{"id":8113,"date":"2018-07-09T08:44:13","date_gmt":"2018-07-09T06:44:13","guid":{"rendered":"https:\/\/www.allresist.de\/?p=6883"},"modified":"2022-03-22T11:37:24","modified_gmt":"2022-03-22T10:37:24","slug":"black-protect-stable-protective-coating-for-hf-and-koh-etchings","status":"publish","type":"post","link":"https:\/\/www.allresist.com\/black-protect-stable-protective-coating-for-hf-and-koh-etchings\/","title":{"rendered":"Black-Protect &#8211; stable protective coating for HF and KOH etchings"},"content":{"rendered":"\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-17adxt-d686848c5c160341ae7042f82a2310bc\">\n.avia-section.av-17adxt-d686848c5c160341ae7042f82a2310bc{\nbackground-color:#f0faff;\nbackground-image:unset;\n}\n<\/style>\n<div id='av_section_1'  class='avia-section av-17adxt-d686848c5c160341ae7042f82a2310bc main_color avia-section-default avia-no-shadow  avia-builder-el-0  el_before_av_section  avia-builder-el-first  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><main  role=\"main\" itemprop=\"mainContentOfPage\"  class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-8113'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-a6hre9-bb2dcdf8c3785f781f274e0adead6e14\">\n.flex_column.av-a6hre9-bb2dcdf8c3785f781f274e0adead6e14{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-a6hre9-bb2dcdf8c3785f781f274e0adead6e14 av_two_third  avia-builder-el-1  el_before_av_one_third  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-ka83ln9k-818d0600abc7edf61a074452fd6b0329 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h1>Black-Protect &#8211; stable protective coating for HF and KOH etchings<\/h1>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-9odbqp-927c1444f15c90c848164758e435f15e\">\n.flex_column.av-9odbqp-927c1444f15c90c848164758e435f15e{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-9odbqp-927c1444f15c90c848164758e435f15e av_one_third  avia-builder-el-3  el_after_av_two_third  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><article  class='iconbox iconbox_left av-ka83mjmp-e2ccea7d9065608bee0ab11689ba0d8e  avia-builder-el-4  avia-builder-el-no-sibling '  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"iconbox_content\"><header class=\"entry-content-header\"><div class=\"iconbox_icon heading-color\" aria-hidden='true' data-av_icon='\ue831' data-av_iconfont='entypo-fontello'><\/div><h3 class='iconbox_content_title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-wiki\/' title='Back to the Rsist Wiki Overview'  >Back to the Rsist Wiki Overview<\/a><\/h3><\/header><div class='iconbox_content_container '  itemprop=\"text\" ><\/div><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div>\n\n<\/div><\/div><\/main><!-- close content main element --><\/div><\/div><div id='av_section_2'  class='avia-section av-6ve7jl-18103a91e614b8c0c64690b2db0613ec main_color avia-section-default avia-no-shadow  avia-builder-el-5  el_after_av_section  avia-builder-el-last  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-8113'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-5e4k1t-709f92ad1b625efb5ced0d708a9f2c2b\">\n.flex_column.av-5e4k1t-709f92ad1b625efb5ced0d708a9f2c2b{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-5e4k1t-709f92ad1b625efb5ced0d708a9f2c2b av_two_third  avia-builder-el-6  el_before_av_one_third  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-ka83muib-a36d86aeecef6b96a9f5e7cf0011349c '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p>Allresist offers the protective coating SX AR-PC 5000\/40 for HF and KOH etchings already for a few years. Layers of 5 \u03bcm are able to withstand a 48 % hydrofluoric acidic solution for several hours. Also 40 % KOH solutions for silicon etchings do not attack the layer. The protective resist is however not particularly temperature-stable. At 65 \u00b0C, melting processes are initiated which make this resist unsuitable for KOH etching at 85 \u00b0C.<\/p>\n<p>For this reason, we developed an improved protective coating. SX AR-PC 5000\/41 (Black-Protect) is stable up to 130 \u00b0C and can thus also be used for KOH etching at 85 \u00b0C. At a sufficiently high thickness of &gt; 5 \u00b5m, the protective layer resists both concentrated hydrofluoric acid and 40 % potassium hydroxide solutions. Prerequisite however is that especially edges are flawlessly coated. This can be achieved with an optimized coating procedure during spin coating. Using an edge covering resist of the EV-group, a very good layer quality can be obtained which is sufficient for back layer protection.<\/p>\n<p>The old protective coating SX AR-PC 5000\/40 could be structured together with a photoresist as two-layer system, and this is also possible with the new resist. The processing of Black-Protect is however easier due to simplified process parameters.