{"id":6066,"date":"2016-07-04T08:46:06","date_gmt":"2016-07-04T06:46:06","guid":{"rendered":"https:\/\/www.allresist.de?p=6066"},"modified":"2022-03-15T12:59:48","modified_gmt":"2022-03-15T11:59:48","slug":"resist-wiki-use-of-csar-62-for-the-manufacture-of-nanostructures-on-gaas-substrates","status":"publish","type":"post","link":"https:\/\/www.allresist.com\/resist-wiki-use-of-csar-62-for-the-manufacture-of-nanostructures-on-gaas-substrates\/","title":{"rendered":"Use of CSAR 62 for the manufacture of nanostructures on GaAs substrates"},"content":{"rendered":"\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lg3wtu-dbf569234e29dd1f445cc9ed30d7eb4a\">\n.avia-section.av-lg3wtu-dbf569234e29dd1f445cc9ed30d7eb4a{\nbackground-color:#f0faff;\nbackground-image:unset;\n}\n<\/style>\n<div id='av_section_1'  class='avia-section av-lg3wtu-dbf569234e29dd1f445cc9ed30d7eb4a main_color avia-section-default avia-no-shadow  avia-builder-el-0  el_before_av_section  avia-builder-el-first  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><main  role=\"main\" itemprop=\"mainContentOfPage\"  class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-6066'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-j6oo4y-b963e9cf86e357778e9308f5a5e3948c\">\n.flex_column.av-j6oo4y-b963e9cf86e357778e9308f5a5e3948c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-j6oo4y-b963e9cf86e357778e9308f5a5e3948c av_two_third  avia-builder-el-1  el_before_av_one_third  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-hev7sy-a6ca937585d3e4f51835d994a9a3918c '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h1>Use of CSAR 62 for the manufacture of nanostructures on GaAs substrates<\/h1>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1javci-8a43faa271e548f36c7d9c68240b7f93\">\n.flex_column.av-1javci-8a43faa271e548f36c7d9c68240b7f93{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-1javci-8a43faa271e548f36c7d9c68240b7f93 av_one_third  avia-builder-el-3  el_after_av_two_third  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><article  class='iconbox iconbox_left av-dw0lnm-7a02f4edd22899d2be2612b049245bc4  avia-builder-el-4  avia-builder-el-no-sibling '  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"iconbox_content\"><header class=\"entry-content-header\"><div class=\"iconbox_icon heading-color\" aria-hidden='true' data-av_icon='\ue831' data-av_iconfont='entypo-fontello'><\/div><h3 class='iconbox_content_title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki\/' title='Back to the Resist Wiki Overview'  >Back to the Resist Wiki Overview<\/a><\/h3><\/header><div class='iconbox_content_container '  itemprop=\"text\" ><\/div><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div><\/div><\/div><\/main><!-- close content main element --><\/div><\/div><div id='av_section_2'  class='avia-section av-d3107m-1f8c5f6cae34816f67cde4ee72080a75 main_color avia-section-default avia-no-shadow  avia-builder-el-5  el_after_av_section  avia-builder-el-last  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-6066'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-af558i-25af5511b744114f639639798ce4d06e\">\n.flex_column.av-af558i-25af5511b744114f639639798ce4d06e{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-af558i-25af5511b744114f639639798ce4d06e av_two_third  avia-builder-el-6  el_before_av_one_third  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-9nouj6-96724b1038b65446d6fa2df31c77e79c '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><div id=\"post-2985\" class=\"post\" role=\"article\">\n<div class=\"entry clearfix\">\n<p class=\"p1\">CSAR 62 is routinely used to produce innovative quantum devices at the TU Delft (Mr. Toivo Hensgens, TU-Delft, the Netherlands). For the structures shown below, a 72 nm layer of CSAR 62 was exposed to 100 kV and then developed with amyl acetate. By metal deposition (lift-off process), nano-sized aluminium gates could be realized on GaAs. These structures are suitable for the investigation of single electrons which can be captured electrostatically in the underlying semiconductor layer; an important prerequisite for the realisation of quantum processors.