{"id":6784,"date":"2018-04-25T17:24:14","date_gmt":"2018-04-25T15:24:14","guid":{"rendered":"https:\/\/www.allresist.de\/?p=6784"},"modified":"2022-02-24T09:42:32","modified_gmt":"2022-02-24T08:42:32","slug":"resist-wiki-2l-lift-off-system-ar-p-617-ar-p-8100","status":"publish","type":"post","link":"https:\/\/www.allresist.com\/resist-wiki-2l-lift-off-system-ar-p-617-ar-p-8100\/","title":{"rendered":"2L-Lift-off system AR-P 617 \u2013 AR-P 8100"},"content":{"rendered":"\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-keph5s-8dc2b08750fbaee1482ec352c3eb77cc\">\n.avia-section.av-keph5s-8dc2b08750fbaee1482ec352c3eb77cc{\nbackground-color:#f0faff;\nbackground-image:unset;\n}\n<\/style>\n<div id='av_section_1'  class='avia-section av-keph5s-8dc2b08750fbaee1482ec352c3eb77cc main_color avia-section-default avia-no-shadow  avia-builder-el-0  el_before_av_section  avia-builder-el-first  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><main  role=\"main\" itemprop=\"mainContentOfPage\"  class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-6784'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jg5wn4-cfcf17037dfc60a2e5e9a8f0cc6ae14e\">\n.flex_column.av-jg5wn4-cfcf17037dfc60a2e5e9a8f0cc6ae14e{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-jg5wn4-cfcf17037dfc60a2e5e9a8f0cc6ae14e av_two_third  avia-builder-el-1  el_before_av_one_third  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-gsyhao-f55c61f3695c2a1ab4686ef04b1ae482 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h1>2L-Lift-off-system AR-P 617 \u2013 AR-P 8100<\/h1>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-gc0wuo-b4cda2b900e07907379c0f39a5d88b3a\">\n.flex_column.av-gc0wuo-b4cda2b900e07907379c0f39a5d88b3a{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-gc0wuo-b4cda2b900e07907379c0f39a5d88b3a av_one_third  avia-builder-el-3  el_after_av_two_third  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><article  class='iconbox iconbox_left av-eqxvdc-1842611fcf4f62e69db022b7038f7b9d  avia-builder-el-4  avia-builder-el-no-sibling '  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"iconbox_content\"><header class=\"entry-content-header\"><div class=\"iconbox_icon heading-color\" aria-hidden='true' data-av_icon='\ue831' data-av_iconfont='entypo-fontello'><\/div><h3 class='iconbox_content_title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki\/' title='Back to the Resist Wiki Overview'  >Back to the Resist Wiki Overview<\/a><\/h3><\/header><div class='iconbox_content_container '  itemprop=\"text\" ><\/div><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div><\/div><\/div><\/main><!-- close content main element --><\/div><\/div><div id='av_section_2'  class='avia-section av-cvy6ds-c50a2d803605e1ea4555db83d05fd1a2 main_color avia-section-default avia-no-shadow  avia-builder-el-5  el_after_av_section  avia-builder-el-last  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-6784'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-aofits-ac0311659e891e6313c41e1328ddc905\">\n.flex_column.av-aofits-ac0311659e891e6313c41e1328ddc905{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-aofits-ac0311659e891e6313c41e1328ddc905 av_two_third  avia-builder-el-6  el_before_av_one_third  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-8fwn9c-5d3f2ab009c327ffa39a7e63dd96eb2e '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p>Anisole PPA solutions can be coated on PMMAcoMA 33 (AR-P 617). The single layers add up in this case; no mixing of layers occurs, which is a decisive prerequisite to realise defined 2- or also 3-layer systems.<\/p>\n<p><img decoding=\"async\" class=\"alignnone size-full wp-image-16815\" src=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/1.png\" alt=\"\" width=\"206\" height=\"76\" \/><\/p>\n<p><span class=\"bildunterschrift\">Fig.1: Diagram of two-layer system with PPA and bottom resist AR-P 617<\/span><\/p>\n<p><img decoding=\"async\" class=\"alignnone size-full wp-image-16816\" src=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/2.png\" alt=\"\" width=\"270\" height=\"99\" \/><\/p>\n<p><span class=\"bildunterschrift\">Fig. 2: Undercut changes with increasing development time (schematic representation)<\/span><\/p>\n<p>After coating and soft bake, the upper resist layer (PPA) is scanned with a hot needle (NanoFrazor). With each needle tip, the thermolabile PPA evaporates and thus transfers the desired structures into the layer. During the following lift-off process, the lower layer is at first dissolved isotropically with a solvent mixture, thereby generating the undercut. The duration of the development step and the developer temperature both influence the degree of the undercut decisively. The undercut can thus be easily controlled by these means. First trials with this system were conducted by SwissLitho. Fig. 2 shows the undercut of bottom resist AR-P 617, Fig. 3 the coating structures (top PPA, below the developed AR-P617).