{"id":5936,"date":"2016-04-13T13:31:18","date_gmt":"2016-04-13T11:31:18","guid":{"rendered":"https:\/\/www.allresist.de?p=5936"},"modified":"2022-02-23T13:07:57","modified_gmt":"2022-02-23T12:07:57","slug":"resist-wiki-csar-62-for-euv-applications","status":"publish","type":"post","link":"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/","title":{"rendered":"CSAR 62 for EUV applications"},"content":{"rendered":"\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-kt4shs-a380d1b463b1661a7f696840d3406d81\">\n.avia-section.av-kt4shs-a380d1b463b1661a7f696840d3406d81{\nbackground-color:#f0faff;\nbackground-image:unset;\n}\n<\/style>\n<div id='av_section_1'  class='avia-section av-kt4shs-a380d1b463b1661a7f696840d3406d81 main_color avia-section-default avia-no-shadow  avia-builder-el-0  el_before_av_section  avia-builder-el-first  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><main  role=\"main\" itemprop=\"mainContentOfPage\"  class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-5936'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-j2apb4-6491cb62fd1e13e8179739f2ea00a425\">\n.flex_column.av-j2apb4-6491cb62fd1e13e8179739f2ea00a425{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-j2apb4-6491cb62fd1e13e8179739f2ea00a425 av_two_third  avia-builder-el-1  el_before_av_one_third  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-hr2668-1bc70f5b767c10441cab7ddfd5c5dd8b '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h1>CSAR 62 for EUV applications<\/h1>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-f91n80-f5e6ddd58d36be319c1441e74d2db481\">\n.flex_column.av-f91n80-f5e6ddd58d36be319c1441e74d2db481{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-f91n80-f5e6ddd58d36be319c1441e74d2db481 av_one_third  avia-builder-el-3  el_after_av_two_third  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><article  class='iconbox iconbox_left av-ed5vs0-90c38be42bf728f57e9b69d6f61eb2e2  avia-builder-el-4  avia-builder-el-no-sibling '  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"iconbox_content\"><header class=\"entry-content-header\"><div class=\"iconbox_icon heading-color\" aria-hidden='true' data-av_icon='\ue831' data-av_iconfont='entypo-fontello'><\/div><h3 class='iconbox_content_title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki\/' title='Back to the Resist Wiki Overview'  >Back to the Resist Wiki Overview<\/a><\/h3><\/header><div class='iconbox_content_container '  itemprop=\"text\" ><\/div><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div>\n\n<\/div><\/div><\/main><!-- close content main element --><\/div><\/div><div id='av_section_2'  class='avia-section av-bwgq2o-5f01262d5d795f33854f65ea10d06c86 main_color avia-section-default avia-no-shadow  avia-builder-el-5  el_after_av_section  avia-builder-el-last  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-5936'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-azpvsw-d825e8fe41329ca13e50f362f569659c\">\n.flex_column.av-azpvsw-d825e8fe41329ca13e50f362f569659c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-azpvsw-d825e8fe41329ca13e50f362f569659c av_two_third  avia-builder-el-6  el_before_av_one_third  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-92w69s-8ce52b15e7ba98af35a2fc9568fc108b '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p>In addition to the use in e-beam lithography, the highly sensitive e-beam resist CSAR 62 can also be structured by exposure to UV radiation since the resist strongly absorbs UV radiation in the wavelength range of 190 \u2013 240 nm. Similar to an irradiation with electrons, polymer bonds are also cleaved by the high-energy UV radiation. The fragmented polymer then shows a significantly increased solubility in the developer in the subsequent development step (positive patterning process). Previously unknown was however the ability to structure CSAR 62 with EUV radiation. Respective studies were conducted at the RWTH Aachen (Chair for Technology of Optical Systems) by Dipl. Ing. S. Brose. Layers of CSAR 62 (AR-P 6200.09) were exposed to EUV radiation (wavelength range of 10 \u2013 16 nm) and compared with respect to contrast and sensitivity to a conventional patterning by electron beam irradiation. For CSAR 62 (layer thickness about 40 nm), a contrast of gamma = 1.8 with a sensitivity of 50 mJ\/cm\u00b2 was determined under EUV irradiation (developer AR 600-546, 5 minutes at room temperature). For e-beam exposure, a sensitivity of 85 \u00b5C\/cm\u00b2 was measured, with very similar contrast values. The observed contrast was almost identical for CSAR 62 and ZEP 520A-7, but a higher sensitivity could be measured for CSAR 62.