<\/p>\n<table>\n<tbody>\n<tr>\n<td>1. Coating SX AR-PC 5000\/41<\/td>\n<td>4.000 rpm, 5 \u00b5m film thickness<\/td>\n<\/tr>\n<tr>\n<td>2. Soft bake<\/td>\n<td>95 \u00b0C, 25 min oven<\/td>\n<\/tr>\n<tr>\n<td>3. Coating AR-P 3250<\/td>\n<td>4.000 rpm, 5 \u00b5m film thickness<\/td>\n<\/tr>\n<tr>\n<td>4. Soft bake<\/td>\n<td>95 \u00b0C, 25 min oven<\/td>\n<\/tr>\n<tr>\n<td>5. Exposure<\/td>\n<td>UV broad band<\/td>\n<\/tr>\n<tr>\n<td>6. Development photoresist<\/td>\n<td>AR 300-26 (3:2 diluted)<\/td>\n<\/tr>\n<tr>\n<td>7. Development protective coating (isotropic)<\/td>\n<td>X AR 300-74\/5 (solvent)<\/td>\n<\/tr>\n<tr>\n<td>8. Removal of photoresists<\/td>\n<td>AR 300-26 undiluted<\/td>\n<\/tr>\n<tr>\n<td>9. Etching<\/td>\n<td>User-specific process<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><img decoding=\"async\" class=\"alignnone size-full wp-image-17012\" src=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/03\/ppppp.jpg\" alt=\"\" width=\"361\" height=\"271\" srcset=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/03\/ppppp.jpg 361w, https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/03\/ppppp-253x190.jpg 253w\" sizes=\"(max-width: 361px) 100vw, 361px\" \/><\/p>\n<p lang=\"en-GB\">Fig. 1 Developed Black-Protect layer, film thickness 5 \u00b5m<\/p>\n<p lang=\"en-GB\">Fig. 1 shows the funnel-shaped edges of developed holes after removal of the photoresist layer. These are due to the isotropic development of Black-Protect; the light-insensitive polymer is quickly evenly removed in all directions which makes e.g. holes slightly larger as compared to the original hole in the photoresist. This effect must be taken into account during the conception of the desired structures.<\/p>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-45jek1-f4503b30a8aec0c057a31b500a94af13\">\n.flex_column.av-45jek1-f4503b30a8aec0c057a31b500a94af13{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-45jek1-f4503b30a8aec0c057a31b500a94af13 av_one_third  avia-builder-el-8  el_after_av_two_third  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-ka83iu82-9783a20acad78a3264e22539a3484a75 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h4 style=\"text-align: left\">Overview Protective Resist<\/h4>\n<\/div><\/section><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1uwni9-096c30103a985771c39f50be80d6060a\">\n#top .hr.hr-invisible.av-1uwni9-096c30103a985771c39f50be80d6060a{\nheight:25px;\n}\n<\/style>\n<div  class='hr av-1uwni9-096c30103a985771c39f50be80d6060a hr-invisible  avia-builder-el-10  el_after_av_textblock  el_before_av_magazine '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<div  id=\"avia-magazine-1\"  class='av-magazine av-ka83j9ag-c7cb7b5e5d391fc0db5101356e5cd780  avia-builder-el-11  el_after_av_hr  avia-builder-el-last   avia-builder-el-11  el_after_av_hr  avia-builder-el-last ' ><div class='av-magazine-group sort_all'><article class='av-magazine-entry av-magazine-entry-id-17017 av-magazine-format-standard av-magazine-type-post av-magazine-entry-1 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-03-22T12:34:13+01:00\" >22. March 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/protective-coating-as-spray-resist-for-the-smoothing-of-surfaces\/' title='Link to: Protective coating as spray resist for the smoothing of surfaces'>Protective coating as spray resist for the smoothing of surfaces<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-8113 av-magazine-format-standard av-magazine-type-post av-magazine-entry-2 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2018-07-09T08:44:13+01:00\" >9. July 2018<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/black-protect-stable-protective-coating-for-hf-and-koh-etchings\/' title='Link to: Black-Protect &#8211; stable protective coating for HF and KOH etchings'>Black-Protect &#8211; stable protective coating for HF and KOH etchings<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-8107 av-magazine-format-standard av-magazine-type-post av-magazine-entry-3 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2018-01-15T11:58:13+01:00\" >15. January 2018<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/sx-ar-pc-5060-f-protect-replacement-for-cytop\/' title='Link to: SX AR-PC 5060 F-Protect (replacement for Cytop)'>SX AR-PC 5060 F-Protect (replacement for Cytop)<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-6196 av-magazine-format-standard av-magazine-type-post av-magazine-entry-4 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2016-10-04T08:14:29+01:00\" >4. October 2016<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/protective-coating-to-prevent-mechanical-damage\/' title='Link to: Protective coating to prevent mechanical damage'>Protective coating to prevent mechanical damage<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-4708 av-magazine-format-standard av-magazine-type-post av-magazine-entry-5 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2014-10-27T10:40:56+01:00\" >27. October 2014<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/pmma-protective-coating-reduction-of-cotton-candy-effect\/' title='Link to: PMMA protective coating: reduction of cotton candy effect'>PMMA protective coating: reduction of cotton candy effect<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-4705 av-magazine-format-standard av-magazine-type-post