<\/p>\n<p class=\"p1\"><a class=\"fancybox image\" href=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2016\/07\/al-gates-on-gaas-produced-with-csar62.jpg\"><img decoding=\"async\" class=\"alignnone wp-image-2958 size-medium\" src=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2016\/07\/al-gates-on-gaas-produced-with-csar62-345x132.jpg\" alt=\"Al-gates-on-GaAs-produced-with-CSAR62\" width=\"345\" height=\"132\" srcset=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2016\/07\/al-gates-on-gaas-produced-with-csar62-345x132.jpg 345w, https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2016\/07\/al-gates-on-gaas-produced-with-csar62-768x293.jpg 768w, https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2016\/07\/al-gates-on-gaas-produced-with-csar62-600x229.jpg 600w, https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2016\/07\/al-gates-on-gaas-produced-with-csar62.jpg 823w\" sizes=\"(max-width: 345px) 100vw, 345px\" \/><\/a><\/p>\n<p class=\"p1\"><span class=\"bildunterschrift\">Fig. 1: Al-gates on GaAs, produced through a subsequent metallisation of CSAR 62 lift-off architectures (layer thickness CSAR 62: 72 nm, 100 kV VISTEC \u2013 e-beam writer EBPG5000+ or EBPG5200). Line diameter: about 16 nm or 34 nm.<\/span><\/p>\n<p class=\"p1\">CSAR 62 is also highly suitable for the production of regular grid structures which can e.g. be used for the investigation of quantum effects with electrons (2D electron gas).<\/p>\n<p class=\"p1\"><a class=\"fancybox image\" href=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2016\/07\/highly-regular-grid-structure-of-csar62-on-gaas.jpg\"><img decoding=\"async\" class=\"alignnone wp-image-2960 size-medium\" src=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2016\/07\/highly-regular-grid-structure-of-csar62-on-gaas-265x190.jpg\" alt=\"Highly-regular-grid-structure-of-CSAR62-on-GaAs\" width=\"265\" height=\"190\" srcset=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2016\/07\/highly-regular-grid-structure-of-csar62-on-gaas-265x190.jpg 265w, https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2016\/07\/highly-regular-grid-structure-of-csar62-on-gaas-558x400.jpg 558w, https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2016\/07\/highly-regular-grid-structure-of-csar62-on-gaas.jpg 725w\" sizes=\"(max-width: 265px) 100vw, 265px\" \/><\/a><\/p>\n<p class=\"p1\"><span class=\"bildunterschrift\">Fig. 2: Highly regular grid structure of CSAR 62 on GaAs, mesh diameter about 150 nm, line diameter 40 nm (working group of Mr. Toivo Hensgens, TU Delft, the Netherlands).<\/span><\/p>\n<\/div>\n<\/div>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-7r8n42-8701ddd4b3bb816021ce6e5861f8e036\">\n.flex_column.av-7r8n42-8701ddd4b3bb816021ce6e5861f8e036{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-7r8n42-8701ddd4b3bb816021ce6e5861f8e036 av_one_third  avia-builder-el-8  el_after_av_two_third  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><p><section  class='av_textblock_section av-6emduq-53c345c044c4e38382ca467e3466c69d '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p>E-Beam Resist Positiv<\/p>\n<\/div><\/section><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-h4rr6-f57dc31d432e1455dc579874fb74db36\">\n#top .hr.hr-invisible.av-h4rr6-f57dc31d432e1455dc579874fb74db36{\nheight:25px;\n}\n<\/style>\n<div  class='hr av-h4rr6-f57dc31d432e1455dc579874fb74db36 hr-invisible  avia-builder-el-10  el_after_av_textblock  el_before_av_magazine '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<div  id=\"avia-magazine-1\"  class='av-magazine av-2v5wo2-1b536cfd67e18574ce24d09963c1e818  avia-builder-el-11  el_after_av_hr  avia-builder-el-last   avia-builder-el-11  el_after_av_hr  avia-builder-el-last ' ><div class='av-magazine-group sort_all'><article class='av-magazine-entry av-magazine-entry-id-17524 av-magazine-format-standard av-magazine-type-post av-magazine-entry-1 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-06-09T09:54:18+01:00\" >9. June 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/three-layer-system-csar-pmmacoma-pmma\/' title='Link to: Three-layer system CSAR\/PMMAcoMA\/PMMA'>Three-layer system CSAR\/PMMAcoMA\/PMMA<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-17515 av-magazine-format-standard av-magazine-type-post av-magazine-entry-2 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-06-08T11:31:51+01:00\" >8. June 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/t-gates-with-three-layer-system-csar-pmmacoma-pmma-2\/' title='Link to: T-gates with three-layer system CSAR\/PMMAcoMA\/PMMA'>T-gates with three-layer system