rel=\"noopener noreferrer\">Your request for this product<\/a><\/h3><\/header><div class='iconbox_content_container '  itemprop=\"text\" ><\/div><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/p><\/div>\n\n<\/div><\/div><\/main><!-- close content main element --><\/div><\/div><div id='av_section_2'  class='avia-section av-1wzblr9-8dab49b70f9ca8f19379878f6b4f5319 alternate_color avia-section-default avia-no-shadow  avia-builder-el-6  el_after_av_section  el_before_av_section  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-7941'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1vr63j9-ef21984cfa051abeb0f710becbea6713\">\n.flex_column.av-1vr63j9-ef21984cfa051abeb0f710becbea6713{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-1vr63j9-ef21984cfa051abeb0f710becbea6713 av_one_half  avia-builder-el-7  el_before_av_one_half  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-1tecgz9-4d363db460743a2bb9137cab69885f5a '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h3>Characterisation<\/h3>\n<ul>\n<li class=\"p1\">e-beam, deep UV (248 nm)<\/li>\n<li class=\"p1\">very good adhesion to glass, silicon and metals<\/li>\n<li class=\"p1\">for planarization and multi-layer processes<\/li>\n<li class=\"p1\">highest resolution, high contrast<\/li>\n<li class=\"p1\">poly(methyl methacrylate) with diff. molecular weights<\/li>\n<\/ul>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1s746qt-64f057b805e76060b6875451681838e7\">\n.flex_column.av-1s746qt-64f057b805e76060b6875451681838e7{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-1s746qt-64f057b805e76060b6875451681838e7 av_one_half  avia-builder-el-9  el_after_av_one_half  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-1pfhanp-127e78d040354864daa4159a12808008 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h4>Interesting Resist Wiki articles<\/h4>\n<\/div><\/section><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1oeqf79-dc3d79a06be11ef2742fa11ff71a7f54\">\n#top .hr.hr-invisible.av-1oeqf79-dc3d79a06be11ef2742fa11ff71a7f54{\nheight:15px;\n}\n<\/style>\n<div  class='hr av-1oeqf79-dc3d79a06be11ef2742fa11ff71a7f54 hr-invisible  avia-builder-el-11  el_after_av_textblock  el_before_av_magazine '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<div  id=\"avia-magazine-1\"  class='av-magazine av-1ngghwl-09cc6b3542e26036fd30df4d8ce1d5ed  avia-builder-el-12  el_after_av_hr  avia-builder-el-last   avia-builder-el-12  el_after_av_hr  avia-builder-el-last ' ><div class='av-magazine-group sort_all'><article class='av-magazine-entry av-magazine-entry-id-5 av-magazine-format-standard av-magazine-type-post av-magazine-entry-1 av-magazine-entry-small '  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class=\"av-magazine-thumbnail\"><a href='https:\/\/www.allresist.com\/resist-wiki-what-are-e-beam-resists-composed-of-and-how-do-they-work\/' title='Link to: 1. What are e-beam resists composed of, and how do they work?' class='iconfont av-magazine-entry-icon' aria-hidden='true' data-av_icon='\ue864' data-av_iconfont='entypo-fontello'><\/a><\/div><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-23T06:32:47+01:00\" >23. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-what-are-e-beam-resists-composed-of-and-how-do-they-work\/' title='Link to: 1. What are e-beam resists composed of, and how do they work?'>1. What are e-beam resists composed of, and how do they work?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div><\/div><\/p><\/div>\n\n<\/div><\/div><\/div><!