{"id":14,"date":"2008-08-14T08:49:09","date_gmt":"2008-08-14T06:49:09","guid":{"rendered":"https:\/\/www.allresist.depost\/faqe-beamresists-0100aetzresistenz\/"},"modified":"2020-03-04T14:46:56","modified_gmt":"2020-03-04T13:46:56","slug":"resist-wiki-how-high-is-the-etch-resistance-of-e-beam-resists-in-the-presence-of-strong-acids","status":"publish","type":"post","link":"https:\/\/www.allresist.com\/resist-wiki-how-high-is-the-etch-resistance-of-e-beam-resists-in-the-presence-of-strong-acids\/","title":{"rendered":"10. How high is the etch resistance of e-beam resists in the presence of strong acids?"},"content":{"rendered":"\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-7o2tm-90bc096f932b5d80e33685dbd5360ab9\">\n.avia-section.av-7o2tm-90bc096f932b5d80e33685dbd5360ab9{\nbackground-color:#f0faff;\nbackground-image:unset;\n}\n<\/style>\n<div id='av_section_1'  class='avia-section av-7o2tm-90bc096f932b5d80e33685dbd5360ab9 main_color avia-section-default avia-no-shadow  avia-builder-el-0  el_before_av_section  avia-builder-el-first  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><main  role=\"main\" itemprop=\"mainContentOfPage\"  class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-14'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-6xq22-0bfa208b0a86a333b9e7e1d9797d2ccf\">\n.flex_column.av-6xq22-0bfa208b0a86a333b9e7e1d9797d2ccf{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-6xq22-0bfa208b0a86a333b9e7e1d9797d2ccf av_two_third  avia-builder-el-1  el_before_av_one_third  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-6awga-d3ce226197e3c4fdf2f7a9e86c9b73ef '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h1>10. How high is the etch resistance of e-beam resists in the presence of strong acids?<\/h1>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-5fzke-ad575fcaea2ad1ce3e21c05ddce5c3fb\">\n.flex_column.av-5fzke-ad575fcaea2ad1ce3e21c05ddce5c3fb{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-5fzke-ad575fcaea2ad1ce3e21c05ddce5c3fb av_one_third  avia-builder-el-3  el_after_av_two_third  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><article  class='iconbox iconbox_left av-irs6-1027970dd224098313d4ec9a45bc211f  avia-builder-el-4  avia-builder-el-no-sibling '  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"iconbox_content\"><header class=\"entry-content-header\"><div class=\"iconbox_icon heading-color\" aria-hidden='true' data-av_icon='\ue831' data-av_iconfont='entypo-fontello'><\/div><h3 class='iconbox_content_title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki\/' title='Back to the Resist Wiki Overview'  >Back to the Resist Wiki Overview<\/a><\/h3><\/header><div class='iconbox_content_container '  itemprop=\"text\" ><\/div><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div><\/div><\/div><\/main><!-- close content main element --><\/div><\/div><div id='av_section_2'  class='avia-section av-4906u-f9c8ee1bf1614a5a947dc0caf8270a48 main_color avia-section-default avia-no-shadow  avia-builder-el-5  el_after_av_section  avia-builder-el-last  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-14'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-3pi9e-91bf7795df077fa00d80e6c7d43d29cd\">\n.flex_column.av-3pi9e-91bf7795df077fa00d80e6c7d43d29cd{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-3pi9e-91bf7795df077fa00d80e6c7d43d29cd av_two_third  avia-builder-el-6  el_before_av_one_third  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-31c1m-46185fe79de2a7a72891d0bca115a95c '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p class=\"p1\"><b>Concentrated oxidising acids<\/b>\u00a0(sulphuric acid, nitric acid, aqua regia\u00a0<span class=\"s1\">1)<\/span>, piranha\u00a0<span class=\"s1\">2)<\/span>) attack resist films already at room temperatures and are often used as remover for persistent resist structures.<\/p>\n<p class=\"p1\">In the presence of these agents,\u00a0<b>novolac resists<\/b>\u00a0are easily removed, while\u00a0<b>PMMA resists<\/b>\u00a0begin to swell and are then removed slowly. Already moderate dilution of oxidising acids with di-water however prevents this attack of acidic solutions. In contrast, non-oxidising acids (hydrochloric acid, hydrofluoric acid) leave resist films intact, even if concentrated solutions of these acids are used.