CSAR\/PMMAcoMA\/PMMA<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-17384 av-magazine-format-standard av-magazine-type-post av-magazine-entry-3 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-05-24T09:37:00+01:00\" >24. May 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/csar-62-mechanism-of-action\/' title='Link to: CSAR 62 \u2013 Mechanism of action'>CSAR 62 \u2013 Mechanism of action<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-16997 av-magazine-format-standard av-magazine-type-post av-magazine-entry-4 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-03-22T10:00:44+01:00\" >22. March 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/ar-p-617-two-layer-lift-off-system\/' title='Link to: AR-P 617 Two layer lift-off system'>AR-P 617 Two layer lift-off system<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-16981 av-magazine-format-standard av-magazine-type-post av-magazine-entry-5 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-03-21T12:48:57+01:00\" >21. March 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/pmma-e-beam-resist-positive-and-negative-in-the-case-of-overexposure-suitable-for-bridge-structures\/' title='Link to: PMMA e-beam resist, positive and negative in the case of overexposure, suitable for bridge structures'>PMMA e-beam resist, positive and negative in the case of overexposure, suitable for bridge structures<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-16976 av-magazine-format-standard av-magazine-type-post av-magazine-entry-6 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-03-21T12:10:32+01:00\" >21. March 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/pmma-e-beam-resist-with-flat-gradation-for-three-dimensional-structures\/' title='Link to: PMMA e-beam resist with flat gradation for three-dimensional structures'>PMMA e-beam resist with flat gradation for three-dimensional structures<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-16953 av-magazine-format-standard av-magazine-type-post av-magazine-entry-7 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-03-15T11:09:05+01:00\" >15. March 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/temperature-resistance-of-e-beam-polymers\/' title='Link to: Temperature resistance of e-beam polymers'>Temperature resistance of e-beam polymers<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-16937 av-magazine-format-standard av-magazine-type-post av-magazine-entry-8 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-03-14T12:36:14+01:00\" >14. March 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/csar-62-nanostructures-written-at-100-kv\/' title='Link to: CSAR 62 nanostructures written at 100 kV'>CSAR 62 nanostructures written at 100 kV<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-6780 av-magazine-format-standard av-magazine-type-post av-magazine-entry-9 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2018-04-25T17:18:49+01:00\" >25. April 2018<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-csar-62-single-layer-lift-off-system\/' title='Link to: CSAR 62 single layer lift-off system'>CSAR 62 single layer lift-off system<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-6568 av-magazine-format-standard av-magazine-type-post av-magazine-entry-10 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2017-10-11T17:38:18+01:00\" >11. October 2017<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-csar-62-for-thick-films\/' title='Link to: CSAR 62 for thick films'>CSAR 62 for thick films<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-6066 av-magazine-format-standard av-magazine-type-post av-magazine-entry-11 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2016-07-04T08:46:06+01:00\" >4. July 2016<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-use-of-csar-62-for-the-manufacture-of-nanostructures-on-gaas-substrates\/' title='Link to: Use of CSAR 62 for the manufacture of nanostructures on GaAs substrates'>Use of CSAR 62 for the manufacture of nanostructures on GaAs substrates<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-6061 av-magazine-format-standard av-magazine-type-post av-magazine-entry-12 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2016-07-04T08:38:50+01:00\" >4. July 2016<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-evaluation-of-various-developers-for-e-beam-exposed-csar-62-layers-100-kv\/' title='Link to: Evaluation of various developers