{"id":209,"date":"2013-03-20T10:13:48","date_gmt":"2013-03-20T08:13:48","guid":{"rendered":"https:\/\/www.allresist.depost\/allgemein-grundlegendechemie-polymere\/"},"modified":"2022-06-27T11:58:31","modified_gmt":"2022-06-27T10:58:31","slug":"resist-wiki-polymers-film-formers","status":"publish","type":"post","link":"https:\/\/www.allresist.com\/resist-wiki-polymers-film-formers\/","title":{"rendered":"Polymers (film formers)"},"content":{"rendered":"\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-254pkx-14472903be084388b4d705be7a0ca240\">\n.avia-section.av-254pkx-14472903be084388b4d705be7a0ca240{\nbackground-color:#f0faff;\nbackground-image:unset;\n}\n<\/style>\n<div id='av_section_1'  class='avia-section av-254pkx-14472903be084388b4d705be7a0ca240 main_color avia-section-default avia-no-shadow  avia-builder-el-0  el_before_av_section  avia-builder-el-first  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><main  role=\"main\" itemprop=\"mainContentOfPage\"  class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-209'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1ypf6x-6fed070a63ae7f348f3c1caffab9e193\">\n.flex_column.av-1ypf6x-6fed070a63ae7f348f3c1caffab9e193{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-1ypf6x-6fed070a63ae7f348f3c1caffab9e193 av_two_third  avia-builder-el-1  el_before_av_one_third  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-1rfwu9-26307db951c2eaca51ad8c04f7b3dfd6 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h1>Polymers (film formers)<\/h1>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1mosch-97225423c61e156a5e0bc4ecf2e4993c\">\n.flex_column.av-1mosch-97225423c61e156a5e0bc4ecf2e4993c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-1mosch-97225423c61e156a5e0bc4ecf2e4993c av_one_third  avia-builder-el-3  el_after_av_two_third  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><article  class='iconbox iconbox_left av-1do6e1-8dd379b470e3cd483e1c0341db6fde34  avia-builder-el-4  avia-builder-el-no-sibling '  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"iconbox_content\"><header class=\"entry-content-header\"><div class=\"iconbox_icon heading-color\" aria-hidden='true' data-av_icon='\ue831' data-av_iconfont='entypo-fontello'><\/div><h3 class='iconbox_content_title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki\/' title='Back to the Resist Wiki Overview'  >Back to the Resist Wiki Overview<\/a><\/h3><\/header><div class='iconbox_content_container '  itemprop=\"text\" ><\/div><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div>\n\n<\/div><\/div><\/main><!-- close content main element --><\/div><\/div><div id='av_section_2'  class='avia-section av-16ckf5-96fd24fa91a189e7b9f242790ebe3f56 main_color avia-section-default avia-no-shadow  avia-builder-el-5  el_after_av_section  avia-builder-el-last  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-209'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-45fsh-6529233f915cda569cd354a8c4a1bfcc\">\n.flex_column.av-45fsh-6529233f915cda569cd354a8c4a1bfcc{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-45fsh-6529233f915cda569cd354a8c4a1bfcc av_two_third  avia-builder-el-6  el_before_av_one_third  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-v63zt-32b6effad163fd8e188d23c956448c30 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p>Polymethyl methacrylates (PMMAs) are widely used e.g. in electron beam lithography. PMMAs are produced by polymerisation of methacrylic acid esters in the presence of radical starters. PMMA layers show a very good adhesion to silicon, glass and the majority of metals. For the fabrication of positive-tone electron beam resists, Allresist uses short-chain (50k), long-chain (950k) and PMMAs with intermediate chain length (200k, 600k). The short-chain PMMA possess an approximately 20 % higher sensitivity as compared to the long-chain polymer. PMMA is furthermore characterised by an excellent resistance to most acids and strongly alkaline etch media like e.g. 50% aqueous KOH and is thus utilised as starting material for our protective coatings AR-PC 503\/504 (new: <span style=\"font-weight: bold\">AR-PC 5040<\/span> in safer solvent).<\/p>\n<p>Poly(methylmethacrylate- co- methacrylic acid) (PMMA co MA) is a copolymer composed of methacrylic acid and methacrylic acid methyl ester. Allresist uses a copolymer with 33% of methacrylic acid as starting material for the electron beam resists AR-P 617 . This polymer has very good adhesion properties to silicon and glass. The sensitivity in e-beam lithography applications is higher by a factor of 3-4 as compared to PMMA polymers which results in an accordingly higher contrast. If PMMA co MA is heated to temperatures above 180\u00b0C, water is eliminated from the polymer under formation of methacrylic acid anhydride, an effect which is responsible for the increase of sensitivity. If used in a two-layer process, PMMA co MA is furthermore well suited for the generation of lift-off architectures.