<\/p>\n<p class=\"p1\">After a tempering of e-beam resist films (AR-P 600(0), AR-P\/N 7000) at 95 \u00b0C for 25 min, the following parameters were determined:<\/p>\n<ul class=\"ul1\">\n<li class=\"li1\"><span class=\"s3\">Sulphuric acid 50 %:<\/span>\u00a0no attack after 2 hours (room temperature and heated to 60\u00b0 C)<\/li>\n<li class=\"li1\"><span class=\"s3\">Sulphuric acid 96 %:<\/span>\u00a0dissolution of films after 15 s, except for PMMA protective coatings are heavily attacked and gradually removed<\/li>\n<li class=\"li1\"><span class=\"s3\">Hydrochloric acid 20 %:<\/span>\u00a0no attack after 2 hours (room temperature and heated to 60\u00b0 C)<\/li>\n<li class=\"li1\"><span class=\"s3\">Hydrochloric acid conc. 37 %:<\/span>\u00a0no reaction with films observed, only AR-N 7500 shows adhesion problems after 10 min (film is floating off)<\/li>\n<li class=\"li1\"><span class=\"s3\">Hydrofluoric acid 2 %:<\/span>\u00a0coatings &lt; 2 \u00b5m film thickness float off immediately<\/li>\n<\/ul>\n<p class=\"p1\">With respect to the stability in concentrated sulphuric acid and hydrofluoric acid, a postbake of resists films (PMMA 190 \u00b0C, novolac 150 \u00b0C) only leads to a minor improvement.<\/p>\n<p class=\"p1\"><span class=\"s1\">1)\u00a0<\/span>Aqua regia: Mixture of hydrochloric acid and nitric acid (3 : 1)<\/p>\n<p class=\"p1\"><span class=\"s1\">2)\u00a0<\/span>Piranha: Mixture of sulphuric acid and hydrogen peroxide (1 : 1)<\/p>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-2qbim-1d4c82f3036a758a4bb08ab42f7594aa\">\n.flex_column.av-2qbim-1d4c82f3036a758a4bb08ab42f7594aa{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-2qbim-1d4c82f3036a758a4bb08ab42f7594aa av_one_third  avia-builder-el-8  el_after_av_two_third  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><p><section  class='av_textblock_section av-7ati-b692a72c94d49f6ac29268a2b4c6ad04 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p>Overview E-beam FAQs<\/p>\n<\/div><\/section><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1rzmy-70d584f8e4379c3a223fd439a70649eb\">\n#top .hr.hr-invisible.av-1rzmy-70d584f8e4379c3a223fd439a70649eb{\nheight:25px;\n}\n<\/style>\n<div  class='hr av-1rzmy-70d584f8e4379c3a223fd439a70649eb hr-invisible  avia-builder-el-10  el_after_av_textblock  el_before_av_magazine '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<div  id=\"avia-magazine-1\"  class='av-magazine av-13wyy-e173082646a018d8519b80a8dd79e98c  avia-builder-el-11  el_after_av_hr  avia-builder-el-last   avia-builder-el-11  el_after_av_hr  avia-builder-el-last ' ><div class='av-magazine-group sort_all'><article class='av-magazine-entry av-magazine-entry-id-5 av-magazine-format-standard av-magazine-type-post av-magazine-entry-1 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-23T06:32:47+01:00\" >23. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-what-are-e-beam-resists-composed-of-and-how-do-they-work\/' title='Link to: 1. What are e-beam resists composed of, and how do they work?'>1. What are e-beam resists composed of, and how do they work?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-6 av-magazine-format-standard av-magazine-type-post av-magazine-entry-2 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-22T07:27:24+01:00\" >22. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-for-how-long-are-e-beam-resists-stable-and-what-are-the-optimal-storage-conditions\/' title='Link to: 2. For how long are e-beam resists stable, and what are the optimal storage conditions?'>2. For how long are e-beam resists stable, and what are the optimal storage conditions?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-7 av-magazine-format-standard av-magazine-type-post av-magazine-entry-3 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-21T07:51:54+01:00\" >21. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-what-is-the-optimal-pre-treatment-of-substrates-for-e-beam-resist-application\/' title='Link to: 3. What is the optimal pre-treatment of substrates for e-beam resist application?'>3. What is the optimal pre-treatment of substrates for e-beam resist application?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-8 av-magazine-format-standard av-magazine-type-post av-magazine-entry-4 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-20T07:56:37+01:00\" >20. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-how-high-is-the-adhesion-strength-of-e-beam-resists-to-different-wafers\/' title='Link to: 4. How high is the adhesion strength of e-beam resists to different wafers?'>4. How high is the adhesion strength of e-beam resists to different wafers?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-9 av-magazine-format-standard av-magazine-type-post av-magazine-entry-5 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-19T08:00:25+01:00\" >19. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-how-are-e-beam-resists-exposed-how-can-the-optimum-exposure-dose-be-determined\/' title='Link to: 5. How are e-beam resists exposed? How can the optimum exposure dose be determined?'>5. How are e-beam resists exposed? How can the optimum exposure dose be determined?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-10 av-magazine-format-standard av-magazine-type-post av-magazine-entry-6 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-18T08:06:24+01:00\" >18. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-which-developers-are-optimal-for-e-beam-resists-and-how-do-factors-like-developer-concentration-and-temperature-influence-the-result\/' title='Link to: 6. Which developers are optimal for e-beam resists, and how do factors like developer concentration and temperature influence the result?'>6. Which developers are optimal for e-beam resists, and how do factors like developer concentration and temperature influence the result?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-11 av-magazine-format-standard av-magazine-type-post av-magazine-entry-7 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-17T08:16:10+01:00\" >17. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-how-can-e-beam-resist-films-be-removed-again\/' title='Link to: 7. How can e-beam resist films be removed again?'>7. How can e-beam resist films be removed again?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-12 av-magazine-format-standard av-magazine-type-post av-magazine-entry-8 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-16T08:22:02+01:00\" >16. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-which-resolutions-do-e-beam-resists-achieve\/' title='Link to: 8. Which resolutions do e-beam resists achieve?'>8. Which resolutions do e-beam resists achieve?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-13 av-magazine-format-standard av-magazine-type-post av-magazine-entry-9 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-15T08:27:25+01:00\" >15. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-how-high-is-the-plasma-etch-resistance-of-e-beam-resists\/' title='Link to: 9. How high is the plasma etch resistance of e-beam resists?'>9. How high is the plasma etch resistance of e-beam resists?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-14 av-magazine-format-standard av-magazine-type-post av-magazine-entry-10 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-14T08:49:09+01:00\" >14. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-how-high-is-the-etch-resistance-of-e-beam-resists-in-the-presence-of-strong-acids\/' title='Link to: 10. How high is the etch resistance of e-beam resists in the presence of strong acids?'>10. How high is the etch resistance of e-beam resists in the presence of strong acids?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-16 av-magazine-format-standard av-magazine-type-post av-magazine-entry-11 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-13T09:10:35+01:00\" >13. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-how-high-is-the-solvent-resistance-of-e-beam-resist-films\/' title='Link to: 11. How high is the solvent resistance of e-beam resist films?'>11. How high is the solvent resistance of e-beam resist films?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div><\/div><\/p><\/div><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Concentrated oxidising acids (sulphuric acid, nitric acid, aqua regia 1) , piranha 2) ) attack resist films already at room temperatures and are often used as remover for persistent resist structures.<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[101],"tags":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v22.5 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>10. 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