for e-beam exposed CSAR 62 layers (100 kV)'>Evaluation of various developers for e-beam exposed CSAR 62 layers (100 kV)<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5938 av-magazine-format-standard av-magazine-type-post av-magazine-entry-13 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2016-04-13T13:34:11+01:00\" >13. April 2016<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-highly-sensitive-e-beam-resist-ar-p-617pmma-copolymer\/' title='Link to: Highly sensitive e-beam resist AR-P 617 (PMMA-copolymer)'>Highly sensitive e-beam resist AR-P 617 (PMMA-copolymer)<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5936 av-magazine-format-standard av-magazine-type-post av-magazine-entry-14 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2016-04-13T13:31:18+01:00\" >13. April 2016<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-csar-62-for-euv-applications\/' title='Link to: CSAR 62 for EUV applications'>CSAR 62 for EUV applications<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5931 av-magazine-format-standard av-magazine-type-post av-magazine-entry-15 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2016-04-13T13:29:48+01:00\" >13. April 2016<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-hf-etching-of-gaas-with-csar-62-masks\/' title='Link to: HF etching of GaAs with CSAR 62 masks'>HF etching of GaAs with CSAR 62 masks<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5923 av-magazine-format-standard av-magazine-type-post av-magazine-entry-16 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2016-04-13T13:24:29+01:00\" >13. April 2016<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-boe-etching-of-sio2-with-csar-62-mask\/' title='Link to: BOE etching of SiO2 with CSAR 62 mask'>BOE etching of SiO2 with CSAR 62 mask<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5385 av-magazine-format-standard av-magazine-type-post av-magazine-entry-17 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-10-05T09:50:02+01:00\" >5. October 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-manufacture-of-plasmonic-nanostructures-with-csar-62\/' title='Link to: Manufacture of plasmonic nanostructures with CSAR 62'>Manufacture of plasmonic nanostructures with CSAR 62<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5377 av-magazine-format-standard av-magazine-type-post av-magazine-entry-18 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-10-05T09:45:10+01:00\" >5. October 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-csar-62-experimental-studies-on-new-sensitive-developers\/' title='Link to: CSAR 62 \u2013 Experimental studies on new, sensitive developers'>CSAR 62 \u2013 Experimental studies on new, sensitive developers<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5366 av-magazine-format-standard av-magazine-type-post av-magazine-entry-19 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-10-05T09:37:12+01:00\" >5. October 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-csar-62-development-at-low-temperatures\/' title='Link to: CSAR 62 \u2013 Development at low temperatures'>CSAR 62 \u2013 Development at low temperatures<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5362 av-magazine-format-standard av-magazine-type-post av-magazine-entry-20 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-10-05T09:31:37+01:00\" >5. October 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-csar-structures-on-glass\/' title='Link to: CSAR structures on glass'>CSAR structures on glass<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-4699 av-magazine-format-standard av-magazine-type-post av-magazine-entry-21 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2014-10-27T10:33:09+01:00\" >27. October 2014<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-csar-62-avoidance-of-particles-during-large-area-exposures\/' title='Link to: CSAR 62 Avoidance of particles during large-area exposures'>CSAR 62 Avoidance of particles during large-area exposures<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-4693 av-magazine-format-standard av-magazine-type-post av-magazine-entry-22 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2014-10-27T10:31:38+01:00\" >27. October 2014<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-csar-62-lift-off-for-thick-layers\/' title='Link to: CSAR 62 lift-off for thick layers'>CSAR 62 lift-off for thick