-- close content main div --><\/div><\/div><div id='av_section_3'  class='avia-section av-1ksbukl-bd931383af591af26ea58c487abc7291 main_color avia-section-default avia-no-shadow  avia-builder-el-13  el_after_av_section  el_before_av_section  avia-bg-style-parallax container_wrap fullsize'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-7941'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-5i5nol-99169bcbe1071b9c227eefdd6c948065\">\n.flex_column.av-5i5nol-99169bcbe1071b9c227eefdd6c948065{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-5i5nol-99169bcbe1071b9c227eefdd6c948065 av_one_half  avia-builder-el-14  el_before_av_one_half  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-1h8efth-d3741ae65f62a403c38c3af2be9389d3 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h3>Properties<\/h3>\n<\/div><\/section><br \/>\n<div  class='tabcontainer av-1gmo48l-2d0e63b06c328976b5d2751e85789b36 top_tab  avia-builder-el-16  el_after_av_textblock  avia-builder-el-last ' role='tablist'>\n<section class='av_tab_section av_tab_section av-638m7p-336663f933cff37c19dceb3990a32f78'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='tab active_tab' role='tab' tabindex='0' data-fake-id='#tab-id-1' aria-controls='tab-id-1-content'  itemprop=\"headline\" >AR-P 639.04<\/div><div id='tab-id-1-content' class='tab_content active_tab_content' aria-hidden=\"false\"><div class='tab_inner_content invers-color'  itemprop=\"text\" ><ul class=\"av-catalogue-list\">\n<li>\n<div class=\"av-catalogue-item\">\n<div class=\"av-catalogue-item-inner\">\n<div class=\"av-catalogue-title-container\">\n<div class=\"av-catalogue-title\">Film thickness\/ 4000 rpm: \u00a00,08 \u00b5m<\/div>\n<\/div>\n<div class=\"av-catalogue-content\"><\/div>\n<\/div>\n<\/div>\n<\/li>\n<li>\n<div class=\"av-catalogue-item\">\n<div class=\"av-catalogue-item-inner\">\n<div class=\"av-catalogue-title-container\">\n<div class=\"av-catalogue-title\">Resolution best value: \u00a0 \u00a0 6 nm<\/div>\n<\/div>\n<div class=\"av-catalogue-content\"><\/div>\n<\/div>\n<\/div>\n<\/li>\n<li>\n<div class=\"av-catalogue-item\">\n<div class=\"av-catalogue-item-inner\">\n<div class=\"av-catalogue-title-container\">\n<div class=\"av-catalogue-title\">Contrast: \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 7<\/div>\n<\/div>\n<div class=\"av-catalogue-content\"><\/div>\n<\/div>\n<\/div>\n<\/li>\n<li>\n<div class=\"av-catalogue-item\">\n<div class=\"av-catalogue-item-inner\">\n<div class=\"av-catalogue-title-container\">\n<div class=\"av-catalogue-title\">Flash point: \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 36 \u00b0C<\/div>\n<\/div>\n<div class=\"av-catalogue-content\"><\/div>\n<\/div>\n<\/div>\n<\/li>\n<li>\n<div class=\"av-catalogue-item\">\n<div class=\"av-catalogue-item-inner\">\n<div class=\"av-catalogue-title-container\">\n<div class=\"av-catalogue-title\">Storage 6 month: \u00a0 \u00a010 &#8211; 22 \u00b0C<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/li>\n<\/ul>\n<\/div><\/div><\/section>\n<\/div><\/p><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1dfx13p-390bda954bca07f0092bcfec844d9b61\">\n.flex_column.av-1dfx13p-390bda954bca07f0092bcfec844d9b61{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-1dfx13p-390bda954bca07f0092bcfec844d9b61 av_one_half  avia-builder-el-17  el_after_av_one_half  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1bcj4hh-1b39167f33324978d5ac6c5af70e1371\">\n#top .hr.hr-invisible.av-1bcj4hh-1b39167f33324978d5ac6c5af70e1371{\nheight:15px;\n}\n<\/style>\n<div  class='hr av-1bcj4hh-1b39167f33324978d5ac6c5af70e1371 hr-invisible  avia-builder-el-18  el_before_av_textblock  avia-builder-el-first '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<section  class='av_textblock_section av-4hda7p-bcbfba42fec05f42676585d936ec1fc5 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h3>Available order sizes<\/h3>\n<\/div><\/section><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-18mtw45-9ff1368333e3ca3ff4c4c11bc8df899f\">\n#top .hr.hr-invisible.av-18mtw45-9ff1368333e3ca3ff4c4c11bc8df899f{\nheight:15px;\n}\n<\/style>\n<div  class='hr av-18mtw45-9ff1368333e3ca3ff4c4c11bc8df899f hr-invisible  avia-builder-el-20  el_after_av_textblock  el_before_av_textblock '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<section  class='av_textblock_section av-16q541x-c8cb1acc8f0ef33f2c0fc515b8ca2679 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><ul>\n<li>1 x 100 ml (experimental sample)<\/li>\n<li>1 x 250 ml<\/li>\n<li>1 x 1 L<\/li>\n<li>6 x 1 L<\/li>\n<\/ul>\n<\/div><\/section><br \/>\n<article  class='iconbox iconbox_left av-14n7pkl-ba466fac82995006fb87e45675add4f7  avia-builder-el-22  el_after_av_textblock  avia-builder-el-last '  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class=\"iconbox_content\"><header class=\"entry-content-header\"><a href='#pcontact' title=''  class=\"iconbox_icon heading-color\" aria-hidden='true' data-av_icon='\ue836' data-av_iconfont='entypo-fontello'><\/a><\/header><div class='iconbox_content_container '  itemprop=\"text\" ><p>Please contact us for further requests.