{"id":22,"date":"2008-08-16T13:41:08","date_gmt":"2008-08-16T11:41:08","guid":{"rendered":"https:\/\/www.allresist.depost\/faqphotoresists-0060optimalebeschichtung\/"},"modified":"2021-12-16T13:27:58","modified_gmt":"2021-12-16T12:27:58","slug":"resist-wiki-what-are-the-optimum-coating-parameters-for-photoresists-in-order-to-achieve-good-film-images","status":"publish","type":"post","link":"https:\/\/www.allresist.com\/resist-wiki-what-are-the-optimum-coating-parameters-for-photoresists-in-order-to-achieve-good-film-images\/","title":{"rendered":"6. What are the optimum coating parameters for photoresists in order to achieve good film images?"},"content":{"rendered":"\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-7gfae-6b7681afe1cc87544a3a220e44a0b9f0\">\n.avia-section.av-7gfae-6b7681afe1cc87544a3a220e44a0b9f0{\nbackground-color:#f0faff;\nbackground-image:unset;\n}\n<\/style>\n<div id='av_section_1'  class='avia-section av-7gfae-6b7681afe1cc87544a3a220e44a0b9f0 main_color avia-section-default avia-no-shadow  avia-builder-el-0  el_before_av_section  avia-builder-el-first  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><main  role=\"main\" itemprop=\"mainContentOfPage\"  class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-22'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-753hu-8220a4f954ea5987172be4e1ba8ea6e6\">\n.flex_column.av-753hu-8220a4f954ea5987172be4e1ba8ea6e6{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-753hu-8220a4f954ea5987172be4e1ba8ea6e6 av_two_third  avia-builder-el-1  el_before_av_one_third  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-mqgi-6a93530af4637ee56dfdef2742a999df '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h1>6. What are the optimum coating parameters for photoresists in order to achieve good film images?<\/h1>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-5jdn2-e803a3730826a5f0c149411f4b7e24ac\">\n.flex_column.av-5jdn2-e803a3730826a5f0c149411f4b7e24ac{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-5jdn2-e803a3730826a5f0c149411f4b7e24ac av_one_third  avia-builder-el-3  el_after_av_two_third  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><article  class='iconbox iconbox_left av-5b3hq-553f92867ba43c90cc760ca6a5d2c833  avia-builder-el-4  avia-builder-el-no-sibling '  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"iconbox_content\"><header class=\"entry-content-header\"><div class=\"iconbox_icon heading-color\" aria-hidden='true' data-av_icon='\ue831' data-av_iconfont='entypo-fontello'><\/div><h3 class='iconbox_content_title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki\/' title='Back to the Resist Wiki Overview'  >Back to the Resist Wiki Overview<\/a><\/h3><\/header><div class='iconbox_content_container '  itemprop=\"text\" ><\/div><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div><\/div><\/div><\/main><!-- close content main element --><\/div><\/div><div id='av_section_2'  class='avia-section av-4csdu-1afc5eb6613758e1891980fa13303d2b main_color avia-section-default avia-no-shadow  avia-builder-el-5  el_after_av_section  avia-builder-el-last  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-22'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-3nw0e-12ceee9e42cf8b39c1e2302f84543d7b\">\n.flex_column.av-3nw0e-12ceee9e42cf8b39c1e2302f84543d7b{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-3nw0e-12ceee9e42cf8b39c1e2302f84543d7b av_two_third  avia-builder-el-6  el_before_av_one_third  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-3732m-43c7884fe5caa459b31358ad8a393296 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p class=\"p1\">Photoresists (also photo coatings) are primarily used in micro electronics and micro systems technologies for the production of \u00b5m- and sub-\u00b5m structures. These resists are generally deposited by spin coating. The optimal spin speed is in a range between 2000 \u2013 4000 rpm for thin resists and between 800 \u2013 2000 rpm (rpm = rotations per minute) for thick resists. Generally possible is a spin speed of up to 9000 rpm or as low as 250 rpm. Depending on the type of resist, films of 100 nm to 200 \u00b5m can be produced with this technique. Thicker films of up to 1 mm are generated with casting procedures.<\/p>\n<p class=\"p1\">As a rule of thumb: A resist with a layer thickness of 1.0 \u00b5m at 4000 rpm will be 2.0 \u00b5m thick at 1000 rpm. At 250 rpm, this resist will have a thickness of 4.0 \u00b5m, but with major edge bead formation. By varying the spin speed (250-9000 rpm), the layer thickness of each resist can in general maximally be quadrupled.<\/p>\n<p class=\"p1\">30 seconds are sufficient to obtain the desired film thickness at spin speeds &gt; 1500 rpm. The time should be extended to 60 s if lower spin speeds are used.