layers<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-4690 av-magazine-format-standard av-magazine-type-post av-magazine-entry-23 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2014-10-27T10:25:42+01:00\" >27. October 2014<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-csar-62-thick-layers\/' title='Link to: CSAR 62 thick layers'>CSAR 62 thick layers<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-4535 av-magazine-format-standard av-magazine-type-post av-magazine-entry-24 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2014-06-13T16:35:27+01:00\" >13. June 2014<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-thick-csar-62\/' title='Link to: Thick CSAR 62'>Thick CSAR 62<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-233 av-magazine-format-standard av-magazine-type-post av-magazine-entry-25 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2013-07-09T06:41:16+01:00\" >9. July 2013<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-solvents-in-e-beam-resists\/' title='Link to: Solvents in e-beam resists'>Solvents in e-beam resists<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-232 av-magazine-format-standard av-magazine-type-post av-magazine-entry-26 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2013-02-27T09:46:44+01:00\" >27. February 2013<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-collapse-of-extreme-high-resolution-e-beam-resist-structures\/' title='Link to: Collapse of extreme high-resolution e-beam resist structures'>Collapse of extreme high-resolution e-beam resist structures<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-237 av-magazine-format-standard av-magazine-type-post av-magazine-entry-27 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2012-09-21T13:02:38+01:00\" >21. September 2012<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-two-layer-pmma-e-beam-resist-system-for-high-resolution-lift-off\/' title='Link to: Two-layer PMMA e-beam resist system for high-resolution lift-off'>Two-layer PMMA e-beam resist system for high-resolution lift-off<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-234 av-magazine-format-standard av-magazine-type-post av-magazine-entry-28 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2012-08-31T09:45:00+01:00\" >31. August 2012<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-high-resolution-pmma-one-layer-resist\/' title='Link to: High-resolution PMMA one layer resist'>High-resolution PMMA one layer resist<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-236 av-magazine-format-standard av-magazine-type-post av-magazine-entry-29 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2012-07-13T13:12:07+01:00\" >13. July 2012<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-positive-polyimide-resist-for-e-beam-lithography\/' title='Link to: Positive polyimide resist for e-beam-lithography'>Positive polyimide resist for e-beam-lithography<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div><\/div><\/p><\/div>\n<\/p>\n","protected":false},"excerpt":{"rendered":"<p>CSAR 62 is routinely used to produce innovative quantum devices at the TU Delft (Mr. Toivo Hensgens, TU-Delft, the Netherlands). For the structures shown below, a 72 nm layer of CSAR 62 was exposed to 100 kV and then developed with amyl acetate.<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[108,87],"tags":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v22.5 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Use of CSAR 62 for the manufacture of nanostructures on GaAs<\/title>\n<meta name=\"description\" content=\"CSAR 62 is routinely used to produce innovative quantum devices at the TU Delft (Mr. Toivo Hensgens, TU-Delft, the Netherlands). For the structures shown below, a 72 nm layer of CSAR 62 was exposed to 100 kV and then developed with amyl acetate.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.allresist.com\/resist-wiki-use-of-csar-62-for-the-manufacture-of-nanostructures-on-gaas-substrates\/\" \/>\n<meta property=\"og:locale\" content=\"en_GB\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Use of CSAR 62 for the manufacture of nanostructures on GaAs\" \/>\n<meta property=\"og:description\" content=\"CSAR 62 is routinely used to produce innovative quantum devices at the TU Delft (Mr. Toivo Hensgens, TU-Delft, the Netherlands). For the structures shown below, a 72 nm layer of CSAR 62 was exposed to 100 kV and then developed with amyl acetate.