<\/p>\n<\/div><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/p><\/div><\/div><\/div><\/div><!-- close content main div --><\/div><\/div><div id='av_section_4'  class='avia-section av-128z2lh-088b21a9a30d670d4e06f984dac56ed3 alternate_color avia-section-default avia-no-shadow  avia-builder-el-23  el_after_av_section  el_before_av_section  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-7941'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-111pacl-bb7c8ba2a363505ad4123f0471cd0d89\">\n.flex_column.av-111pacl-bb7c8ba2a363505ad4123f0471cd0d89{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-111pacl-bb7c8ba2a363505ad4123f0471cd0d89 av_one_full  avia-builder-el-24  avia-builder-el-no-sibling  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-103qiad-547c0e9aa6ca6f1a0f2f441a6d8d0327 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h3>Suitable process chemicals<\/h3>\n<\/div><\/section><br \/>\n<div id='av-masonry-1' class='av-masonry av-xgufw5-2ffaf5ddddd9019d4c3c87b75942e285 noHover av-fixed-size av-large-gap av-hover-overlay-active av-masonry-animation-active av-masonry-col-4 av-caption-always av-caption-style- av-masonry-entries ' data-post_id=\"7941\"><div class=\"av-masonry-container isotope av-js-disabled\"><div class='av-masonry-entry isotope-item av-masonry-item-no-image '><\/div><a href=\"https:\/\/www.allresist.com\/portfolio-item\/adhesion-promoter-ar-300-80-new\/\"  id='av-masonry-1-item-8032' data-av-masonry-item='8032' class='av-masonry-entry isotope-item post-8032 portfolio type-portfolio status-publish has-post-thumbnail hentry portfolio_entries-process-chemicals-adhesions-promoter portfolio_entries-ar-br-5400 portfolio_entries-ar-n-2210 portfolio_entries-ar-n-2220 portfolio_entries-ar-n-2230 portfolio_entries-ar-n-4200 portfolio_entries-ar-n-4300 portfolio_entries-ar-n-4400 portfolio_entries-ar-n-4400-25 portfolio_entries-ar-n-4400-50 portfolio_entries-ar-n-4450 portfolio_entries-ar-n-7400 portfolio_entries-ar-n-7500 portfolio_entries-ar-n-7520 portfolio_entries-ar-n-7520-neu portfolio_entries-ar-n-7700 portfolio_entries-ar-n-7720 portfolio_entries-ar-p-1200 portfolio_entries-ar-p-3100 portfolio_entries-ar-p-3200 portfolio_entries-ar-p-3500 portfolio_entries-ar-p-3500t portfolio_entries-ar-p-3700 portfolio_entries-ar-p-3800 portfolio_entries-ar-p-5300 portfolio_entries-ar-p-5900 portfolio_entries-ar-p-617 portfolio_entries-ar-p-6200 portfolio_entries-ar-p-631-671 portfolio_entries-ar-p-632-672 portfolio_entries-ar-p-639-679 portfolio_entries-ar-p-6500 portfolio_entries-ar-p-8100 portfolio_entries-ar-pc-500 portfolio_entries-ar-u-4000 portfolio_entries-sx-ar-n-43407 portfolio_entries-sx-ar-n-4340-7 portfolio_entries-sx-ar-n-75301 portfolio_entries-sx-ar-n-77301 portfolio_entries-sx-ar-p-35006 portfolio_entries-sx-ar-p-35008 portfolio_entries-sx-ar-p-37404 portfolio_entries-sx-ar-pc-5000-41 portfolio_entries-sx-ar-pc-500080-2 portfolio_entries-sx-ar-pc-500082-7 portfolio_entries-x-ar-n-770030 portfolio_entries-x-ar-p-3220-7 portfolio_entries-x-ar-p-59004  av-masonry-item-with-image' title=\"Haftvermittler-Symbol\"   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='av-inner-masonry-sizer'><\/div><figure class='av-inner-masonry main_color'><div class=\"av-masonry-outerimage-container\"><div class='av-masonry-image-container' style=\"background-image: url(https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2020\/02\/Haftvermittler-Symbol.jpg);\"  title=\"Haftvermittler-Symbol\"  ><\/div><\/div><figcaption class='av-inner-masonry-content site-background'><div class='av-inner-masonry-content-pos'><div class='av-inner-masonry-content-pos-content'><div class='avia-arrow'><\/div><h3 class='av-masonry-entry-title entry-title '  itemprop=\"headline\" >Adhesion Promoter AR 300-80 new<\/h3><div class='av-masonry-entry-content entry-content'  itemprop=\"text\" >For improving the adhesive strength of photo and e-beam resists<\/div><\/div><\/div><\/figcaption><\/figure><\/a><!