{"id":6760,"date":"2017-03-31T11:30:34","date_gmt":"2017-03-31T09:30:34","guid":{"rendered":"https:\/\/www.allresist.de?p=6760"},"modified":"2017-03-31T11:30:34","modified_gmt":"2017-03-31T09:30:34","slug":"eurostar-projekt-ppa-litho-2","status":"publish","type":"post","link":"https:\/\/www.allresist.com\/eurostar-projekt-ppa-litho-2\/","title":{"rendered":"Eurostar-Projekt: PPA-Litho"},"content":{"rendered":"\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_section-fd8201f6b2aad44cdb47764dc28ad5d2\">\n.avia-section.av-av_section-fd8201f6b2aad44cdb47764dc28ad5d2{\nbackground-color:#f0faff;\nbackground-image:unset;\n}\n<\/style>\n<div id='av_section_1'  class='avia-section av-av_section-fd8201f6b2aad44cdb47764dc28ad5d2 main_color avia-section-default avia-no-shadow  avia-builder-el-0  el_before_av_section  avia-builder-el-first  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><main  role=\"main\" itemprop=\"mainContentOfPage\"  class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-6760'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_two_third-6126cab7d8fab8d08143dd2dacdf673c\">\n.flex_column.av-av_two_third-6126cab7d8fab8d08143dd2dacdf673c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_two_third-6126cab7d8fab8d08143dd2dacdf673c av_two_third  avia-builder-el-1  el_before_av_one_third  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-av_textblock-396ddf1f42196ca838231e61a4602801 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h1>Eurostar-Projekt: <strong>PPA-Litho<\/strong><\/h1>\n<\/div><\/section><br \/>\n<section  class='av_textblock_section av-av_textblock-396ddf1f42196ca838231e61a4602801 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p>Laufzeit: 2014 &#8211; 2017<\/p>\n<\/div><\/section><\/p><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_third-c8fc129dc35fd1ae2a1e410224d39ea8\">\n.flex_column.av-av_one_third-c8fc129dc35fd1ae2a1e410224d39ea8{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_third-c8fc129dc35fd1ae2a1e410224d39ea8 av_one_third  avia-builder-el-4  el_after_av_two_third  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><article  class='iconbox iconbox_left av-av_icon_box-a79a53f32fcbd52be5b9e388d475e1b5  avia-builder-el-5  avia-builder-el-no-sibling '  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"iconbox_content\"><header class=\"entry-content-header\"><div class=\"iconbox_icon heading-color\" aria-hidden='true' data-av_icon='\ue831' data-av_iconfont='entypo-fontello'><\/div><h3 class='iconbox_content_title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/rd\/rd-projects\/' title='Zur\u00fcck zur FuE-Projekte-\u00dcbersicht'  >Zur\u00fcck zur FuE-Projekte-\u00dcbersicht<\/a><\/h3><\/header><div class='iconbox_content_container '  itemprop=\"text\" ><\/div><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div>\n\n<\/div><\/div><\/main><!-- close content main element --><\/div><\/div><div id='av_section_2'  class='avia-section av-av_section-4ab2c50611e8bc0ab9af19846c400691 main_color avia-section-default avia-no-shadow  avia-builder-el-6  el_after_av_section  avia-builder-el-last  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-6760'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_half-6126cab7d8fab8d08143dd2dacdf673c\">\n.flex_column.av-av_one_half-6126cab7d8fab8d08143dd2dacdf673c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_half-6126cab7d8fab8d08143dd2dacdf673c av_one_half  avia-builder-el-7  el_before_av_one_fourth  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-av_textblock-396ddf1f42196ca838231e61a4602801 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h3>Gegenstand<\/h3>\n<\/div><\/section><br \/>\n<section  class='av_textblock_section av-av_textblock-396ddf1f42196ca838231e61a4602801 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p>Kommerziell verf\u00fcgbare Resistmaterialien auf Basis von Polyphthalaldehyden f\u00fcr erweitere Lithographie-Anwendungen<\/p>\n<\/div><\/section><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_hr-1deae294de86921cadf9622fb2da0879\">\n#top .hr.hr-invisible.av-av_hr-1deae294de86921cadf9622fb2da0879{\nheight:25px;\n}\n<\/style>\n<div  class='hr av-av_hr-1deae294de86921cadf9622fb2da0879 hr-invisible  avia-builder-el-10  el_after_av_textblock  el_before_av_textblock '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<section  class='av_textblock_section av-av_textblock-396ddf1f42196ca838231e61a4602801 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h3>Ziel<\/h3>\n<\/div><\/section><br \/>\n<section  class='av_textblock_section av-av_textblock-396ddf1f42196ca838231e61a4602801 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p>Entwicklung und sp\u00e4tere Produktion von thermisch strukturierbaren Resists auf der Basis von Polyphthalaldehyden f\u00fcr die Nano-Frazor-Technologie (analog der E-Beam-Technologie)<\/p>\n<\/div><\/section><\/p><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fourth-0aa7055fe62c3622faec82866afbaeb2\">\n.flex_column.av-av_one_fourth-0aa7055fe62c3622faec82866afbaeb2{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fourth-0aa7055fe62c3622faec82866afbaeb2 av_one_fourth  avia-builder-el-13  el_after_av_one_half  el_before_av_one_fourth  flex_column_div av-zero-column-padding  '     ><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_hr-1deae294de86921cadf9622fb2da0879\">\n#top .hr.hr-invisible.av-av_hr-1deae294de86921cadf9622fb2da0879{\nheight:25px;\n}\n<\/style>\n<div  class='hr av-av_hr-1deae294de86921cadf9622fb2da0879 hr-invisible  avia-builder-el-14  el_before_av_image  avia-builder-el-first '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_image-05f2d52b31c822359fe1bcb33d4b6c89\">\n.avia-image-container.av-av_image-05f2d52b31c822359fe1bcb33d4b6c89 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-av_image-05f2d52b31c822359fe1bcb33d4b6c89 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-av_image-05f2d52b31c822359fe1bcb33d4b6c89 av-styling- avia-align-left  avia-builder-el-15  el_after_av_hr  avia-builder-el-last '   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image ' src=\"https:\/\/www.allresist.de\/wp-content\/uploads\/2017\/03\/PPA-Landkarte-Nanofrazor-269x190.jpg\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/p><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fourth-0aa7055fe62c3622faec82866afbaeb2\">\n.flex_column.av-av_one_fourth-0aa7055fe62c3622faec82866afbaeb2{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fourth-0aa7055fe62c3622faec82866afbaeb2 av_one_fourth  avia-builder-el-16  el_after_av_one_fourth  el_before_av_one_half  flex_column_div av-zero-column-padding  '     ><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_hr-1deae294de86921cadf9622fb2da0879\">\n#top .hr.hr-invisible.av-av_hr-1deae294de86921cadf9622fb2da0879{\nheight:25px;\n}\n<\/style>\n<div  class='hr av-av_hr-1deae294de86921cadf9622fb2da0879 hr-invisible  avia-builder-el-17  el_before_av_image  avia-builder-el-first '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_image-ea0777321fdeca87143c8eade3f4f57e\">\n.avia-image-container.av-av_image-ea0777321fdeca87143c8eade3f4f57e img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-av_image-ea0777321fdeca87143c8eade3f4f57e .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-av_image-ea0777321fdeca87143c8eade3f4f57e av-styling- avia-align-left  avia-builder-el-18  el_after_av_hr  avia-builder-el-last '   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image ' src=\"https:\/\/www.allresist.de\/wp-content\/uploads\/2017\/03\/PPA-Prozessbeispiel-Nanofrazor-115x190.jpg\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/p><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_half-6126cab7d8fab8d08143dd2dacdf673c\">\n.flex_column.av-av_one_half-6126cab7d8fab8d08143dd2dacdf673c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_half-6126cab7d8fab8d08143dd2dacdf673c av_one_half  avia-builder-el-19  el_after_av_one_fourth  el_before_av_one_half  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-av_textblock-396ddf1f42196ca838231e61a4602801 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h3>Aktueller Stand<\/h3>\n<\/div><\/section><br \/>\n<section  class='av_textblock_section av-av_textblock-396ddf1f42196ca838231e61a4602801 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p class=\"p1\" style=\"text-align: justify\">Im Rahmen des Projektes wurde von verschiedenen Partnern eine Vielzahl von PPAPolymer-Muster (weit u\u0308ber 100) hergestellt. In den folgenden Arbeitspaketen wurden stets dutzende Muster synthetisiert und untersucht, in dem Bericht werden meist nur die besten\u00a0Ergebnisse dargestellt, die Vielzahl der wenig erfolgreichen Versuche band jedoch auch eine\u00a0Menge Arbeitszeit.<\/p>\n<\/div><\/section><\/p><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_half-0aa7055fe62c3622faec82866afbaeb2\">\n.flex_column.av-av_one_half-0aa7055fe62c3622faec82866afbaeb2{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_half-0aa7055fe62c3622faec82866afbaeb2 av_one_half  avia-builder-el-22  el_after_av_one_half  avia-builder-el-last  flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-av_textblock-396ddf1f42196ca838231e61a4602801 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h3>Kooperationspartner<\/h3>\n<\/div><\/section><br \/>\n<section  class='av_textblock_section av-av_textblock-2de302bf1aa3cf4c9157dbe6f50ac7eb '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><ul>\n<li>SwissLitho AG (Z\u00fcrich, Schweiz)<\/li>\n<li>Institut f\u00fcr D\u00fcnnschichttechnologie und Mikrosensorik e.V. (Teltow)<\/li>\n<li>JOANNEUM RESEARCH Forschungsgesellschaft mbH (Graz, \u00d6sterreich)<\/li>\n<li>Aglycon Dr. Spreitz KG (Allerheiligen, \u00d6sterreich)<\/li>\n<\/ul>\n<\/div><\/section><\/p><\/div>\n\n","protected":false},"excerpt":{"rendered":"<p>Entwicklung von direkt strukturierbaren Resists f\u00fcr Encoder-Scheiben<\/p>\n","protected":false},"author":1,"featured_media":6733,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[46],"tags":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v22.5 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Eurostar-Projekt: PPA-Litho - Allresist EN<\/title>\n<meta name=\"description\" content=\"Eurostar-Projekt: PPA-Litho\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.allresist.com\/eurostar-projekt-ppa-litho-2\/\" \/>\n<meta property=\"og:locale\" content=\"en_GB\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Eurostar-Projekt: PPA-Litho - 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