\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.allresist.com\/resist-wiki-use-of-csar-62-for-the-manufacture-of-nanostructures-on-gaas-substrates\/\" \/>\n<meta property=\"og:site_name\" content=\"Allresist EN\" \/>\n<meta property=\"article:published_time\" content=\"2016-07-04T06:46:06+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2022-03-15T11:59:48+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2016\/07\/al-gates-on-gaas-produced-with-csar62-345x132.jpg\" \/>\n<meta name=\"author\" content=\"AllAdmin\" \/>\n<meta name=\"twitter:label1\" content=\"Written by\" \/>\n\t<meta name=\"twitter:data1\" content=\"AllAdmin\" \/>\n\t<meta name=\"twitter:label2\" content=\"Estimated reading time\" \/>\n\t<meta name=\"twitter:data2\" content=\"4 minutes\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.allresist.com\/resist-wiki-use-of-csar-62-for-the-manufacture-of-nanostructures-on-gaas-substrates\/\",\"url\":\"https:\/\/www.allresist.com\/resist-wiki-use-of-csar-62-for-the-manufacture-of-nanostructures-on-gaas-substrates\/\",\"name\":\"Use of CSAR 62 for the manufacture of nanostructures on GaAs\",\"isPartOf\":{\"@id\":\"https:\/\/www.allresist.com\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/www.allresist.com\/resist-wiki-use-of-csar-62-for-the-manufacture-of-nanostructures-on-gaas-substrates\/#primaryimage\"},\"image\":{\"@id\":\"https:\/\/www.allresist.com\/resist-wiki-use-of-csar-62-for-the-manufacture-of-nanostructures-on-gaas-substrates\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2016\/07\/al-gates-on-gaas-produced-with-csar62-345x132.jpg\",\"datePublished\":\"2016-07-04T06:46:06+00:00\",\"dateModified\":\"2022-03-15T11:59:48+00:00\",\"author\":{\"@id\":\"https:\/\/www.allresist.com\/#\/schema\/person\/5d838b413541e18a3d6cbcfc5854bba8\"},\"description\":\"CSAR 62 is routinely used to produce innovative quantum devices at the TU Delft (Mr. Toivo Hensgens, TU-Delft, the Netherlands). 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For the structures shown below, a 72 nm layer of CSAR 62 was exposed to 100 kV and then developed with amyl acetate.","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.allresist.com\/resist-wiki-use-of-csar-62-for-the-manufacture-of-nanostructures-on-gaas-substrates\/","og_locale":"en_GB","og_type":"article","og_title":"Use of CSAR 62 for the manufacture of nanostructures on GaAs","og_description":"CSAR 62 is routinely used to produce innovative quantum devices at the TU Delft (Mr. Toivo Hensgens, TU-Delft, the Netherlands). For the structures shown below, a 72 nm layer of CSAR 62 was exposed to 100 kV and then developed with amyl acetate.","og_url":"https:\/\/www.allresist.com\/resist-wiki-use-of-csar-62-for-the-manufacture-of-nanostructures-on-gaas-substrates\/","og_site_name":"Allresist EN","article_published_time":"2016-07-04T06:46:06+00:00","article_modified_time":"2022-03-15T11:59:48+00:00","og_image":[{"url":"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2016\/07\/al-gates-on-gaas-produced-with-csar62-345x132.jpg"}],"author":"AllAdmin","twitter_misc":{"Written by":"AllAdmin","Estimated reading time":"4 minutes"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/www.allresist.com\/resist-wiki-use-of-csar-62-for-the-manufacture-of-nanostructures-on-gaas-substrates\/","url":"https:\/\/www.allresist.com\/resist-wiki-use-of-csar-62-for-the-manufacture-of-nanostructures-on-gaas-substrates\/","name":"Use of CSAR 62 for the manufacture of nanostructures on GaAs","isPartOf":{"@id":"https:\/\/www.allresist.com\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.allresist.com\/resist-wiki-use-of-csar-62-for-the-manufacture-of-nanostructures-on-gaas-substrates\/#primaryimage"},"image":{"@id":"https:\/\/www.allresist.com\/resist-wiki-use-of-csar-62-for-the-manufacture-of-nanostructures-on-gaas-substrates\/#primaryimage"},"thumbnailUrl":"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2016\/07\/al-gates-on-gaas-produced-with-csar62-345x132.jpg","datePublished":"2016-07-04T06:46:06+00:00","dateModified":"2022-03-15T11:59:48+00:00","author":{"@id":"https:\/\/www.allresist.com\/#\/schema\/person\/5d838b413541e18a3d6cbcfc5854bba8"},"description":"CSAR 62 is routinely used to produce innovative quantum devices at the TU Delft (Mr. Toivo Hensgens, TU-Delft, the Netherlands). 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