--end av-masonry entry--><a href=\"https:\/\/www.allresist.com\/portfolio-item\/developer-ar-600-55\/\"  id='av-masonry-1-item-7834' data-av-masonry-item='7834' class='av-masonry-entry isotope-item post-7834 portfolio type-portfolio status-publish has-post-thumbnail hentry portfolio_entries-ar-p-617 portfolio_entries-ar-p-631-671 portfolio_entries-ar-p-632-672 portfolio_entries-ar-p-639-679 portfolio_entries-process-chemicals-developer  av-masonry-item-with-image' title=\"Entwickler-Symbol\"   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='av-inner-masonry-sizer'><\/div><figure class='av-inner-masonry main_color'><div class=\"av-masonry-outerimage-container\"><div class='av-masonry-image-container' style=\"background-image: url(https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2020\/02\/Entwickler-Symbol.jpg);\"  title=\"Entwickler-Symbol\"  ><\/div><\/div><figcaption class='av-inner-masonry-content site-background'><div class='av-inner-masonry-content-pos'><div class='av-inner-masonry-content-pos-content'><div class='avia-arrow'><\/div><h3 class='av-masonry-entry-title entry-title '  itemprop=\"headline\" >Developer AR 600-55<\/h3><div class='av-masonry-entry-content entry-content'  itemprop=\"text\" >For the development of e-beam resists films<\/div><\/div><\/div><\/figcaption><\/figure><\/a><!--end av-masonry entry--><a href=\"https:\/\/www.allresist.com\/portfolio-item\/developer-ar-600-56\/\"  id='av-masonry-1-item-7836' data-av-masonry-item='7836' class='av-masonry-entry isotope-item post-7836 portfolio type-portfolio status-publish has-post-thumbnail hentry portfolio_entries-ar-p-631-671 portfolio_entries-ar-p-632-672 portfolio_entries-ar-p-639-679 portfolio_entries-ar-p-6500 portfolio_entries-process-chemicals-developer  av-masonry-item-with-image' title=\"Entwickler-Symbol\"   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='av-inner-masonry-sizer'><\/div><figure class='av-inner-masonry main_color'><div class=\"av-masonry-outerimage-container\"><div class='av-masonry-image-container' style=\"background-image: url(https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2020\/02\/Entwickler-Symbol.jpg);\"  title=\"Entwickler-Symbol\"  ><\/div><\/div><figcaption class='av-inner-masonry-content site-background'><div class='av-inner-masonry-content-pos'><div class='av-inner-masonry-content-pos-content'><div class='avia-arrow'><\/div><h3 class='av-masonry-entry-title entry-title '  itemprop=\"headline\" >Developer AR 600-56<\/h3><div class='av-masonry-entry-content entry-content'  itemprop=\"text\" >For the development of e-beam resists films<\/div><\/div><\/div><\/figcaption><\/figure><\/a><!--end av-masonry entry--><a href=\"https:\/\/www.allresist.com\/portfolio-item\/developer-x-ar-600-50-2\/\"  id='av-masonry-1-item-18198' data-av-masonry-item='18198' class='av-masonry-entry isotope-item post-18198 portfolio type-portfolio status-publish has-post-thumbnail hentry portfolio_entries-ar-p-631-671 portfolio_entries-ar-p-632-672 portfolio_entries-ar-p-639-679 portfolio_entries-ar-p-6500 portfolio_entries-process-chemicals-developer  av-masonry-item-with-image' title=\"Entwickler-Symbol\"   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='av-inner-masonry-sizer'><\/div><figure class='av-inner-masonry main_color'><div class=\"av-masonry-outerimage-container\"><div class='av-masonry-image-container' style=\"background-image: url(https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2020\/02\/Entwickler-Symbol.jpg);\"  title=\"Entwickler-Symbol\"  ><\/div><\/div><figcaption class='av-inner-masonry-content site-background'><div class='av-inner-masonry-content-pos'><div class='av-inner-masonry-content-pos-content'><div class='avia-arrow'><\/div><h3 class='av-masonry-entry-title entry-title '  itemprop=\"headline\" >Developer X AR 600-50\/2<\/h3><div class='av-masonry-entry-content entry-content'  itemprop=\"text\" >High-purity and ultra-fine filtered developer for selective T-gate applications<\/div><\/div><\/div><\/figcaption><\/figure><\/a><!