<\/p>\n<p class=\"p1\">Alternative coating techniques are:<\/p>\n<ul class=\"ul1\">\n<li class=\"li1\">Dip coating (for large and\/or uneven substrates)<\/li>\n<li class=\"li1\">Spray coating (in combination with spin coating for economic use, for highly structured topologies, or for otherwise complicated substrates)<\/li>\n<li class=\"li1\">Roller coating (large formats, e.g. printing plates)<\/li>\n<\/ul>\n<p class=\"p1\">Substrates should have room temperature before coating. Resists have to be adjusted to the temperature of the (preferably air-conditioned) working area. If the resist is too cold, air moisture precipitates on the resist. Bottles removed from the refrigerator should therefore be warmed to room temperature for a few hours prior to opening.<\/p>\n<p class=\"p1\">Air bubbles can be avoided if resist bottles are slightly opened a few hours before coating to allow for pressure compensation and are then left undisturbed. Thick resists require several hours for this process, thin resists need less time. Applying the resist with caution and not too fast with a pipette or dispenser will also prevent bubbles and inhomogeneity of the resist films.<\/p>\n<p class=\"p1\">A repeated opening of resist bottles causes evaporation of the solvent and an increased viscosity of the resist. For resist films with a thickness of 1.4\u00a0<span class=\"s2\">\u03bc<\/span>m, a loss of only 1 % of the solvent already increases the film thickness by 4 %, thus requiring considerably higher exposure doses.<\/p>\n<p class=\"p2\">Generally used coating conditions are temperatures of 20 to 25 \u00b0C with a temperature constancy of + 1 \u00b0C (optimum 21 \u00b0C) and a relative humidity of 30 to 50 % (optimum 43 %). Above a humidity of 70 %, coating is basically impossible. The air moisture also affects the film thickness which is reduced with increasing humidity. For AR-P 3510, the film thickness decreases by about 2 nm per each percent of humidity. At spin speeds of &gt; 1500 rpm, 30 s are sufficient to obtain the desired film thickness. At lower spin speeds, the time should be extended to 60 s. For an exposure of rectangular masks, usually a Gyrset (closed chuck) system is used which provides a higher film quality and reduces edge bead formation. It has however to be taken into account that the film thickness decreases to approximately 70 % of the film thickness which is obtained with open chucks.<\/p>\n<p><a class=\"fancybox image\" href=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2014\/02\/thickness_vs_humidity_ar-p3510.jpg\"><img decoding=\"async\" class=\"alignnone size-medium wp-image-1225\" src=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2014\/02\/thickness_vs_humidity_ar-p3510-232x190.jpg\" alt=\"thickness_vs_humidity_AR-P3510\" width=\"232\" height=\"190\" srcset=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2014\/02\/thickness_vs_humidity_ar-p3510-232x190.jpg 232w, https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2014\/02\/thickness_vs_humidity_ar-p3510.jpg 418w\" sizes=\"(max-width: 232px) 100vw, 232px\" \/><\/a><\/p>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-2kkku-8191e9bf5b4da32355deb2d5acc660b9\">\n.flex_column.av-2kkku-8191e9bf5b4da32355deb2d5acc660b9{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-2kkku-8191e9bf5b4da32355deb2d5acc660b9 av_one_third  avia-builder-el-8  el_after_av_two_third  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><p><section  class='av_textblock_section av-28zde-b9133d79c2767e15587e3c4f897b3e3f '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p>Overview Photoresist FAQs<\/p>\n<\/div><\/section><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-63du-b9991a3108baa50512d77268d297d719\">\n#top .hr.hr-invisible.av-63du-b9991a3108baa50512d77268d297d719{\nheight:25px;\n}\n<\/style>\n<div  class='hr av-63du-b9991a3108baa50512d77268d297d719 hr-invisible  avia-builder-el-10  el_after_av_textblock  el_before_av_magazine '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<div  id=\"avia-magazine-1\"  class='av-magazine av-16jhy-20c499050670dd23873d6ea42a20fed1  avia-builder-el-11  el_after_av_hr  avia-builder-el-last   avia-builder-el-11  el_after_av_hr  avia-builder-el-last ' ><div class='av-magazine-group sort_all'><article class='av-magazine-entry av-magazine-entry-id-17 av-magazine-format-standard av-magazine-type-post av-magazine-entry-1 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-21T12:38:35+01:00\" >21. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-what-are-photoresists-composed-of-and-how-do-they-work\/' title='Link to: 1. What are photoresists composed of, and how do they work?'>1. What are photoresists composed of, and how do they work?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-18 av-magazine-format-standard av-magazine-type-post av-magazine-entry-2 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-20T12:52:40+01:00\" >20. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wikiresist-wiki-for-how-long-are-photoresists-stable-and-what-are-the-optimal-storage-conditions\/' title='Link to: 2. For how long are photoresists stable, and what are the optimal storage conditions?'>2. For how long are photoresists stable, and what are the optimal storage conditions?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-19 av-magazine-format-standard av-magazine-type-post av-magazine-entry-3 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-19T13:19:43+01:00\" >19. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-how-may-age-related-changes-influence-the-quality-of-a-photoresist\/' title='Link to: 3. How may age-related changes influence the quality of a photoresist?'>3. How may age-related changes influence the quality of a photoresist?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-20 av-magazine-format-standard av-magazine-type-post av-magazine-entry-4 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-18T13:28:02+01:00\" >18. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-what-is-the-optimal-pre-treatment-of-substrates-for-photoresists\/' title='Link to: 4.What is the optimal pre-treatment of substrates for photoresists?'>4.What is the optimal pre-treatment of substrates for photoresists?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-21 av-magazine-format-standard av-magazine-type-post av-magazine-entry-5 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-17T13:33:22+01:00\" >17. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-what-are-the-adhesion-features-of-photoresists-on-different-wafers\/' title='Link to: 5. What are the adhesion features of photoresists on different wafers?'>5. What are the adhesion features of photoresists on different wafers?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-22 av-magazine-format-standard av-magazine-type-post av-magazine-entry-6 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-16T13:41:08+01:00\" >16. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-what-are-the-optimum-coating-parameters-for-photoresists-in-order-to-achieve-good-film-images\/' title='Link to: 6. What are the optimum coating parameters for photoresists in order to achieve good film images?'>6. What are the optimum coating parameters for photoresists in order to achieve good film images?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-23 av-magazine-format-standard av-magazine-type-post av-magazine-entry-7 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-15T13:52:24+01:00\" >15. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-why-may-air-bubbles-develop-in-photoresist-films-and-how-can-they-be-avoided\/' title='Link to: 7. Why may air bubbles develop in photoresist films, and how can they be avoided?'>7. Why may air bubbles develop in photoresist films, and how can they be avoided?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-24 av-magazine-format-standard av-magazine-type-post av-magazine-entry-8 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-14T13:58:35+01:00\" >14. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-what-is-the-function-of-the-softbake-of-photoresist-films-after-the-coating\/' title='Link to: 8. What is the function of the softbake of photoresist films after the coating?'>8. What is the function of the softbake of photoresist films after the coating?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-26 av-magazine-format-standard av-magazine-type-post av-magazine-entry-9 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-13T14:01:22+01:00\" >13. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-how-are-photo-resists-exposed-and-how-can-the-optimum-exposure-dose-be-determined\/' title='Link to: 9. How are photo resists exposed, and how can the optimum exposure dose be determined?  How long can coated and exposed substrates be stored prior to exposure?'>9. How are photo resists exposed, and how can the optimum exposure dose be determined?  How long can coated and exposed substrates be stored prior to exposure?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-27 av-magazine-format-standard av-magazine-type-post av-magazine-entry-10 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-12T14:05:26+01:00\" >12. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-which-developers-are-optimal-for-photoresist\/' title='Link to: 10. Which developers are optimal for photoresist, and how do factors like developer concentration and temperature influence the result?'>10. Which developers are optimal for photoresist, and how do factors like developer concentration and temperature influence the result?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-28 av-magazine-format-standard av-magazine-type-post av-magazine-entry-11 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-11T14:09:57+01:00\" >11. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-how-can-resist-coatings-be-removed-again\/' title='Link to: 11.  How can resist coatings be removed again?'