<\/p>\n<p><img decoding=\"async\" class=\"alignnone size-full wp-image-16805\" src=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/exp.png\" alt=\"\" width=\"660\" height=\"488\" srcset=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/exp.png 660w, https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/exp-257x190.png 257w\" sizes=\"(max-width: 660px) 100vw, 660px\" \/><\/p>\n<p style=\"margin: 0in;font-family: Calibri;font-size: 11.0pt;color: #1f497d\">S. Brose, S. Danylyuk, J. Tempeler, H. Kim, P. Loosen, L. Juschkin; Proc. of SPIE 9776, Extreme Ultraviolet (EUV) Lithography VII, 97760R, (2016)<\/p>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-7wegts-7c677b67605a514751cf9a27a45a783f\">\n.flex_column.av-7wegts-7c677b67605a514751cf9a27a45a783f{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-7wegts-7c677b67605a514751cf9a27a45a783f av_one_third  avia-builder-el-8  el_after_av_two_third  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><p><section  class='av_textblock_section av-58bynk-915d03f06c0bfbee52784b47981e2a56 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p>Overview E-beam positive<\/p>\n<\/div><\/section><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-3ouksg-e41c3bd12003b22e1325701ccaf2b657\">\n#top .hr.hr-invisible.av-3ouksg-e41c3bd12003b22e1325701ccaf2b657{\nheight:25px;\n}\n<\/style>\n<div  class='hr av-3ouksg-e41c3bd12003b22e1325701ccaf2b657 hr-invisible  avia-builder-el-10  el_after_av_textblock  el_before_av_magazine '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<div  id=\"avia-magazine-1\"  class='av-magazine av-bmq0w-c9cead491c1317bfac8aa122bf24080b  avia-builder-el-11  el_after_av_hr  avia-builder-el-last   avia-builder-el-11  el_after_av_hr  avia-builder-el-last ' ><div class='av-magazine-group sort_all'><article class='av-magazine-entry av-magazine-entry-id-17524 av-magazine-format-standard av-magazine-type-post av-magazine-entry-1 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-06-09T09:54:18+01:00\" >9. June 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/three-layer-system-csar-pmmacoma-pmma\/' title='Link to: Three-layer system CSAR\/PMMAcoMA\/PMMA'>Three-layer system CSAR\/PMMAcoMA\/PMMA<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-17515 av-magazine-format-standard av-magazine-type-post av-magazine-entry-2 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-06-08T11:31:51+01:00\" >8. June 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/t-gates-with-three-layer-system-csar-pmmacoma-pmma-2\/' title='Link to: T-gates with three-layer system CSAR\/PMMAcoMA\/PMMA'>T-gates with three-layer system CSAR\/PMMAcoMA\/PMMA<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-17384 av-magazine-format-standard av-magazine-type-post av-magazine-entry-3 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-05-24T09:37:00+01:00\" >24. May 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/csar-62-mechanism-of-action\/' title='Link to: CSAR 62 \u2013 Mechanism of action'>CSAR 62 \u2013 Mechanism of action<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-16997 av-magazine-format-standard av-magazine-type-post av-magazine-entry-4 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-03-22T10:00:44+01:00\" >22. March 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/ar-p-617-two-layer-lift-off-system\/' title='Link to: AR-P 617 Two layer lift-off system'>AR-P 617 Two layer lift-off system<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-16981 av-magazine-format-standard av-magazine-type-post av-magazine-entry-5 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-03-21T12:48:57+01:00\" >21. March 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/pmma-e-beam-resist-positive-and-negative-in-the-case-of-overexposure-suitable-for-bridge-structures\/' title='Link to: PMMA e-beam resist, positive and negative in the case of overexposure, suitable for bridge structures'>PMMA e-beam resist, positive and negative in the case of overexposure, suitable for bridge structures<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-16976 av-magazine-format-standard av-magazine-type-post av-magazine-entry-6 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-03-21T12:10:32+01:00\" >21. March 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/pmma-e-beam-resist-with-flat-gradation-for-three-dimensional-structures\/' title='Link to: PMMA e-beam resist with flat gradation for three-dimensional structures'>PMMA e-beam resist with flat gradation for three-dimensional structures<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-16953 av-magazine-format-standard av-magazine-type-post av-magazine-entry-7 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-03-15T11:09:05+01:00\" >15. March 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/temperature-resistance-of-e-beam-polymers\/' title='Link to: Temperature resistance of e-beam polymers'>Temperature resistance of e-beam polymers<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-16937 av-magazine-format-standard av-magazine-type-post av-magazine-entry-8 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-03-14T12:36:14+01:00\" >14. March 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/csar-62-nanostructures-written-at-100-kv\/' title='Link to: CSAR 62 nanostructures written at 100 kV'>CSAR 62 nanostructures written at 100 kV<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-6780 av-magazine-format-standard av-magazine-type-post av-magazine-entry-9 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2018-04-25T17:18:49+01:00\" >25. April 2018<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-csar-62-single-layer-lift-off-system\/' title='Link to: CSAR 62 single layer lift-off system'>CSAR 