Development cascade
The use of a cascade is recommended for optimum performance of the developer and for the highest cleanliness during immersion development. The development often takes place in only one container.
New AR 300-80 and contact angle measurement
In addition to the established adhesion promoter AR 300-80 (which is based on diphenylsilanediol), also other silicone-containing compounds may be used to render hydrophilic surfaces more hydrophobic.
Additional new experimental developers for AR-P 617
For some applications are universal developers of advantage, i.e. developers which are simultaneously well suited for a variety of resist families. Multilayer systems can in this case be developed in one step, and no change of the developer in between is required.
New developers for PMMAcoMA (AR-P 617, 50 kV)
X AR 600-50/2 is a new, very sensitive and highly selective developer for AR-P 617. The dark erosion is very low even at longer development times. Layers of PMMA or CSAR 62 are not attacked, which is especially important for multi-layer processes.
Evaluation of various developers for e-beam exposed CSAR 62 layers (100 kV)
To evaluate the suitability of various developers for CSAR 62, Dr. Lothar Hahn (Karlsruhe Institute of Technology (KIT), Institute of Microstructure Technology) kindly provided various substrates which had previously been exposed to 100 kV e-beam irradiation (dose variations).
New developers for AR-P 617
Our highly sensitive e-beam resist AR-P 617 is frequently used in two-layer processes, mostly in combination with PMMA, for the production of lift-off architectures like e.g. T-gates.
Alkaline developers for aluminium substrates
Some of our customers use alkali-sensitive aluminium substrates. This leads to problems if the metal surface should not be etched in this process.
New developer for AR-P 5320
In our product information, we recommend developer AR 300-26 for the development of AR-P 5320, our positive photoresist for lift-off applications. A few users however prefer to work with MIF-developers.
Developer AR 300-35 for alkali-sensitive substrates
The use of aqueous-alkaline developers on alkali-sensitive substrates like aluminium is problematic, because the substrate is similarly attacked during the development step.
New safer solvent remover AR 300-76
A further new development, the likewise universally applicable remover AR 300-76, is characterized by a much higher flash point of 103°C as compared to AR 600-71.