{"id":5354,"date":"2015-10-05T09:20:09","date_gmt":"2015-10-05T07:20:09","guid":{"rendered":"https:\/\/www.allresist.de?p=5354"},"modified":"2022-03-01T10:51:53","modified_gmt":"2022-03-01T09:51:53","slug":"resist-wiki-electra-92-variant-optimised-for-applications-on-novolac-based-resists","status":"publish","type":"post","link":"https:\/\/www.allresist.com\/resist-wiki-electra-92-variant-optimised-for-applications-on-novolac-based-resists\/","title":{"rendered":"Electra 92 variant optimised for applications on novolac-based resists"},"content":{"rendered":"\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lhajru-3a1f0533f361049dc3eeb8c96b94bfbe\">\n.avia-section.av-lhajru-3a1f0533f361049dc3eeb8c96b94bfbe{\nbackground-color:#f0faff;\nbackground-image:unset;\n}\n<\/style>\n<div id='av_section_1'  class='avia-section av-lhajru-3a1f0533f361049dc3eeb8c96b94bfbe main_color avia-section-default avia-no-shadow  avia-builder-el-0  el_before_av_section  avia-builder-el-first  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><main  role=\"main\" itemprop=\"mainContentOfPage\"  class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-5354'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jpc5yy-d63207776086b76604dc7c511303b34c\">\n.flex_column.av-jpc5yy-d63207776086b76604dc7c511303b34c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-jpc5yy-d63207776086b76604dc7c511303b34c av_two_third  avia-builder-el-1  el_before_av_one_third  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-gvb416-5f221f73803061af381e73e6201a7f98 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h1>Electra 92 variant optimised for applications on novolac-based resists<\/h1>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-fuuqnu-b23ef2f9848d3f3d17605d69fc55d401\">\n.flex_column.av-fuuqnu-b23ef2f9848d3f3d17605d69fc55d401{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-fuuqnu-b23ef2f9848d3f3d17605d69fc55d401 av_one_third  avia-builder-el-3  el_after_av_two_third  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><article  class='iconbox iconbox_left av-ea9x1m-a09d3a801fa9661a16405c0d4dc1da3f  avia-builder-el-4  avia-builder-el-no-sibling '  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"iconbox_content\"><header class=\"entry-content-header\"><div class=\"iconbox_icon heading-color\" aria-hidden='true' data-av_icon='\ue831' data-av_iconfont='entypo-fontello'><\/div><h3 class='iconbox_content_title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki\/' title='Back to the Resist Wiki Overview'  >Back to the Resist Wiki Overview<\/a><\/h3><\/header><div class='iconbox_content_container '  itemprop=\"text\" ><\/div><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div>\n\n<\/div><\/div><\/main><!-- close content main element --><\/div><\/div><div id='av_section_2'  class='avia-section av-d7sgi2-5209f094a8a8b9660bddebbd92de02a6 main_color avia-section-default avia-no-shadow  avia-builder-el-5  el_after_av_section  avia-builder-el-last  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-5354'><div class='entry-content-wrapper clearfix'>\n<section  class='av_textblock_section av-8nde2y-b11f1611e2f58c7002e6b75138539c96 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p>Novolac-based e-beam resists have other surface properties than e.g. CSAR 62, PMMA, or HSQ resists. Due to a higher solvent content of the conductive resist as for example is the case with \u00a0<b>AR-PC 5090.02<\/b>, these novolac-resists are already moderately attacked. Therefore,\u00a0<span style=\"font-weight: bold\">AR-PC 5091.02\u00a0<\/span>was designed which is characterised by improved coating properties for the coating of e-beam resists such as AR-N 7520, AR-N 7700, or AR-P 7400.<\/p>\n<p><a class=\"fancybox image\" href=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2015\/10\/60-150nm-quader-ar-n7700.08-auf-glas.jpg\"><img decoding=\"async\" class=\"alignnone size-full wp-image-2552\" src=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2015\/10\/60-150nm-quader-ar-n7700.08-auf-glas.jpg\" alt=\"60-150nm-Quader-AR-N7700.08-auf-Glas\" width=\"217\" height=\"163\" \/><\/a><\/p>\n<p><span class=\"bildunterschrift\">60 \u2013 150 nm squares of AR-N7700.08 (100 nm height) on glass<\/span><\/p>\n<p>AR-N 7700.08 as shown in the figure was spin-deposited on glass, dried, coated with SX AR-PC 5000\/91.1, and baked at 50 \u00b0C. After exposure, the Electra 92 layer was removed with water (2 x 15 seconds) and the e-beam resist subsequently developed. This resulted in a resolution of approximately up to 60 nm which is a very good value for a chemically enhanced resist. However, this high solution required a high dose of approx. 1.000 \u00b5C\/cm\u00b2 as well as a strong developer (AR 300-26).