av-magazine-entry-6 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2014-10-27T10:37:50+01:00\" >27. October 2014<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/safer-solvent-pmma-protective-coating\/' title='Link to: Safer solvent PMMA protective coating'>Safer solvent PMMA protective coating<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-4512 av-magazine-format-standard av-magazine-type-post av-magazine-entry-7 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2014-06-13T16:12:18+01:00\" >13. June 2014<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/improved-protective-coating-sx-ar-pc-5000-31\/' title='Link to: Improved protective coating SX AR-PC 5000\/31'>Improved protective coating SX AR-PC 5000\/31<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-256 av-magazine-format-standard av-magazine-type-post av-magazine-entry-8 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2012-07-16T10:07:24+01:00\" >16. July 2012<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/protective-coating-for-koh-etching\/' title='Link to: Protective coating for KOH-etching'>Protective coating for KOH-etching<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div><\/div><\/p><\/div>\n","protected":false},"excerpt":{"rendered":"<p>Allresist offers the protective coating SX AR-PC 5000\/40 for HF and KOH etchings already for a few years. Layers of 5 \u03bcm are able to withstand a 48 % hydrofluoric acidic solution for several hours. Also 40 % KOH solutions for silicon etchings do not attack the layer. <\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[55,56],"tags":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v22.5 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Black-Protect - stable protective coating for HF and KOH etchings - Allresist EN<\/title>\n<meta name=\"description\" content=\"Black-Protect - stable protective coating for HF and KOH etchings\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.allresist.com\/black-protect-stable-protective-coating-for-hf-and-koh-etchings\/\" \/>\n<meta property=\"og:locale\" content=\"en_GB\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Black-Protect - stable protective coating for HF and KOH etchings - Allresist EN\" \/>\n<meta property=\"og:description\" content=\"Black-Protect - stable protective coating for HF and KOH etchings\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.allresist.com\/black-protect-stable-protective-coating-for-hf-and-koh-etchings\/\" \/>\n<meta property=\"og:site_name\" content=\"Allresist EN\" \/>\n<meta property=\"article:published_time\" content=\"2018-07-09T06:44:13+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2022-03-22T10:37:24+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/03\/ppppp.jpg\" \/>\n<meta name=\"author\" content=\"AllAdmin\" \/>\n<meta name=\"twitter:label1\" content=\"Written by\" \/>\n\t<meta name=\"twitter:data1\" content=\"AllAdmin\" \/>\n\t<meta name=\"twitter:label2\" content=\"Estimated reading time\" \/>\n\t<meta name=\"twitter:data2\" content=\"5 minutes\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.allresist.com\/black-protect-stable-protective-coating-for-hf-and-koh-etchings\/\",\"url\":\"https:\/\/www.allresist.com\/black-protect-stable-protective-coating-for-hf-and-koh-etchings\/\",\"name\":\"Black-Protect - stable protective coating for HF and KOH etchings - Allresist EN\",\"isPartOf\":{\"@id\":\"https:\/\/www.allresist.com\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/www.allresist.com\/black-protect-stable-protective-coating-for-hf-and-koh-etchings\/#primaryimage\"},\"image\":{\"@id\":\"https:\/\/www.allresist.com\/black-protect-stable-protective-coating-for-hf-and-koh-etchings\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/03\/ppppp.jpg\",\"datePublished\":\"2018-07-09T06:44:13+00:00\",\"dateModified\":\"2022-03-22T10:37:24+00:00\",\"author\":{\"@id\":\"https:\/\/www.allresist.com\/#\/schema\/person\/5d838b413541e18a3d6cbcfc5854bba8\"},\"description\":\"Black-Protect - stable protective coating for HF and KOH etchings\",\"breadcrumb\":{\"@id\":\"https:\/\/www.allresist.com\/black-protect-stable-protective-coating-for-hf-and-koh-etchings\/#breadcrumb\"},\"inLanguage\":\"en-GB\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.allresist.com\/black-protect-stable-protective-coating-for-hf-and-koh-etchings\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"en-GB\",\"@id\":\"https:\/\/www.allresist.com\/black-protect-stable-protective-coating-for-hf-and-koh-etchings\/#primaryimage\",\"url\":\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/03\/ppppp.jpg\",\"contentUrl\":\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2022\/03\/ppppp.jpg\",\"width\":361,\"height\":271},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.allresist.com\/black-protect-stable-protective-coating-for-hf-and-koh-etchings\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\/\/www.allresist.com\/home\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Black-Protect &#8211; 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