--end av-masonry entry--><a href=\"https:\/\/www.allresist.com\/portfolio-item\/hmds-adhesion-promoter\/\"  id='av-masonry-1-item-10147' data-av-masonry-item='10147' class='av-masonry-entry isotope-item post-10147 portfolio type-portfolio status-publish has-post-thumbnail hentry portfolio_entries-process-chemicals-adhesions-promoter portfolio_entries-ar-br-5400 portfolio_entries-ar-n-2210 portfolio_entries-ar-n-2220 portfolio_entries-ar-n-2230 portfolio_entries-ar-n-4200 portfolio_entries-ar-n-4300 portfolio_entries-ar-n-4400 portfolio_entries-ar-n-4400-25 portfolio_entries-ar-n-4400-50 portfolio_entries-ar-n-4450 portfolio_entries-ar-n-7400 portfolio_entries-ar-n-7500 portfolio_entries-ar-n-7520 portfolio_entries-ar-n-7520-neu portfolio_entries-ar-n-7700 portfolio_entries-ar-n-7720 portfolio_entries-ar-p-1200 portfolio_entries-ar-p-3200 portfolio_entries-ar-p-3500 portfolio_entries-ar-p-3500t portfolio_entries-ar-p-3700 portfolio_entries-ar-p-3800 portfolio_entries-ar-p-5300 portfolio_entries-ar-p-5900 portfolio_entries-ar-p-617 portfolio_entries-ar-p-6200 portfolio_entries-ar-p-631-671 portfolio_entries-ar-p-632-672 portfolio_entries-ar-p-639-679 portfolio_entries-ar-p-6500 portfolio_entries-ar-p-8100 portfolio_entries-ar-pc-500 portfolio_entries-ar-u-4000 portfolio_entries-sx-ar-n-43407 portfolio_entries-sx-ar-n-75301 portfolio_entries-sx-ar-n-77301 portfolio_entries-sx-ar-p-35006 portfolio_entries-sx-ar-p-35008 portfolio_entries-sx-ar-p-37404 portfolio_entries-sx-ar-pc-500080-2 portfolio_entries-sx-ar-pc-500082-7 portfolio_entries-x-ar-n-770030 portfolio_entries-x-ar-p-3220-7 portfolio_entries-x-ar-p-59004  av-masonry-item-with-image' title=\"Haftvermittler-Symbol-500&#215;375\"   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='av-inner-masonry-sizer'><\/div><figure class='av-inner-masonry main_color'><div class=\"av-masonry-outerimage-container\"><div class='av-masonry-image-container' style=\"background-image: url(https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2020\/02\/Haftvermittler-Symbol-500x375-1.jpg);\"  title=\"Haftvermittler-Symbol-500&#215;375\"  ><\/div><\/div><figcaption class='av-inner-masonry-content site-background'><div class='av-inner-masonry-content-pos'><div class='av-inner-masonry-content-pos-content'><div class='avia-arrow'><\/div><h3 class='av-masonry-entry-title entry-title '  itemprop=\"headline\" >HMDS adhesion promoter<\/h3><div class='av-masonry-entry-content entry-content'  itemprop=\"text\" >For improving the adhesive strength of photo and e-beam resists<\/div><\/div><\/div><\/figcaption><\/figure><\/a><!--end av-masonry entry--><a href=\"https:\/\/www.allresist.com\/portfolio-item\/remover-ar-300-76\/\"  id='av-masonry-1-item-7430' data-av-masonry-item='7430' class='av-masonry-entry isotope-item post-7430 portfolio type-portfolio status-publish has-post-thumbnail hentry portfolio_entries-ar-br-5400 portfolio_entries-ar-n-4200 portfolio_entries-ar-n-4300 portfolio_entries-ar-n-7400 portfolio_entries-ar-n-7500 portfolio_entries-ar-n-7520 portfolio_entries-ar-n-7520-neu portfolio_entries-ar-n-7700 portfolio_entries-ar-n-7720 portfolio_entries-ar-p-1200 portfolio_entries-ar-p-3100 portfolio_entries-ar-p-3200 portfolio_entries-ar-p-3500 portfolio_entries-ar-p-3500t portfolio_entries-ar-p-3700 portfolio_entries-ar-p-3800 portfolio_entries-ar-p-5300 portfolio_entries-ar-p-5900 portfolio_entries-ar-p-617 portfolio_entries-ar-p-6200 portfolio_entries-ar-p-631-671 portfolio_entries-ar-p-632-672 portfolio_entries-ar-p-639-679 portfolio_entries-ar-p-6500 portfolio_entries-ar-pc-500 portfolio_entries-ar-pc-5000 portfolio_entries-ar-u-4000 portfolio_entries-process-chemicals-remover portfolio_entries-sx-ar-n-43407 portfolio_entries-sx-ar-n-77301 portfolio_entries-sx-ar-p-35006 