{"id":8117,"date":"2018-10-21T05:16:45","date_gmt":"2018-10-21T03:16:45","guid":{"rendered":"https:\/\/www.allresist.de\/?p=6947"},"modified":"2020-05-20T11:35:43","modified_gmt":"2020-05-20T10:35:43","slug":"resist-of-the-month-october-2","status":"publish","type":"post","link":"https:\/\/www.allresist.com\/resist-of-the-month-october-2\/","title":{"rendered":"Resist of the Month of October: Medusa 82 \u2013 alternative to HSQ"},"content":{"rendered":"\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lvxvdx-01e95a217c5a6b3df536e8041eee0c49\">\n.avia-section.av-lvxvdx-01e95a217c5a6b3df536e8041eee0c49{\nbackground-color:#f0faff;\nbackground-image:unset;\n}\n<\/style>\n<div id='av_section_1'  class='avia-section av-lvxvdx-01e95a217c5a6b3df536e8041eee0c49 main_color avia-section-default avia-no-shadow  avia-builder-el-0  el_before_av_section  avia-builder-el-first  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><main  role=\"main\" itemprop=\"mainContentOfPage\"  class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-8117'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-l1jwo5-23cc5a20e5b14aa6d0eb0ddd641b8375\">\n.flex_column.av-l1jwo5-23cc5a20e5b14aa6d0eb0ddd641b8375{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-l1jwo5-23cc5a20e5b14aa6d0eb0ddd641b8375 av_two_third  avia-builder-el-1  el_before_av_one_third  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-jt743p-8c50d5a5a62002f9dd5158adb5fe6a35 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h1>Resist of the Month of October: Medusa 82 \u2013 alternative to HSQ<\/h1>\n<\/div><\/section><br \/>\n<section  class='av_textblock_section av-1rfp1x-65513e4ec9a0539d5c3402048ee322d3 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p><em>Oktober 2018<\/em><\/p>\n<\/div><\/section><\/p><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-fl4d1x-616668fc25fedd6d1f52d4f4617309cd\">\n.flex_column.av-fl4d1x-616668fc25fedd6d1f52d4f4617309cd{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-fl4d1x-616668fc25fedd6d1f52d4f4617309cd av_one_third  avia-builder-el-4  el_after_av_two_third  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><article  class='iconbox iconbox_left av-e5nv8l-ea5d6af03b813dab6264331f7dadcfcf  avia-builder-el-5  avia-builder-el-no-sibling '  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"iconbox_content\"><header class=\"entry-content-header\"><div class=\"iconbox_icon heading-color\" aria-hidden='true' data-av_icon='\ue831' data-av_iconfont='entypo-fontello'><\/div><h3 class='iconbox_content_title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/allresist\/press\/resist-of-the-month\/' title='Back to the Resist of the Month Overview'  >Back to the Resist of the Month Overview<\/a><\/h3><\/header><div class='iconbox_content_container '  itemprop=\"text\" ><\/div><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div><\/div><\/div><\/main><!-- close content main element --><\/div><\/div><div id='av_section_2'  class='avia-section av-1aqwyt-b4e67225c1c9c6c78514832e86feb390 main_color avia-section-default avia-no-shadow  avia-builder-el-6  el_after_av_section  avia-builder-el-last  avia-bg-style-scroll container_wrap fullsize'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-8117'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-bi7v91-9736f9aaaa6e1d8f38fa05dd38f655c4\">\n.flex_column.av-bi7v91-9736f9aaaa6e1d8f38fa05dd38f655c4{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-bi7v91-9736f9aaaa6e1d8f38fa05dd38f655c4 av_two_third  avia-builder-el-7  el_before_av_one_third  avia-builder-el-first  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-8x38t1-78da0251b67d97ad4e30c9cee83c677a '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p class=\"p1\">According to Greek mythology, one look at the Greek goddess Medusa 82 turned everyone to stone. E-beam resist Medusa 82 has quite similar properties; upon electron beam irradiation of the Medusa 82 polymer silsesquioxane, structures of SiO<sub>2<\/sub>\u00a0(sandstone) are formed, which offers many promising applications.<\/p>\n<p class=\"p2\">The long-established HSQ resists show excellent resolution and etch stability, but these advantageous properties come along with a low sensitivity and high process instability. In addition, HSQ must be processed very quickly to obtain reproducible results.<\/p>\n<p class=\"p3\">Allresist now developed Medusa 82 as an alternative to HSQ resists. Due to a modification of the polymer, resist Medusa 82 can be handled very easily. A time span of a few days between coating, irradiation and development is now possible without any losses in quality. Sensitivity, etching behaviour and resolution otherwise corresponds to the properties of HSQ resists.