<\/p>\n<p>Subsequently, a metal sputtering process is carried out. Only the metal structures remain after the lift-off. This process is however, due to the isotropic development, limited with respect to its resolution properties. So far, metal architectures with a resolution of 30 nm could be realised:<\/p>\n<p><img decoding=\"async\" class=\"alignnone size-full wp-image-16817\" src=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/3.jpg\" alt=\"\" width=\"311\" height=\"233\" srcset=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/3.jpg 311w, https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/3-254x190.jpg 254w\" sizes=\"(max-width: 311px) 100vw, 311px\" \/><\/p>\n<p><span class=\"bildunterschrift\">Fig. 3: Formed undercut of bottom resist AR-P 617<\/span><\/p>\n<p><img decoding=\"async\" class=\"alignnone size-full wp-image-16818\" src=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/4.jpg\" alt=\"\" width=\"313\" height=\"158\" \/><\/p>\n<p><span class=\"bildunterschrift\">Fig. 4: Resist structures (top: PPA; below developed AR-P617)<\/span><\/p>\n<p><img decoding=\"async\" class=\"alignnone size-full wp-image-16819\" src=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/5.png\" alt=\"\" width=\"161\" height=\"163\" srcset=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/5.png 161w, https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/5-80x80.png 80w, https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/5-36x36.png 36w\" sizes=\"(max-width: 161px) 100vw, 161px\" \/><\/p>\n<p><span class=\"bildunterschrift\">Fig.\u00a05: Resist architecture after development<\/span><\/p>\n<p><img decoding=\"async\" class=\"alignnone size-full wp-image-16820\" src=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/02\/6.png\" alt=\"\" width=\"155\" height=\"163\" \/><\/p>\n<p><span class=\"bildunterschrift\">Fig. 6: Metal architecture (nickel, 50 nm layer)<\/span><\/p>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-7kn6a8-52b8eb3eac146fe1d83845e10a8c15ae\">\n.flex_column.av-7kn6a8-52b8eb3eac146fe1d83845e10a8c15ae{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-7kn6a8-52b8eb3eac146fe1d83845e10a8c15ae av_one_third  avia-builder-el-8  el_after_av_two_third  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><p><section  class='av_textblock_section av-5l6340-aabfab488e691c87318948b7a62f5b29 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p>Overview Photoresist Other Resists<\/p>\n<\/div><\/section><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-40i1r4-0da9adc68254ee8aaa90d1d19de044f0\">\n#top .hr.hr-invisible.av-40i1r4-0da9adc68254ee8aaa90d1d19de044f0{\nheight:25px;\n}\n<\/style>\n<div  class='hr av-40i1r4-0da9adc68254ee8aaa90d1d19de044f0 hr-invisible  avia-builder-el-10  el_after_av_textblock  el_before_av_magazine '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<div  id=\"avia-magazine-1\"  class='av-magazine av-1ypl1c-d780f98077d152b1a6ae4d6204e79065  avia-builder-el-11  el_after_av_hr  avia-builder-el-last   avia-builder-el-11  el_after_av_hr  avia-builder-el-last ' ><div class='av-magazine-group sort_all'><article class='av-magazine-entry av-magazine-entry-id-6784 av-magazine-format-standard av-magazine-type-post av-magazine-entry-1 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2018-04-25T17:24:14+01:00\" >25. April 2018<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-2l-lift-off-system-ar-p-617-ar-p-8100\/' title='Link to: 2L-Lift-off system AR-P 617 \u2013 AR-P 8100'>2L-Lift-off system AR-P 617 \u2013 AR-P 8100<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-6349 av-magazine-format-standard av-magazine-type-post av-magazine-entry-2 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2017-01-20T10:03:48+01:00\" >20. January 2017<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-use-of-ppa-in-multilayer-processes\/' title='Link to: Use of PPA in multilayer processes'>Use of PPA in multilayer processes<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-6170 av-magazine-format-standard av-magazine-type-post av-magazine-entry-3 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2016-09-29T14:21:57+01:00\" >29. September 2016<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-manufacture-of-undercut-structures-for-t-gates-in-three-layer-processes\/' title='Link to: Manufacture of undercut structures for T-gates in three-layer processes'>Manufacture of undercut structures for T-gates in three-layer processes<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5564 av-magazine-format-standard av-magazine-type-post av-magazine-entry-4 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2016-01-19T16:48:45+01:00\" >19. January 2016<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki-two-layer-e-beam-resist-system-with-novolacs-as-bottom-resist\/' title='Link to: Two-layer e-beam resist system with novolacs as bottom resist'>Two-layer e-beam resist system with novolacs as bottom resist<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div><\/div><\/p><\/div>\n<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Anisole PPA solutions can be coated on PMMAcoMA 33 (AR-P 617). The single layers add up in this case; no mixing of layers occurs, which is a decisive prerequisite to realise defined 2- or also 3-layer systems.<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[98,91],"tags":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v22.5 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>2L-Lift-off system AR-P 617 \u2013 AR-P 8100 - Allresist EN<\/title>\n<meta name=\"description\" content=\"Anisole PPA solutions can be coated on PMMAcoMA 33 (AR-P 617). 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The single layers add up in this case; no mixing of layers occurs, which is a decisive prerequisite to realise defined 2- or also 3-layer systems.","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.allresist.com\/resist-wiki-2l-lift-off-system-ar-p-617-ar-p-8100\/","og_locale":"en_GB","og_type":"article","og_title":"2L-Lift-off system AR-P 617 \u2013 AR-P 8100 - Allresist EN","og_description":"Anisole PPA solutions can be coated on PMMAcoMA 33 (AR-P 617). 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