<\/p>\n<p>Poly(\u03b1-methylstyrene- co- methacrylic acid methyl ester) (PMS co Cl-MMA) is a copolymer composed of \u03b1-methylstyrene and methacrylic acid methyl ester. Allresist uses this copolymer for the highly sensitive electron beam resists CSAR 62 (AR-P 6200) . The polymer shows very good adhesion properties and a very high plasma etch stability which is comparable to novolacs. Compared with the PMMA polymers, the sensitivity of CSAR 62 is 3-15 times higher, which results in a higher contrast. (PMMA normally 5-7,\u00a0 but CSAR 62 with developer X AR 600-54\/6 even &gt;14!). Furthermore, CSAR 62 is ideally suited for the fabrication of lift-off architectures and can also be used in multilayer processes with PMMA and\/or PMMAcoMA 33 for the composition of\u00a0 T-gate structures.<\/p>\n<p>Polystyrenes (PS) are characterised by a high chemical resistance to concentrated acids, bases as well as long-chain hydrocarbons and aldehydes. In addition, polystyrenes have very good insulating properties and a high plasma etch stability. Allresist utilizes polystyrenes for the fabrication of negative resists which can be structured both by UV light and by electron beams.<\/p>\n<p>Polyimides (PI) are applied as sensor material, as protective coating or as insulating layer. Resists provided by Allresist contain the finished polyimide, a high-temperature curing is not required. Due to the high melting point, polyimides are particularly well suited for high-temperature applications &gt; 400 \u00b0C. Allresist also offers polyimides for structuring as negative-tone polyimide resists SX AR-N xy and as positive-tone polyimide resists SX AR-P 5000\/82.7. Structures generated with these resists show an excellent stability during plasma etching and implantation processes. The negative polyimide resists SX AR-N xy can also be structured by laser exposure up to the NIR-range and by electron beams.<\/p>\n<p>Polyhydroxystyrenes (PSOH) are utilised as insulating layer in organic transistors and for LCD displays. Polyhydroxystyrenes are well suited for a use as photoresist just like novolacs, but possess a higher thermal stability up to 300\u00b0C. Polyhydroxystyrenes are thus the preferred choice for applications in which metals are vapour-deposited. Allresist offers polyhydroxystyrenes as structurable negative resist. A structuring is also possible by laser exposure up to the NIR-range and by electron beams.<\/p>\n<p>Poly(hydroxystyrene- co- methyl methacrylate) (PSOH co MMA) is a copolymer composed of 4-vinylphenol and methacrylic acid ester. Just like the polyhydroxystyrenes, PSOH co MMA is characterised by very good insulating properties and a high thermal resistance and can also be developed under aqueous-alkaline conditions. As compared to polyhydroxystyrene, PSOH co MMA shows lower moisture absorption from the air. Allresist offers PSOH co MMA as structurable negative resist.<\/p>\n<p>Long-chain hydrocarbons which are obtained during the rectification of oil possess an excellent resistance to a large variety of corrosive chemicals like e.g. concentrated bases or concentrated hydrofluoric acid. Due to this property, hydrocarbons are used in the special protective coating SX AR-PC 5000\/40. In combination with photoresists AR-N 4400-10 and AR-P 3250 , also defined resist structures can be generated in a two-layer process. By these means, structures can be etched with hydrofluoric acid into glass substrates (see AR-NEWS, 23 rd issue).<\/p>\n<p><span lang=\"de\">Fluorinated hydrocarbons are characterised by excellent isolating qualities. They are used in the special protective coating SX AR-PC 5060 (F-Protect). The resist consists of a <\/span><span lang=\"en-GB\">perfluorinated amorphous copolymer, dissolved in a solvent mixture of perfluortri-n-butylamin and perfluor-n-dibutylmethylamin (Fluorinert&#x2122; FC-40). The resist layers are characterised by a low refraction index, a very high optical transparency, excellent isolating qualities and outstanding stability against solvents and etching agents. Especially the very good isolating qualities and the high thermal stability, the decomposition of the polymer does not begin under approx. 350\u00b0C, are crucial properties for an application for organic field-effect-transistors.<\/span><\/p>\n<p>Novolacs are phenol resigns with a formaldehyde-phenol-ratio of less than 1:1 which are obtained by acidic condensation of methanal and phenol. In combination with light-sensitive compounds like e.g. diazon aphtoquinone (DNQ), novolacs are used in microelectronics as photoresist for micro-structuring.