<\/p>\n<p><a class=\"fancybox image\" href=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2018\/09\/medusa.jpg\"><img decoding=\"async\" class=\"alignnone size-full wp-image-3581\" src=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2018\/09\/medusa.jpg\" sizes=\"(max-width: 324px) 100vw, 324px\" srcset=\"https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2018\/09\/medusa.jpg 324w, https:\/\/www.allresist.com\/wp-content\/uploads\/sites\/2\/2018\/09\/medusa-252x190.jpg 252w\" alt=\"\" width=\"324\" height=\"244\" \/><\/a><\/p>\n<p class=\"p5\">11 nm lines with Medusa 82 at a dose of 1250 \u00b5C\/cm\u00b2, 30 kV, Raith GmbH<\/p>\n<p class=\"p3\">For a new variant of this resist, the sensitivity could even be increased by a factor of 20. Due to the addition of a photoacid generator, now only 60\u00a0<span class=\"s1\">\u03bc<\/span>C\/cm\u00b2 are required to achieve complete cross-linking. It is a small sensation that particularly highly etch-resistant masks can now be written about 20 times faster than before. Our research project is almost finished; all results will be presented by Allresist at the MNE in Copenhagen on 24 September 2018.<\/p>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-7douyt-ca73a4da707c63bb2eac0bfe478100c6\">\n.flex_column.av-7douyt-ca73a4da707c63bb2eac0bfe478100c6{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-7douyt-ca73a4da707c63bb2eac0bfe478100c6 av_one_third  avia-builder-el-9  el_after_av_two_third  avia-builder-el-last  flex_column_div av-zero-column-padding  '     ><p><section  class='av_textblock_section av-677kyd-aabd21b7925c3fd4e22e4a1ef5284b3b '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p>More resists of the month<\/p>\n<\/div><\/section><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4rp5p1-36fc3cf8549b5456d7a50769ff9f80cb\">\n#top .hr.hr-invisible.av-4rp5p1-36fc3cf8549b5456d7a50769ff9f80cb{\nheight:25px;\n}\n<\/style>\n<div  class='hr av-4rp5p1-36fc3cf8549b5456d7a50769ff9f80cb hr-invisible  avia-builder-el-11  el_after_av_textblock  el_before_av_magazine '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<div  id=\"avia-magazine-1\"  class='av-magazine av-3a2uyd-7f9d5ffcc210eac6d87756c6b911a5d3  avia-builder-el-12  el_after_av_hr  avia-builder-el-last   avia-builder-el-12  el_after_av_hr  avia-builder-el-last ' ><div class='av-magazine-group sort_all'><article class='av-magazine-entry av-magazine-entry-id-18277 av-magazine-format-standard av-magazine-type-post av-magazine-entry-1 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2024-01-29T16:10:05+01:00\" >29. January 2024<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/january-2024-electra-92-established-on-the-market-ar-pc-5092-02\/' title='Link to: January 2024: Electra 92 established on the market &#8211; AR-PC 5092.02'>January 2024: Electra 92 established on the market &#8211; AR-PC 5092.02<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-18157 av-magazine-format-standard av-magazine-type-post av-magazine-entry-2 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2023-10-06T09:34:21+01:00\" >6. October 2023<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/october-2023-medusa-84-sih-sx-ar-n-8400-another-alternative-to-hsq\/' title='Link to: October 2023: Medusa 84 SiH &#8211; SX AR-N 8400 another alternative to HSQ'>October 2023: Medusa 84 SiH &#8211; SX AR-N 8400 another alternative to HSQ<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-17973 av-magazine-format-standard av-magazine-type-post av-magazine-entry-3 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2023-04-24T22:21:44+01:00\" >24. April 2023<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/april-2023-e-beam-pmma-resist-ar-p-672-045-the-workhorse-for-electron-beam-lithography\/' title='Link to: April 2023: E-beam PMMA resist AR-P 672.045 \u2013 the workhorse for electron beam lithography'>April 2023: E-beam PMMA resist AR-P 672.045 \u2013 the workhorse for electron beam lithography<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-17925 av-magazine-format-standard av-magazine-type-post av-magazine-entry-4 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2023-01-15T22:49:09+01:00\" >15. January 2023<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/standard-resist-ar-p-3510-30-years-on-the-world-market\/' title='Link to: January 2023: Standard resist AR-P 3510 \u2013 30 years on the world market'>January 2023: Standard resist AR-P 3510 \u2013 30 years on the world market<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-17875 av-magazine-format-standard av-magazine-type-post av-magazine-entry-5 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-10-19T23:26:01+01:00\" >19. October 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/october-2022-optimised-electra-92-a-new-ar-pc-5092\/' title='Link to: October 2022: Optimised Electra 92 &#8211; a new AR-PC 5092'>October 2022: Optimised Electra 92 &#8211; a new AR-PC 5092<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-17590 av-magazine-format-standard av-magazine-type-post av-magazine-entry-6 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-07-04T10:02:43+01:00\" >4. July 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/july-2022-our-resist-triplet-of-the-month-presented-at-the-triple-beam-eipbn-2022\/' title='Link to: July 2022: Our resist triplet of the month &#8211; presented at the Triple-Beam (EIPBN 2022)'>July 2022: Our resist triplet of the month &#8211; presented at the Triple-Beam (EIPBN 2022)<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-17054 av-magazine-format-standard av-magazine-type-post av-magazine-entry-7 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-04-04T11:57:14+01:00\" >4. April 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/april-2022-new-environmentally-friendly-developer-for-pmma-resists-ar-600-57\/' title='Link