62 single layer lift-off system<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-6568 av-magazine-format-standard av-magazine-type-post av-magazine-entry-10 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2017-10-11T17:38:18+01:00\" >11. October 2017<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-csar-62-for-thick-films\/' title='Link to: CSAR 62 for thick films'>CSAR 62 for thick films<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-6066 av-magazine-format-standard av-magazine-type-post av-magazine-entry-11 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2016-07-04T08:46:06+01:00\" >4. July 2016<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-use-of-csar-62-for-the-manufacture-of-nanostructures-on-gaas-substrates\/' title='Link to: Use of CSAR 62 for the manufacture of nanostructures on GaAs substrates'>Use of CSAR 62 for the manufacture of nanostructures on GaAs substrates<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-6061 av-magazine-format-standard av-magazine-type-post av-magazine-entry-12 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2016-07-04T08:38:50+01:00\" >4. July 2016<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-evaluation-of-various-developers-for-e-beam-exposed-csar-62-layers-100-kv\/' title='Link to: Evaluation of various developers for e-beam exposed CSAR 62 layers (100 kV)'>Evaluation of various developers for e-beam exposed CSAR 62 layers (100 kV)<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5938 av-magazine-format-standard av-magazine-type-post av-magazine-entry-13 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2016-04-13T13:34:11+01:00\" >13. April 2016<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-highly-sensitive-e-beam-resist-ar-p-617pmma-copolymer\/' title='Link to: Highly sensitive e-beam resist AR-P 617 (PMMA-copolymer)'>Highly sensitive e-beam resist AR-P 617 (PMMA-copolymer)<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5936 av-magazine-format-standard av-magazine-type-post av-magazine-entry-14 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2016-04-13T13:31:18+01:00\" >13. April 2016<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/' title='Link to: CSAR 62 for EUV applications'>CSAR 62 for EUV applications<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5931 av-magazine-format-standard av-magazine-type-post av-magazine-entry-15 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2016-04-13T13:29:48+01:00\" >13. April 2016<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-hf-etching-of-gaas-with-csar-62-masks\/' title='Link to: HF etching of GaAs with CSAR 62 masks'>HF etching of GaAs with CSAR 62 masks<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5923 av-magazine-format-standard av-magazine-type-post av-magazine-entry-16 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2016-04-13T13:24:29+01:00\" >13. April 2016<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-boe-etching-of-sio2-with-csar-62-mask\/' title='Link to: BOE etching of SiO2 with CSAR 62 mask'>BOE etching of SiO2 with CSAR 62 mask<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5385 av-magazine-format-standard av-magazine-type-post av-magazine-entry-17 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-10-05T09:50:02+01:00\" >5. October 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-manufacture-of-plasmonic-nanostructures-with-csar-62\/' title='Link to: Manufacture of plasmonic nanostructures with CSAR 62'>Manufacture of plasmonic nanostructures with CSAR 62<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5377 av-magazine-format-standard av-magazine-type-post av-magazine-entry-18 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-10-05T09:45:10+01:00\" >5. October 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-csar-62-experimental-studies-on-new-sensitive-developers\/' title='Link to: CSAR 62 \u2013 Experimental studies on new, sensitive developers'>CSAR 62 \u2013 Experimental studies on new, sensitive developers<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5366 av-magazine-format-standard av-magazine-type-post av-magazine-entry-19 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-10-05T09:37:12+01:00\" >5. October 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-csar-62-development-at-low-temperatures\/' title='Link to: CSAR 62 \u2013 Development at low temperatures'>CSAR 62 \u2013 Development at low temperatures<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5362 av-magazine-format-standard av-magazine-type-post av-magazine-entry-20 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-10-05T09:31:37+01:00\" >5. October 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-csar-structures-on-glass\/' title='Link to: CSAR structures on glass'>CSAR structures on glass<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-4699 av-magazine-format-standard av-magazine-type-post av-magazine-entry-21 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2014-10-27T10:33:09+01:00\" >27. October 2014<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-csar-62-avoidance-of-particles-during-large-area-exposures\/' title='Link to: CSAR 62 Avoidance of particles