<\/p>\n<p><a class=\"fancybox image\" href=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2014\/02\/polymere1.jpg\"><img decoding=\"async\" class=\"alignnone size-medium wp-image-1103\" src=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2014\/02\/polymere1-345x100.jpg\" alt=\"Polymere1\" width=\"345\" height=\"100\" srcset=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2014\/02\/polymere1-345x100.jpg 345w, https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2014\/02\/polymere1-600x175.jpg 600w, https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2014\/02\/polymere1.jpg 1015w\" sizes=\"(max-width: 345px) 100vw, 345px\" \/><\/a><\/p>\n<p><strong>\u00a0<\/strong><\/p>\n<p><em>Fig.: Polymers used for lithographic applications, from left to right: PMMA, PMMA co MA, PMS co Cl-MMA, PSOH, PsOH co MMA, novolacs, PI, PS<\/em><\/p>\n<div style=\"direction: ltr\">\n<div style=\"direction: ltr\">\n<table style=\"direction: ltr;border-collapse: collapse;border: 1pt solid #A3A3A3\" title=\"\" border=\"1\" summary=\"\" cellspacing=\"0\" cellpadding=\"0\">\n<tbody>\n<tr>\n<td style=\"vertical-align: top;width: 2.6701in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\"><span style=\"font-weight: bold\">Polymer<\/span><\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .8569in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\"><span style=\"font-weight: bold\">Brechzahl<\/span><\/p>\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Symbol;font-size: 11.0pt\"><span style=\"font-weight: bold\">h<\/span><\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\"><span style=\"font-weight: bold\">Glastemp. T<\/span><span style=\"font-weight: bold;vertical-align: sub\">G <\/span><span style=\"font-weight: bold\">in \u00b0C<\/span><\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.1263in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\"><span style=\"font-weight: bold\">Schmelztemp.<\/span><\/p>\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\"><span style=\"font-weight: bold\">in \u00b0C<\/span><\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\"><span style=\"font-weight: bold\">Dichte<\/span><\/p>\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\"><span style=\"font-weight: bold\">g\/cm<\/span><span style=\"font-weight: bold;vertical-align: super\">3<\/span><\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.2472in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\"><span style=\"font-weight: bold\">L\u00f6slichkeit<\/span><\/p>\n<\/td>\n<\/tr>\n<tr>\n<td style=\"vertical-align: top;width: 2.6701in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">PMMA<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .8375in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">1,492<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">105<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.1069in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Decomp. 270<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">1,19<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.5645in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Well: acetone, NEP, MIBK, toluene<\/p>\n<\/td>\n<\/tr>\n<tr>\n<td style=\"vertical-align: top;width: 2.6701in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">PMMA<span style=\"font-style: italic\">co<\/span>MA 33<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .8375in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">1,490<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">150<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.1069in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Decomp. 280<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">1,19<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.6222in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Well: acetone, NEP, PM<\/p>\n<\/td>\n<\/tr>\n<tr>\n<td style=\"vertical-align: top;width: 2.6701in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-size: 11.0pt\"><span style=\"font-family: Calibri\">Poly(<\/span><span style=\"font-family: Symbol\">a<\/span><span style=\"font-family: Calibri\">-methylstyrene-<\/span><span style=\"font-style: italic;font-family: Calibri\">co<\/span><span style=\"font-family: Calibri\">-Cl-MMA)<\/span><\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .8375in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">1,541<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">105<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.1263in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Decomp. &gt;220<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">&#8211;<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.5645in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Well: NEP, anisole, toluene, DEK<\/p>\n<\/td>\n<\/tr>\n<tr>\n<td style=\"vertical-align: top;width: 2.6701in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Poly(<span style=\"font-style: italic\">p-<\/span>hydroxystyrene)<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .8375in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">1,600<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">150<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.1069in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Decomp. 