portfolio_entries-sx-ar-p-35008 portfolio_entries-sx-ar-p-37404 portfolio_entries-sx-ar-pc-500080-2 portfolio_entries-sx-ar-pc-500082-7 portfolio_entries-x-ar-n-770030 portfolio_entries-x-ar-p-3220-7  av-masonry-item-with-image' title=\"Remover-Symbol\"   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='av-inner-masonry-sizer'><\/div><figure class='av-inner-masonry main_color'><div class=\"av-masonry-outerimage-container\"><div class='av-masonry-image-container' style=\"background-image: url(https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2020\/02\/Remover-Symbol.jpg);\"  title=\"Remover-Symbol\"  ><\/div><\/div><figcaption class='av-inner-masonry-content site-background'><div class='av-inner-masonry-content-pos'><div class='av-inner-masonry-content-pos-content'><div class='avia-arrow'><\/div><h3 class='av-masonry-entry-title entry-title '  itemprop=\"headline\" >Remover AR 300-76<\/h3><div class='av-masonry-entry-content entry-content'  itemprop=\"text\" >For the stripping of tempered photoresist and e-beam resist films<\/div><\/div><\/div><\/figcaption><\/figure><\/a><!--end av-masonry entry--><a href=\"https:\/\/www.allresist.com\/portfolio-item\/remover-ar-600-71\/\"  id='av-masonry-1-item-7428' data-av-masonry-item='7428' class='av-masonry-entry isotope-item post-7428 portfolio type-portfolio status-publish has-post-thumbnail hentry portfolio_entries-ar-n-2210 portfolio_entries-ar-n-2220 portfolio_entries-ar-n-2230 portfolio_entries-ar-n-4200 portfolio_entries-ar-n-4400 portfolio_entries-ar-n-4450 portfolio_entries-ar-n-7400 portfolio_entries-ar-n-7500 portfolio_entries-ar-n-7520-neu portfolio_entries-ar-p-1200 portfolio_entries-ar-p-3200 portfolio_entries-ar-p-3500 portfolio_entries-ar-p-3500t portfolio_entries-ar-p-3700 portfolio_entries-ar-p-3800 portfolio_entries-ar-p-5300 portfolio_entries-ar-p-617 portfolio_entries-ar-p-6200 portfolio_entries-ar-p-631-671 portfolio_entries-ar-p-632-672 portfolio_entries-ar-p-639-679 portfolio_entries-ar-p-6500 portfolio_entries-ar-pc-500 portfolio_entries-ar-pc-5000 portfolio_entries-process-chemicals-remover portfolio_entries-sx-ar-n-43407 portfolio_entries-sx-ar-n-4340-7 portfolio_entries-sx-ar-n-75301  av-masonry-item-with-image' title=\"Remover-Symbol\"   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='av-inner-masonry-sizer'><\/div><figure class='av-inner-masonry main_color'><div class=\"av-masonry-outerimage-container\"><div class='av-masonry-image-container' style=\"background-image: url(https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2020\/02\/Remover-Symbol.jpg);\"  title=\"Remover-Symbol\"  ><\/div><\/div><figcaption class='av-inner-masonry-content site-background'><div class='av-inner-masonry-content-pos'><div class='av-inner-masonry-content-pos-content'><div class='avia-arrow'><\/div><h3 class='av-masonry-entry-title entry-title '  itemprop=\"headline\" >Remover AR 600-71<\/h3><div class='av-masonry-entry-content entry-content'  itemprop=\"text\" >For the stripping of tempered photoresist and e-beam resist films<\/div><\/div><\/div><\/figcaption><\/figure><\/a><!--end av-masonry entry--><a href=\"https:\/\/www.allresist.com\/portfolio-item\/stopper-ar-600-60\/\"  id='av-masonry-1-item-8002' data-av-masonry-item='8002' class='av-masonry-entry isotope-item post-8002 portfolio type-portfolio status-publish has-post-thumbnail hentry portfolio_entries-ar-n-4600 portfolio_entries-ar-p-617 portfolio_entries-ar-p-6200 portfolio_entries-ar-p-631-671 portfolio_entries-ar-p-632-672 portfolio_entries-ar-p-639-679 portfolio_entries-process-chemicals-stopper  av-masonry-item-with-image' title=\"Stopper-Symbol\"   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='av-inner-masonry-sizer'><\/div><figure class='av-inner-masonry main_color'><div class=\"av-masonry-outerimage-container\"><div class='av-masonry-image-container' style=\"background-image: url(https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2020\/02\/Stopper-Symbol.jpg);\"  title=\"Stopper-Symbol\"  ><\/div><\/div><figcaption class='av-inner-masonry-content site-background'><div class='av-inner-masonry-content-pos'><div class='av-inner-masonry-content-pos-content'><div class='avia-arrow'><\/div><h3 class='av-masonry-entry-title entry-title '  itemprop=\"headline\" >Stopper AR 600-60<\/h3><div class='av-masonry-entry-content entry-content'  itemprop=\"text\" >For the stopping of e-beam resist film development with solvents<\/div><\/div><\/div><\/figcaption><\/figure><\/a><!