>11.  How can resist coatings be removed again?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-29 av-magazine-format-standard av-magazine-type-post av-magazine-entry-12 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-10T14:16:10+01:00\" >10. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-what-is-the-application-range-of-protective-coatings\/' title='Link to: 12. What is the application range of protective coatings?'>12. What is the application range of protective coatings?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-30 av-magazine-format-standard av-magazine-type-post av-magazine-entry-13 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-09T14:19:38+01:00\" >9. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-how-do-image-reversal-resists-work\/' title='Link to: 13. How do image reversal resists work?'>13. How do image reversal resists work?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-31 av-magazine-format-standard av-magazine-type-post av-magazine-entry-14 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-08T14:21:37+01:00\" >8. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-how-can-undercut-patterns-lift-off-structures-be-produced-in-one-or-two-layer-systems\/' title='Link to: 14. How can undercut patterns (lift-off structures) be produced in one- or two layer systems?'>14. How can undercut patterns (lift-off structures) be produced in one- or two layer systems?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-32 av-magazine-format-standard av-magazine-type-post av-magazine-entry-15 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-07T14:23:58+01:00\" >7. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-how-can-thick-films-of-10-%c2%b5m-be-processed-in-an-optimal-way\/' title='Link to: 15. How can thick films of &gt; 10 \u00b5m be processed in an optimal way?'>15. How can thick films of > 10 \u00b5m be processed in an optimal way?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-33 av-magazine-format-standard av-magazine-type-post av-magazine-entry-16 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-06T09:37:59+01:00\" >6. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-which-resolution-and-which-contrast-can-be-obtained-with-photoresists\/' title='Link to: 16. Which resolution and which contrast can be obtained with photoresists?'>16. Which resolution and which contrast can be obtained with photoresists?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-34 av-magazine-format-standard av-magazine-type-post av-magazine-entry-17 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-05T10:02:18+01:00\" >5. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-how-high-is-the-plasma-etch-resistance-of-photoresists\/' title='Link to: 17. How high is the plasma etch resistance of photoresists?'>17. How high is the plasma etch resistance of photoresists?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-36 av-magazine-format-standard av-magazine-type-post av-magazine-entry-18 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-04T10:11:04+01:00\" >4. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-how-high-is-the-etch-resistance-of-photoresist-in-the-presence-of-strong-acids\/' title='Link to: 18. How high is the etch resistance of photoresist in the presence of strong acids?'>18. How high is the etch resistance of photoresist in the presence of strong acids?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-37 av-magazine-format-standard av-magazine-type-post av-magazine-entry-19 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-03T10:17:43+01:00\" >3. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-which-photoresists-are-suitable-for-hydrofluoric-acid-hf-etching\/' title='Link to: 19. Which photoresists are suitable for hydrofluoric acid (HF) etching?'>19. Which photoresists are suitable for hydrofluoric acid (HF) etching?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-38 av-magazine-format-standard av-magazine-type-post av-magazine-entry-20 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2008-08-02T10:23:18+01:00\" >2. August 2008<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/faqphotoresists-0200loesemittelbestaendigkeit\/' title='Link to: 20. How high is the solvent resistance of photoresist films?'>20. How high is the solvent resistance of photoresist films?<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div><\/div><\/p><\/div>\n<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Prior to the coating procedure, resists have to be adjusted to the temperature of the (preferably air-conditioned) working area. If the resist is too cold, air moisture may precipitate on the resist.<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[121],"tags":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v22.5 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>6. 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