to: April 2022: New environmentally friendly developer for PMMA resists AR 600-57'>April 2022: New environmentally friendly developer for PMMA resists AR 600-57<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-16731 av-magazine-format-standard av-magazine-type-post av-magazine-entry-8 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2022-01-13T22:39:50+01:00\" >13. January 2022<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/january-2022-versatile-phoenix-81-ar-p-8100\/' title='Link to: January 2022: Versatile Phoenix 81 (AR-P 8100)'>January 2022: Versatile Phoenix 81 (AR-P 8100)<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-16477 av-magazine-format-standard av-magazine-type-post av-magazine-entry-9 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2021-10-01T06:43:19+01:00\" >1. October 2021<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/october-2021-more-efficient-production-of-electra-92\/' title='Link to: October 2021: More efficient production of Electra 92'>October 2021: More efficient production of Electra 92<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-16296 av-magazine-format-standard av-magazine-type-post av-magazine-entry-10 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2021-07-06T11:41:20+01:00\" >6. July 2021<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/july-2021-car-44-for-galvanic-molding\/' title='Link to: July 2021: CAR 44 for galvanic molding'>July 2021: CAR 44 for galvanic molding<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-16188 av-magazine-format-standard av-magazine-type-post av-magazine-entry-11 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2021-03-30T19:29:50+01:00\" >30. March 2021<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/april-2021-csar-62-in-demand-around-the-world\/' title='Link to: April 2021: CSAR 62 \u2013 In demand around the world'>April 2021: CSAR 62 \u2013 In demand around the world<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-16141 av-magazine-format-standard av-magazine-type-post av-magazine-entry-12 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2021-01-20T21:51:16+01:00\" >20. January 2021<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/january-2021-optimised-process-for-negative-photoresist-atlas-46\/' title='Link to: January 2021: Optimised process for negative photoresist Atlas 46'>January 2021: Optimised process for negative photoresist Atlas 46<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-15900 av-magazine-format-standard av-magazine-type-post av-magazine-entry-13 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2020-07-28T12:32:26+01:00\" >28. July 2020<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/july-2020-bottom-resist-ar-br-5400-the-workhorse-for-two-layer-processes\/' title='Link to: July 2020: Bottom resist AR-BR 5400, the \u201cworkhorse\u201d for two-layer processes'>July 2020: Bottom resist AR-BR 5400, the \u201cworkhorse\u201d for two-layer processes<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-10620 av-magazine-format-standard av-magazine-type-post av-magazine-entry-14 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2020-02-25T08:45:28+01:00\" >25. February 2020<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-january-2020\/' title='Link to: January 2020: Black resist SX AR-N 8355\/7'>January 2020: Black resist SX AR-N 8355\/7<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-10024 av-magazine-format-standard av-magazine-type-post av-magazine-entry-15 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2019-10-22T14:59:48+01:00\" >22. October 2019<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-ocotber-2019\/' title='Link to: Oktober 2019: Medusa 82 UV'>Oktober 2019: Medusa 82 UV<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-10027 av-magazine-format-standard av-magazine-type-post av-magazine-entry-16 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2019-04-22T15:08:30+01:00\" >22. April 2019<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-april-2019\/' title='Link to: April 2019: Phoenix 81'>April 2019: Phoenix 81<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-8117 av-magazine-format-standard av-magazine-type-post av-magazine-entry-17 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2018-10-21T05:16:45+01:00\" >21. October 2018<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-october-2\/' title='Link to: Resist of the Month of October: Medusa 82 \u2013 alternative to HSQ'>Resist of the Month of October: Medusa 82 \u2013 alternative to HSQ<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-8111 av-magazine-format-standard av-magazine-type-post av-magazine-entry-18 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2018-07-03T07:29:32+01:00\" >3. July 2018<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-july\/' title='Link to: Resist of the Month July: Medusa 82 \u2013 the alternative to HSQ-resists'>Resist of the Month July: Medusa 82 \u2013 the alternative to HSQ-resists<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-8108 av-magazine-format-standard av-magazine-type-post av-magazine-entry-19 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2018-04-06T08:53:10+01:00\" >6. April 