--end av-masonry entry--><a href=\"https:\/\/www.allresist.com\/portfolio-item\/verduenner-ar-600-09\/\"  id='av-masonry-1-item-7452' data-av-masonry-item='7452' class='av-masonry-entry isotope-item post-7452 portfolio type-portfolio status-publish has-post-thumbnail hentry portfolio_entries-ar-p-639-679 portfolio_entries-process-chemicals-thinner  av-masonry-item-with-image' title=\"Verdu\u0308nner-Symbol\"   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='av-inner-masonry-sizer'><\/div><figure class='av-inner-masonry main_color'><div class=\"av-masonry-outerimage-container\"><div class='av-masonry-image-container' style=\"background-image: url(https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2020\/02\/Verdu\u0308nner-Symbol.jpg);\"  title=\"Verdu\u0308nner-Symbol\"  ><\/div><\/div><figcaption class='av-inner-masonry-content site-background'><div class='av-inner-masonry-content-pos'><div class='av-inner-masonry-content-pos-content'><div class='avia-arrow'><\/div><h3 class='av-masonry-entry-title entry-title '  itemprop=\"headline\" >Thinner AR 600-09<\/h3><div class='av-masonry-entry-content entry-content'  itemprop=\"text\" >For adjusting the film thickness of photoresists and e-beam resists<\/div><\/div><\/div><\/figcaption><\/figure><\/a><!--end av-masonry entry--><\/div><\/div><\/p><\/div>\n<\/p>\n<\/div><\/div><\/div><!-- close content main div --><\/div><\/div><div id='av_section_5'  class='avia-section av-wxq7np-05fc0142599a97b1ada2722a06253f32 main_color avia-section-default avia-no-shadow  avia-builder-el-27  el_after_av_section  el_before_av_section  avia-bg-style-parallax container_wrap fullsize'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-7941'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-u3ravp-3c8a721c07fdf90031c92e2e3fefcd71\">\n.flex_column.av-u3ravp-3c8a721c07fdf90031c92e2e3fefcd71{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-u3ravp-3c8a721c07fdf90031c92e2e3fefcd71 av_one_half  avia-builder-el-28  el_before_av_one_half  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-stg7g5-3b72e5d3f75002cb5adc074c2a044038 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h3 class=\"p1\">Dose sequence of the 50K\/ 200K system<\/h3>\n<\/div><\/section><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-qo6zzp-7fa5c45ea967ab8393e8beed43ba72e6\">\n.avia-image-container.av-qo6zzp-7fa5c45ea967ab8393e8beed43ba72e6 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-qo6zzp-7fa5c45ea967ab8393e8beed43ba72e6 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-qo6zzp-7fa5c45ea967ab8393e8beed43ba72e6 av-styling- av-img-linked avia-align-left  avia-builder-el-30  el_after_av_textblock  el_before_av_hr '   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image ' src=\"https:\/\/www.allresist.de\/wp-content\/uploads\/2017\/07\/AR-P630-670_Unterschnitt-480x321.jpg\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-po9279-e8a40b44e0cc5967141941317e633c60\">\n#top .hr.hr-invisible.av-po9279-e8a40b44e0cc5967141941317e633c60{\nheight:5px;\n}\n<\/style>\n<div  class='hr av-po9279-e8a40b44e0cc5967141941317e633c60 hr-invisible  avia-builder-el-31  el_after_av_image  el_before_av_textblock '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<section  class='av_textblock_section av-njchzp-1dac4f1154ab827bfe2c9945cb8d47e2 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p class=\"p1\">Constantly increasing undercut<\/p>\n<p class=\"p1\">Definition: The sensitivity is expressed in pC\/cm for lines, while the unit for areas is \u03bcC\/cm\u00b2.