<\/p>\n<\/div><\/section>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-88kjze-ccba9002ece05e77682a9150e6ca7c7b\">\n.flex_column.av-88kjze-ccba9002ece05e77682a9150e6ca7c7b{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-88kjze-ccba9002ece05e77682a9150e6ca7c7b av_one_third  avia-builder-el-7  el_after_av_textblock  avia-builder-el-last  first flex_column_div av-zero-column-padding  column-top-margin'     ><p><section  class='av_textblock_section av-5n1cui-ab9db3656792b4831f91825da0764b35 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p>Overview E-beam Other Resists<\/p>\n<\/div><\/section><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4uvzd6-44b58feeaaf5012d15fadb6f6d0376b0\">\n#top .hr.hr-invisible.av-4uvzd6-44b58feeaaf5012d15fadb6f6d0376b0{\nheight:25px;\n}\n<\/style>\n<div  class='hr av-4uvzd6-44b58feeaaf5012d15fadb6f6d0376b0 hr-invisible  avia-builder-el-9  el_after_av_textblock  el_before_av_magazine '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<div  id=\"avia-magazine-1\"  class='av-magazine av-2v2gnu-c507a4d9e87f659acd4fa67ee4e3faf3  avia-builder-el-10  el_after_av_hr  avia-builder-el-last   avia-builder-el-10  el_after_av_hr  avia-builder-el-last ' ><div class='av-magazine-group sort_all'><article class='av-magazine-entry av-magazine-entry-id-17674 av-magazine-format-standard av-magazine-type-post av-magazine-entry-1 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-07-27T11:20:51+01:00\" >27. July 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/polyphthalaldehyde-based-electron-beam-resists-university-of-tubingen\/' title='Link to: Poly(phthalaldehyde)-based electron beam resists, University of T\u00fcbingen'>Poly(phthalaldehyde)-based electron beam resists, University of T\u00fcbingen<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-17003 av-magazine-format-standard av-magazine-type-post av-magazine-entry-2 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-03-22T11:12:11+01:00\" >22. March 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/ppa-for-two-layer-applications\/' title='Link to: PPA for two layer applications'>PPA for two layer applications<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-8122 av-magazine-format-standard av-magazine-type-post av-magazine-entry-3 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2018-10-12T14:07:57+01:00\" >12. October 2018<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/car-44-fuer-die-e-beam-lithographie\/' title='Link to: CAR 44 for e-beam lithography'>CAR 44 for e-beam lithography<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-7008 av-magazine-format-standard av-magazine-type-post av-magazine-entry-4 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2018-10-12T14:06:07+01:00\" >12. October 2018<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-atlas-46-for-e-beam-lithography\/' title='Link to: Atlas 46 for e-beam lithography'>Atlas 46 for e-beam lithography<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-8115 av-magazine-format-standard av-magazine-type-post av-magazine-entry-5 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2018-07-09T09:52:51+01:00\" >9. July 2018<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-phoenix-81-storage-conditions-and-dispatch\/' title='Link to: Phoenix 81 \u2013 Storage conditions and dispatch'>Phoenix 81 \u2013 Storage conditions and dispatch<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-8104 av-magazine-format-standard av-magazine-type-post av-magazine-entry-6 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2017-10-11T16:37:51+01:00\" >11. October 2017<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-fluorescent-resist-structures\/' title='Link to: Fluorescent resist structures'>Fluorescent resist structures<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-6370 av-magazine-format-standard av-magazine-type-post av-magazine-entry-7 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2017-02-03T14:35:15+01:00\" >3. February 2017<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/top-surface-imaging-e-beamresist\/' title='Link to: Top Surface Imaging E-Beamresist'>Top Surface Imaging E-Beamresist<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5358 av-magazine-format-standard av-magazine-type-post av-magazine-entry-8 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-10-05T09:24:51+01:00\" >5. October 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-pmma-lift-off-structures-on-semi-precious-stone-substrates-using-electra-92\/' title='Link to: PMMA lift-off structures on semi-precious stone substrates using Electra 92'>PMMA lift-off structures on semi-precious stone substrates using Electra 92<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5354 