320<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">1,16<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.5645in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Well: acetone, PMA, ethanol<\/p>\n<\/td>\n<\/tr>\n<tr>\n<td style=\"vertical-align: top;width: 2.6701in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Poly(<span style=\"font-style: italic\">p<\/span>-hydroxy\u00adstyrene-<span style=\"font-style: italic\">co-<\/span>MMA)<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .8375in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">&#8211;<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">&#8211;<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.1069in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">224<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">1,39<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.668in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Well: acetone, PMA, NEP<\/p>\n<\/td>\n<\/tr>\n<tr>\n<td style=\"vertical-align: top;width: 2.6701in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Polyimide<\/p>\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">\n<\/td>\n<td style=\"vertical-align: top;width: .8375in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">1,623<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">169<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.1263in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Decomp. &gt;500<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">1,15<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.668in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Well: acetone, PM, PMA, THF<\/p>\n<\/td>\n<\/tr>\n<tr>\n<td style=\"vertical-align: top;width: 2.6701in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin: 0in;font-family: Calibri;font-size: 11.0pt\">Polystyrene<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .8375in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin: 0in;font-family: Calibri;font-size: 11.0pt\">1.592<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin: 0in;font-family: Calibri;font-size: 11.0pt\">100<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.1069in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin: 0in;font-family: Calibri;font-size: 11.0pt\">~240\u00b0C<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin: 0in;font-family: Calibri;font-size: 11.0pt\">1,05<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.5645in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin: 0in;font-family: Calibri;font-size: 11.0pt\">Well: acetone, CB, EB<\/p>\n<\/td>\n<\/tr>\n<tr>\n<td style=\"vertical-align: top;width: 2.6701in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Long-chain hydrocarbons<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .8375in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">&#8211;<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">&#8211;<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.1069in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">&gt;140<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">1,02<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.5645in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Well: toluene, CB, EB<\/p>\n<\/td>\n<\/tr>\n<tr>\n<td style=\"vertical-align: top;width: 2.6701in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Fluorinated hydrocarbons:<\/p>\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Poly-1,1,2,4,4,5,5,6,7,7-decafluoro-3-oxa-1,6-heptadiene<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .8375in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">\n<\/td>\n<td style=\"vertical-align: top;width: 1.1263in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Decomp. &gt;350<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">\n<\/td>\n<td style=\"vertical-align: top;width: 1.5819in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Well: Perfluorotributylamine<\/p>\n<\/td>\n<\/tr>\n<tr>\n<td style=\"vertical-align: top;width: 2.6701in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Novolacs<\/p>\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">\n<\/td>\n<td style=\"vertical-align: top;width: .8375in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">1,61<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">80 &#8211; 100<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.1069in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">120 &#8211; 140<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: .6673in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">1,16<\/p>\n<\/td>\n<td style=\"vertical-align: top;width: 