<\/p>\n<\/div><\/section><\/p><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-m4n845-5ed2a3ce24f839d7eb2713505f9eccd8\">\n.flex_column.av-m4n845-5ed2a3ce24f839d7eb2713505f9eccd8{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-m4n845-5ed2a3ce24f839d7eb2713505f9eccd8 av_one_half  avia-builder-el-33  el_after_av_one_half  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-kx5xt1-36e3c3c6ed5b9d3675120535d4d16f3f '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h3 class=\"p1\">Formation of undercut vs. exposure dose<\/h3>\n<\/div><\/section><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-il63s5-4a08f6acb34d7811c64e18f6b8e6acea\">\n.avia-image-container.av-il63s5-4a08f6acb34d7811c64e18f6b8e6acea img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-il63s5-4a08f6acb34d7811c64e18f6b8e6acea .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-il63s5-4a08f6acb34d7811c64e18f6b8e6acea av-styling- av-img-linked avia-align-left  avia-builder-el-35  el_after_av_textblock  el_before_av_hr '   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image ' src=\"https:\/\/www.allresist.de\/wp-content\/uploads\/2017\/07\/AR-P630-670_lift-off-Au-Breite-486x321.jpg\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-h10i05-4cfe863b234f1e4e979b752e848ab67c\">\n#top .hr.hr-invisible.av-h10i05-4cfe863b234f1e4e979b752e848ab67c{\nheight:5px;\n}\n<\/style>\n<div  class='hr av-h10i05-4cfe863b234f1e4e979b752e848ab67c hr-invisible  avia-builder-el-36  el_after_av_image  el_before_av_textblock '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<section  class='av_textblock_section av-1n086d-32934d7fd1b549eea19c2804e79336c7 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p class=\"p1\">Trench width top: 20 nm, measured values in the diagram: width of trenches at the bottom<\/p>\n<\/div><\/section><\/p><\/div>\n\n<\/div><\/div><\/div><!-- close content main div --><\/div><\/div><div id='av_section_6'  class='avia-section av-eccznp-901bdf16bbf7ce356b0addd8ddde8634 main_color avia-section-default avia-no-shadow  avia-builder-el-38  el_after_av_section  avia-builder-el-last  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-7941'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-cdm9k5-6e02746f087ee646d0bf6ae858ffe2de\">\n.flex_column.av-cdm9k5-6e02746f087ee646d0bf6ae858ffe2de{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-cdm9k5-6e02746f087ee646d0bf6ae858ffe2de av_one_full  avia-builder-el-39  avia-builder-el-no-sibling  first flex_column_div av-zero-column-padding  '     ><p><br \/>\n<form action=\"https:\/\/www.allresist.com\/portfolio-item\/e-beam-resist-ar-p-639-series\/\" method=\"post\" data-fields-with-error=\"Found errors in the following field(s):\" class=\"avia_ajax_form av-form-labels-visible   avia-builder-el-41  el_after_av_codeblock  avia-builder-el-last   \" data-avia-form-id=\"1\" data-avia-redirect='' ><h3 class=''>Request for AR-P 639-Serie<\/h3><fieldset><p class='  first_form  form_element form_fullwidth' id='element_avia_1_1'><label for=\"avia_1_1\">Name <abbr class=\"required\" title=\"required\">*<\/abbr><\/label> <input name=\"avia_1_1\" class=\"text_input is_empty\" type=\"text\" id=\"avia_1_1\" value=\"\" \/><\/p><p class='  first_form  form_element form_fullwidth' id='element_avia_2_1'><label for=\"avia_2_1\">E-Mail <abbr class=\"required\" title=\"required\">*<\/abbr><\/label> <input name=\"avia_2_1\" class=\"text_input is_email\" type=\"text\" id=\"avia_2_1\" value=\"\" \/><\/p><p class='  first_form  form_element form_fullwidth' id='element_avia_3_1'><label for=\"avia_3_1\">Company\/Institute<\/label> <input name=\"avia_3_1\" class=\"text_input \" type=\"text\" id=\"avia_3_1\" value=\"\" \/><\/p><p class='  first_form  form_element 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You have the right to withdraw your consent to the processing of your personal data at any time. This can be done through an informal notification, e.g. via our contact form or an email to the email address given in the <a href=\"\/impressum\"> imprint <\/a>. Your revocation does not affect the legality of the data processing carried out until then. 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