All resists we offer as well as a large number of process chemicals contain organic solvents. When handling these products, provisions of the Ordinance on Hazardous Substances are to be complied with. The safety data sheets of our products are intended to provide required data and handling recommendations for the user to take effective measures for health protection, workplace safety and environmental protection.
Correct dilution of resists (see “Dilution of resists”) Resists are mainly composed of solvents. The majority of photoresists and the negative-tone e-beam resists utilize PGMEA (PMA)