av-magazine-format-standard av-magazine-type-post av-magazine-entry-9 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-10-05T09:20:09+01:00\" >5. October 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-electra-92-variant-optimised-for-applications-on-novolac-based-resists\/' title='Link to: Electra 92 variant optimised for applications on novolac-based resists'>Electra 92 variant optimised for applications on novolac-based resists<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5350 av-magazine-format-standard av-magazine-type-post av-magazine-entry-10 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-10-05T09:14:07+01:00\" >5. October 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-conductivity-under-the-application-conditions-of-e-beam-lithography\/' title='Link to: Conductivity under the application conditions of e-beam lithography'>Conductivity under the application conditions of e-beam lithography<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5346 av-magazine-format-standard av-magazine-type-post av-magazine-entry-11 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-10-05T09:10:05+01:00\" >5. October 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-long-term-stability-of-electra-92\/' title='Link to: Long-term stability of Electra 92'>Long-term stability of Electra 92<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5226 av-magazine-format-standard av-magazine-type-post av-magazine-entry-12 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-07-21T16:11:37+01:00\" >21. July 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-polyphthalaldehyde-based-electron-beam-resists\/' title='Link to: Poly(phthalaldehyde)-based electron beam resists'>Poly(phthalaldehyde)-based electron beam resists<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5223 av-magazine-format-standard av-magazine-type-post av-magazine-entry-13 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-07-21T16:09:56+01:00\" >21. July 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-resists-for-novel-applications-in-lithography-thermally-structurable-polymers\/' title='Link to: Resists for novel applications in lithography \u2013 thermally structurable polymers'>Resists for novel applications in lithography \u2013 thermally structurable polymers<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5219 av-magazine-format-standard av-magazine-type-post av-magazine-entry-14 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-07-21T16:02:19+01:00\" >21. July 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-patterning-of-the-conductive-protective-coating-electra-92\/' title='Link to: Patterning of the conductive protective coating Electra 92'>Patterning of the conductive protective coating Electra 92<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5214 av-magazine-format-standard av-magazine-type-post av-magazine-entry-15 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-07-21T15:58:06+01:00\" >21. July 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-high-resolution-on-quartz-with-electra-92-on-hsq-resists\/' title='Link to: High resolution on quartz with Electra 92 on HSQ resists'>High resolution on quartz with Electra 92 on HSQ resists<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div><\/div><\/p><\/div>\n","protected":false},"excerpt":{"rendered":"<p>Novolac-based e-beam resists have other surface properties than e.g. CSAR 62, PMMA, or HSQ resists. Due to a higher solvent content of the conductive resist as for example is the case with SX AR-PC 5000\/90.2, these novolac-resists are already moderately attacked.<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[118],"tags":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v22.5 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Electra 92 variant optimised for applications on novolac-based resists<\/title>\n<meta name=\"description\" content=\"Novolac-based e-beam resists have other surface properties than e.g. CSAR 62, PMMA, or HSQ resists. Due to a higher solvent content of the conductive resist as for example is the case with SX AR-PC 5000\/90.2, these novolac-resists are already moderately attacked.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.allresist.com\/resist-wiki-electra-92-variant-optimised-for-applications-on-novolac-based-resists\/\" \/>\n<meta property=\"og:locale\" content=\"en_GB\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Electra 92 variant optimised for applications on novolac-based resists\" \/>\n<meta property=\"og:description\" content=\"Novolac-based e-beam resists have other surface properties than e.g. CSAR 62, PMMA, or HSQ resists. 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