2018<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-april-2\/' title='Link to: Resist of the month of April: Fluorescent negative photoresist Atlas 46 S'>Resist of the month of April: Fluorescent negative photoresist Atlas 46 S<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-6648 av-magazine-format-standard av-magazine-type-post av-magazine-entry-20 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2018-01-02T10:03:52+01:00\" >2. January 2018<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-january\/' title='Link to: Resist of the month January: SU 8 alternative \u2013 negative photoresist Atlas 46'>Resist of the month January: SU 8 alternative \u2013 negative photoresist Atlas 46<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-8101 av-magazine-format-standard av-magazine-type-post av-magazine-entry-21 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2017-09-18T16:52:03+01:00\" >18. September 2017<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-october\/' title='Link to: Resist of the month of October: Fluorescent resist structures with SX AR-P 672.08'>Resist of the month of October: Fluorescent resist structures with SX AR-P 672.08<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-8098 av-magazine-format-standard av-magazine-type-post av-magazine-entry-22 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2017-04-03T10:19:35+01:00\" >3. April 2017<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-april\/' title='Link to: Resist of the month April \u2013 Thermally developable positive resist Phoenix 81'>Resist of the month April \u2013 Thermally developable positive resist Phoenix 81<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-8096 av-magazine-format-standard av-magazine-type-post av-magazine-entry-23 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2017-01-02T09:43:30+01:00\" >2. January 2017<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-january-2017-2\/' title='Link to: Resist of the month January 2017: Optimised negative spray resist AR-N 2200'>Resist of the month January 2017: Optimised negative spray resist AR-N 2200<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-6185 av-magazine-format-standard av-magazine-type-post av-magazine-entry-24 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2016-10-01T08:00:05+01:00\" >1. October 2016<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-october-2016\/' title='Link to: Resist of the month October 2016: Optimised T-gate structures with three-layer system PMMA, copolymer 617 and CSAR 62'>Resist of the month October 2016: Optimised T-gate structures with three-layer system PMMA, copolymer 617 and CSAR 62<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-6087 av-magazine-format-standard av-magazine-type-post av-magazine-entry-25 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2016-07-01T13:18:08+01:00\" >1. July 2016<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-july-2016\/' title='Link to: Resist of the month July 2016: Negative PMMA resist for photolithography'>Resist of the month July 2016: Negative PMMA resist for photolithography<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5484 av-magazine-format-standard av-magazine-type-post av-magazine-entry-26 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2016-01-01T14:46:53+01:00\" >1. January 2016<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-january-2016\/' title='Link to: Resist of the month January 2016: Electra 92 has now gone into production!'>Resist of the month January 2016: Electra 92 has now gone into production!<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5341 av-magazine-format-standard av-magazine-type-post av-magazine-entry-27 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-10-01T09:00:27+01:00\" >1. October 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-october-2015-e-beamlithographie-auf-glas-csar62-electra92\/' title='Link to: Resist of the month October 2015: E-beam lithography on glass \u2013 CSAR 62 and Electra 92'>Resist of the month October 2015: E-beam lithography on glass \u2013 CSAR 62 and Electra 92<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-5133 av-magazine-format-standard av-magazine-type-post av-magazine-entry-28 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-07-01T10:24:21+01:00\" >1. July 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-july-2015\/' title='Link to: Resist of the month Juli 2015: Process-adapted two-layer resist AR-BR 5460'>Resist of the month Juli 2015: Process-adapted two-layer resist AR-BR 5460<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-4935 av-magazine-format-standard av-magazine-type-post av-magazine-entry-29 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-04-01T10:29:12+01:00\" >1. April 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-april-2015\/' title='Link to: Resist of the month April 2015: High-sensitivity negative resist AR-N 4400-10'>Resist of the month April 2015: High-sensitivity negative resist AR-N 4400-10<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-4899 av-magazine-format-standard av-magazine-type-post av-magazine-entry-30 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2015-01-01T11:53:05+01:00\" >1. January 2015<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-january-2015\/' title='Link