1.668in;padding: 4pt 4pt 4pt 4pt;border: 1pt solid #A3A3A3\">\n<p lang=\"en-US\" style=\"margin-top: 0pt;margin-bottom: 6pt;font-family: Calibri;font-size: 11.0pt\">Well: acetone, PM, PMA<\/p>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<p><em>Table : Overview selected polymer properties<\/em><\/p>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-ohb0h-95f5d243558dd244f0d3b07172300f6a\">\n.flex_column.av-ohb0h-95f5d243558dd244f0d3b07172300f6a{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-ohb0h-95f5d243558dd244f0d3b07172300f6a av_one_third  avia-builder-el-8  el_after_av_two_third  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-mf949-d393fb15cf024c3beb6eeae1abdcab48 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h4 style=\"text-align: left\">Overview Basic Chemistry<\/h4>\n<\/div><\/section><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-gjc9d-f70a00d56f099c3bbd2ab4deb179b7a8\">\n#top .hr.hr-invisible.av-gjc9d-f70a00d56f099c3bbd2ab4deb179b7a8{\nheight:25px;\n}\n<\/style>\n<div  class='hr av-gjc9d-f70a00d56f099c3bbd2ab4deb179b7a8 hr-invisible  avia-builder-el-10  el_after_av_textblock  el_before_av_magazine '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<div  id=\"avia-magazine-1\"  class='av-magazine av-b91y9-2761cc75d47f75b6ebde3856b86a4e2a  avia-builder-el-11  el_after_av_hr  avia-builder-el-last   avia-builder-el-11  el_after_av_hr  avia-builder-el-last ' ><div class='av-magazine-group sort_all'><article class='av-magazine-entry av-magazine-entry-id-15496 av-magazine-format-standard av-magazine-type-post av-magazine-entry-1 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2020-05-20T10:56:57+01:00\" >20. May 2020<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/forays-through-the-lithography-of-microelectronics-matthias-schirmer\/' title='Link to: Forays through the lithography of microelectronics (Matthias Schirmer)'>Forays through the lithography of microelectronics (Matthias Schirmer)<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-209 av-magazine-format-standard av-magazine-type-post av-magazine-entry-2 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2013-03-20T10:13:48+01:00\" >20. March 2013<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-polymers-film-formers\/' title='Link to: Polymers (film formers)'>Polymers (film formers)<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-210 av-magazine-format-standard av-magazine-type-post av-magazine-entry-3 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2012-07-24T12:37:11+01:00\" >24. July 2012<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-principle-and-functioning\/' title='Link to: Principle and functioning'>Principle and functioning<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-207 av-magazine-format-standard av-magazine-type-post av-magazine-entry-4 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2012-07-16T09:28:57+01:00\" >16. July 2012<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-other-resist-components\/' title='Link to: Other resist components'>Other resist components<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-213 av-magazine-format-standard av-magazine-type-post av-magazine-entry-5 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2012-07-13T12:33:51+01:00\" >13. July 2012<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-composition-of-photoresists\/' title='Link to: Composition of photoresists'>Composition of photoresists<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-208 av-magazine-format-standard av-magazine-type-post av-magazine-entry-6 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2012-07-13T12:22:20+01:00\" >13. July 2012<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-photosensitive-components\/' title='Link to: Photosensitive components'>Photosensitive components<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-212 av-magazine-format-standard av-magazine-type-post av-magazine-entry-7 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2012-07-13T12:16:54+01:00\" >13. July 2012<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-cross-linker\/' title='Link to: Cross linker'>Cross linker<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div><\/div><\/p><\/div>\n","protected":false},"excerpt":{"rendered":"<p>Polymethyl methacrylates (PMMAs) are widely used e.g. in electron beam lithography. PMMAs are produced by polymerisation of methacrylic acid esters in the presence of radical starters<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[104],"tags":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v22.5 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Polymers (film formers)<\/title>\n<meta name=\"description\" content=\"Polymethyl methacrylates (PMMAs) are widely used e.g. in electron beam lithography. 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