Forays through the lithography of microelectronics

Author: Matthias Schirmer

Introductory Remarks

Due to the fast-paced development of photolithography since the 1990s, only a short summary of the different techniques and applications can be given here. For in-depth information on the multitude of facts, technologies and procedures presented in each chapter, the added references should be consulted.

As of: 2020-01-27