New solvent remover
A new strong solvent remover AR 600-71 consisting of 1.3-dioxolane and 1-methoxy-2-propanol is able to solve resist layers tempered at room temperature. It is remarkable that the remover takes the same effect on novolak based as well as PMMA based resists and thus is suited for versatile applications. It must be pointed out, however, that the flash point of the remover is below 21 °C and therefore needs to be handled with care.