during large-area exposures'>CSAR 62 Avoidance of particles during large-area exposures<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-4693 av-magazine-format-standard av-magazine-type-post av-magazine-entry-22 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2014-10-27T10:31:38+01:00\" >27. October 2014<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-csar-62-lift-off-for-thick-layers\/' title='Link to: CSAR 62 lift-off for thick layers'>CSAR 62 lift-off for thick layers<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-4690 av-magazine-format-standard av-magazine-type-post av-magazine-entry-23 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2014-10-27T10:25:42+01:00\" >27. October 2014<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-csar-62-thick-layers\/' title='Link to: CSAR 62 thick layers'>CSAR 62 thick layers<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-4535 av-magazine-format-standard av-magazine-type-post av-magazine-entry-24 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2014-06-13T16:35:27+01:00\" >13. June 2014<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-thick-csar-62\/' title='Link to: Thick CSAR 62'>Thick CSAR 62<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-233 av-magazine-format-standard av-magazine-type-post av-magazine-entry-25 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2013-07-09T06:41:16+01:00\" >9. July 2013<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-solvents-in-e-beam-resists\/' title='Link to: Solvents in e-beam resists'>Solvents in e-beam resists<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-232 av-magazine-format-standard av-magazine-type-post av-magazine-entry-26 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2013-02-27T09:46:44+01:00\" >27. February 2013<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-collapse-of-extreme-high-resolution-e-beam-resist-structures\/' title='Link to: Collapse of extreme high-resolution e-beam resist structures'>Collapse of extreme high-resolution e-beam resist structures<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-237 av-magazine-format-standard av-magazine-type-post av-magazine-entry-27 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2012-09-21T13:02:38+01:00\" >21. September 2012<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-two-layer-pmma-e-beam-resist-system-for-high-resolution-lift-off\/' title='Link to: Two-layer PMMA e-beam resist system for high-resolution lift-off'>Two-layer PMMA e-beam resist system for high-resolution lift-off<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-234 av-magazine-format-standard av-magazine-type-post av-magazine-entry-28 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2012-08-31T09:45:00+01:00\" >31. August 2012<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-high-resolution-pmma-one-layer-resist\/' title='Link to: High-resolution PMMA one layer resist'>High-resolution PMMA one layer resist<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-236 av-magazine-format-standard av-magazine-type-post av-magazine-entry-29 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2012-07-13T13:12:07+01:00\" >13. July 2012<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-positive-polyimide-resist-for-e-beam-lithography\/' title='Link to: Positive polyimide resist for e-beam-lithography'>Positive polyimide resist for e-beam-lithography<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div><\/div><\/p><\/div>\n","protected":false},"excerpt":{"rendered":"<p>In addition to the use in e-beam lithography, the highly sensitive e-beam resist CSAR 62 can also be structured by exposure to UV radiation since the resist strongly absorbs UV radiation in the wavelength range of 190 \u2013 240 nm.<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[108,87],"tags":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v22.5 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Resist-Wiki:\u00a0CSAR 62 f\u00fcr EUV-Anwendungen - Allresist DE<\/title>\n<meta name=\"description\" content=\"CSAR 62 for EUV applications\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/\" \/>\n<meta property=\"og:locale\" content=\"en_GB\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Resist-Wiki:\u00a0CSAR 62 f\u00fcr EUV-Anwendungen - Allresist DE\" \/>\n<meta property=\"og:description\" content=\"CSAR 62 for EUV applications\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/\" \/>\n<meta property=\"og:site_name\" content=\"Allresist EN\" \/>\n<meta property=\"article:published_time\" content=\"2016-04-13T11:31:18+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2022-02-23T12:07:57+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/exp.png\" \/>\n<meta name=\"author\" content=\"AllAdmin\" \/>\n<meta name=\"twitter:label1\" content=\"Written by\" \/>\n\t<meta name=\"twitter:data1\" content=\"AllAdmin\" \/>\n\t<meta name=\"twitter:label2\" content=\"Estimated reading time\" \/>\n\t<meta name=\"twitter:data2\" content=\"5 minutes\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/\",\"url\":\"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/\",\"name\":\"Resist-Wiki:\u00a0CSAR 62 f\u00fcr EUV-Anwendungen - Allresist DE\",\"isPartOf\":{\"@id\":\"https:\/\/www.allresist.com\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/#primaryimage\"},\"image\":{\"@id\":\"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/exp.png\",\"datePublished\":\"2016-04-13T11:31:18+00:00\",\"dateModified\":\"2022-02-23T12:07:57+00:00\",\"author\":{\"@id\":\"https:\/\/www.allresist.com\/#\/schema\/person\/5d838b413541e18a3d6cbcfc5854bba8\"},\"description\":\"CSAR 62 for EUV applications\",\"breadcrumb\":{\"@id\":\"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/#breadcrumb\"},\"inLanguage\":\"en-GB\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"en-GB\",\"@id\":\"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/#primaryimage\",\"url\":\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/exp.png\",\"contentUrl\":\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/exp.png\",\"width\":660,\"height\":488},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\/\/www.allresist.com\/home\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"CSAR 62 for EUV applications\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.allresist.com\/#website\",\"url\":\"https:\/\/www.allresist.com\/\",\"name\":\"Allresist EN\",\"description\":\"ALLRESIST GmbH - Strausberg, Germany\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.allresist.com\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"en-GB\"},{\"@type\":\"Person\",\"@id\":\"https:\/\/www.allresist.com\/#\/schema\/person\/5d838b413541e18a3d6cbcfc5854bba8\",\"name\":\"AllAdmin\",\"url\":\"https:\/\/www.allresist.com\/author\/alladmin\/\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"Resist-Wiki:\u00a0CSAR 62 f\u00fcr EUV-Anwendungen - Allresist DE","description":"CSAR 62 for EUV applications","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/","og_locale":"en_GB","og_type":"article","og_title":"Resist-Wiki:\u00a0CSAR 62 f\u00fcr EUV-Anwendungen - Allresist DE","og_description":"CSAR 62 for EUV applications","og_url":"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/","og_site_name":"Allresist EN","article_published_time":"2016-04-13T11:31:18+00:00","article_modified_time":"2022-02-23T12:07:57+00:00","og_image":[{"url":"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/exp.png"}],"author":"AllAdmin","twitter_misc":{"Written by":"AllAdmin","Estimated reading time":"5 minutes"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/","url":"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/","name":"Resist-Wiki:\u00a0CSAR 62 f\u00fcr EUV-Anwendungen - Allresist DE","isPartOf":{"@id":"https:\/\/www.allresist.com\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/#primaryimage"},"image":{"@id":"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/#primaryimage"},"thumbnailUrl":"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/exp.png","datePublished":"2016-04-13T11:31:18+00:00","dateModified":"2022-02-23T12:07:57+00:00","author":{"@id":"https:\/\/www.allresist.com\/#\/schema\/person\/5d838b413541e18a3d6cbcfc5854bba8"},"description":"CSAR 62 for EUV applications","breadcrumb":{"@id":"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/#breadcrumb"},"inLanguage":"en-GB","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/"]}]},{"@type":"ImageObject","inLanguage":"en-GB","@id":"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/#primaryimage","url":"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/exp.png","contentUrl":"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/exp.png","width":660,"height":488},{"@type":"BreadcrumbList","@id":"https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/www.allresist.com\/home\/"},{"@type":"ListItem","position":2,"name":"CSAR 62 for EUV applications"}]},{"@type":"WebSite","@id":"https:\/\/www.allresist.com\/#website","url":"https:\/\/www.allresist.com\/","name":"Allresist EN","description":"ALLRESIST GmbH - Strausberg, Germany","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.allresist.com\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"en-GB"},{"@type":"Person","@id":"https:\/\/www.allresist.com\/#\/schema\/person\/5d838b413541e18a3d6cbcfc5854bba8","name":"AllAdmin","url":"https:\/\/www.allresist.com\/author\/alladmin\/"}]}},"_links":{"self":[{"href":"https:\/\/www.allresist.com\/wp-json\/wp\/v2\/posts\/5936"}],"collection":[{"href":"https:\/\/www.allresist.com\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.allresist.com\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.allresist.com\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.allresist.com\/wp-json\/wp\/v2\/comments?post=5936"}],"version-history":[{"count":2,"href":"https:\/\/www.allresist.com\/wp-json\/wp\/v2\/posts\/5936\/revisions"}],"predecessor-version":[{"id":16804,"href":"https:\/\/www.allresist.com\/wp-json\/wp\/v2\/posts\/5936\/revisions\/16804"}],"wp:attachment":[{"href":"https:\/\/www.allresist.com\/wp-json\/wp\/v2\/media?parent=5936"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.allresist.com\/wp-json\/wp\/v2\/categories?post=5936"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.allresist.com\/wp-json\/wp\/v2\/tags?post=5936"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}