to: Resist of the month January 2015: High temperature-resistant positive resist'>Resist of the month January 2015: High temperature-resistant positive resist<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-4668 av-magazine-format-standard av-magazine-type-post av-magazine-entry-31 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2014-10-01T18:44:37+01:00\" >1. October 2014<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-ocotber-2014\/' title='Link to: Resist of the month October 2014: Safer solvent'>Resist of the month October 2014: Safer solvent<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-4586 av-magazine-format-standard av-magazine-type-post av-magazine-entry-32 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2014-07-01T02:11:55+01:00\" >1. July 2014<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-july-2014\/' title='Link to: Resist of the month July 2014: Electra 92'>Resist of the month July 2014: Electra 92<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-4307 av-magazine-format-standard av-magazine-type-post av-magazine-entry-33 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2014-04-01T11:33:57+01:00\" >1. April 2014<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-april-2014\/' title='Link to: Resist of the Month Archive: April 2014'>Resist of the Month Archive: April 2014<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-193 av-magazine-format-standard av-magazine-type-post av-magazine-entry-34 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2013-10-01T10:36:17+01:00\" >1. October 2013<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-october-2013\/' title='Link to: Resist of the Month Archive: October 2013'>Resist of the Month Archive: October 2013<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-191 av-magazine-format-standard av-magazine-type-post av-magazine-entry-35 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2013-07-01T12:32:57+01:00\" >1. July 2013<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-july-2013\/' title='Link to: Resist of the month July 2013: Thermally stable two-layer system \u2013 SX AR-N 4340\/10 \u2013 AR-P 5460'>Resist of the month July 2013: Thermally stable two-layer system \u2013 SX AR-N 4340\/10 \u2013 AR-P 5460<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-183 av-magazine-format-standard av-magazine-type-post av-magazine-entry-36 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2013-04-01T10:03:30+01:00\" >1. April 2013<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-april-2013\/' title='Link to: Resist of the month April 2013: Positive e-beam resist CSAR 62 \u2013 an alternative to ZEP 520'>Resist of the month April 2013: Positive e-beam resist CSAR 62 \u2013 an alternative to ZEP 520<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-184 av-magazine-format-standard av-magazine-type-post av-magazine-entry-37 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2013-01-01T13:19:40+01:00\" >1. January 2013<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-january-2013\/' title='Link to: Resist of the month January 2013: Negative p hotoresists SX AR-N 4340\/8 \u2013 a resist for laser interference lithography (LIL)'>Resist of the month January 2013: Negative p hotoresists SX AR-N 4340\/8 \u2013 a resist for laser interference lithography (LIL)<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><article class='av-magazine-entry av-magazine-entry-id-192 av-magazine-format-standard av-magazine-type-post av-magazine-entry-38 av-magazine-entry-small av-magazine-no-thumb'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class=\"av-magazine-content-wrap\"><header class=\"entry-content-header\"><time class='av-magazine-time updated'  itemprop=\"datePublished\" datetime=\"2012-10-01T12:35:30+01:00\" >1. October 2012<\/time><h3 class='av-magazine-title entry-title '  itemprop=\"headline\" ><a href='https:\/\/www.allresist.com\/resist-of-the-month-october-2012\/' title='Link to: Resist of the month October 2012: Negative photoresists AR-N 4400 \u2013 with optimized bake regime'>Resist of the month October 2012: Negative photoresists AR-N 4400 \u2013 with optimized bake regime<\/a><\/h3><\/header><\/div><footer class=\"entry-footer\"><\/footer><\/article><\/div><\/div><\/p><\/div><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Allresist now developed Medusa 82 as an alternative to HSQ resists. Due to a modification of the polymer, resist Medusa 82 can be handled very easily.<\/p>\n","protected":false},"author":1,"featured_media":8690,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[35,53],"tags":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v22.5 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Resist of the Month of October: Medusa 82 \u2013 alternative to HSQ - Allresist EN<\/title>\n<meta name=\"description\" content=\"Resist of the Month of October: Medusa 82 \u2013 alternative to HSQ\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.allresist.com\/resist-of-the-month-october-2\/\" \/>\n<meta property=\"og:locale\" content=\"en_GB\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Resist of the Month of October: Medusa 82 \u2013 alternative to HSQ - 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